HRX-OM-W038

2 Names of each part Table 2-1 Accessories list 1 Alarm code list label 1pc. 2pcs. 2 Operation Manual (Jpn: 1pc.

HRX-OM-Y098

Alarms that allow continuous pump operation are shown in Table 5.4-18 Alarms that allow continuous pump operation (1/2) and Table 5.4-19 Alarms that allow continuous pump operation (2/2).

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SOL.A 1 station 2 stations 3 stations 4 stations 1 () SOL.A 14 () SOL.A 2 () 1 SOL.A 14 15 () 2 SOL.A 15 3 () 3 4 5 6 7 8 9 10 11 12 13 5 stations 16 17 18 19 20 21 22 23 24 25 SOL.B 16 () SOL.A 4 () 6 stations SOL.B 17 () SOL.A 5 () 7 stations SOL.B 18 () SOL.A 6 () 8 stations SOL.B 19 () COM. 13 (+) Connector terminal no.

CJ2

2 !3 !

MHF2

MHF2-8D2 MHF2-8D1 MHF2-8D 2 pieces/unit MHF2-8D Seal kit 12, 20, 21 MHF-B08 MHF8-PS-2 MHF8-PS MHF8-PS 2 pieces/unit MHF2-8D1 Finger assembly 3, 4, 5, 6, 15, 17, 19 Mounting screw MHF-A0802-2 MHF-A0802-1 MHF-A0802 4 pieces/unit MHF2-8D2 The bolts for body through hole mounting are attached to the product.

HRL

2 Input External switch signal1 17 None Cannot be connected3 18 Common of contact output signal 6 Output 19 Contact output signal 2 Output Operation stop FLT alarm signal [N.C. type] (fix)2 20 Contact output signal 4 Output OFF1 21 None Cannot be connected3 22 Common of analog output signal 2 Output 23 Common of analog output signal 1 Output 24 None Cannot be connected3 25 None Cannot

CNG

(mounted on different sides) 2 pcs. (mounted on same side) 1 pc. 2 pcs. (mounted on different sides) 2 pcs. (mounted on same side) 1 pc.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

actuation Port size {2(A) port} (A) 2 N.C.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2 3 3 4 5 GA 18 18 19 19 48 73 80 105 HA 39 39 48 58 45 52 88 88 I 12 12 12 12 20 15 18 23 J 40 40 50 60 68 105 145 165 K 28 38 48 58 68 93 118 143 KA 91 123 166 191 NA 4 4 4 4 8 8 8 8 M 78 78 88 98 114 146 189 214 Z 77 77 87 97 113 145 188 213 ZZ 109 109 119 129 145 177 220 245 13-/22-MXQ16L10 13-/22-MXQ16L20 13

PC Wiring System Series PCW

Refer to the page 58 for details. 4.5 5 5 Circuit Diagram PCW-EC08Z00 PCW-EC08Z01 2 4 6 8 10 12 14 20 16 18 Power supply terminal block Input/output connector (CS0) 1 3 5 7 9 11 13 15 17 19 14 8 4 2 6 20 16 18 10 12 Input/output connector (CS1) 13 1 3 5 7 9 11 19 15 17 Green Red Connection 1 1 1 1 1 1 1 1 2 2 2 3 4 3 4 CN2 CN3 2 2 2 3 4 CN5 2 2 1 3 3 3 4 CN4 3 4 3 4 CN6 24VDC 4 CN1 4 2 *S2

Cylinder with Lock Series CNG

(mounted on different sides) 2 pcs. (mounted on same side) 1 pc. 2 pcs. (mounted on different sides) 2 pcs. (mounted on same side) 1 pc.

Clean Regulator/Fluororesin Type

ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer

Guide Cylinder Series MGG

80 100 63 80 100 300mm or more 350 to 1100 308 107 54 86 108 192 30 72 14 29 Rc 1/4 119 M12 x 1.75 depth 23 16 400mm or more 350 to 1200 355 131 66 104 128 224 35 89 19 40 Rc 3/8 145 M12 x 1.75 depth 28 23 500mm or more 350 to 1300 410 131 66 128 143 262 40 110 19 40 Rc 1/2 145 23 M14 x 2 depth 30 18 Series MGG Dimensions Front mounting flange type/MGGF 20 to 50 M N Bracket (See table below

70astamb1

37 12.2 14.2 19 19 23 27 4 4 5 9 12 14 15 10.5 11.5 17 6-7-20

mb1

2 (2 pcs.), !3, !4, !6 NCA Specifications DSeal kit includes !2 to !4, !6. Order the seal kit, based on each bore size.

Square Tube Type Air Cylinder Series MB1

84 94 94 114 114 1/8 1/4 1/4 3/8 3/8 1/2 26.5 26.5 31 31 37.5 37.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M6 x 1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 4 4 5 5 5 5 to 500 to 500 to 600 to 600 to 750 to 750 19.5 27 32 32 37 37 12.2 14.2 19 19 23 27 18

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

2 !2 !3 !3 !4 !4 !5 !5 M5 port M5 port y y u u !7 !7 q w e r t q w e r t o o !0 !0 !1 !1 i i !4 !4 !2 !2 !3 !3 !6 !6 Component Parts Description Material Description Material No.

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

1/2 24 15.9 17.4 18.8 25.6 46.4 26.1 61.2 50.8 49.2 42.2 40.6 15.6 54 AS43l1F-U04-12A 12 18.5 21 26.2 48.3 28.3 63.4 17 56 11.2 12.9 16.6 20.2 36 21.4 50.1 VCHC 3/8 19 42.3 40.7 35.9 34.3 ASR ASQ Note 1) Reference dimensions Note 2) Reference dimensions of threads after installation Inch Size [mm] Model d T Uni thread H D1 D2 D3 L1 L2 L3 L4 L5 Note 1) A Note 2) M Weight [g] Unlocked Locked

Speed Controller with Uni One-touch Fitting AS Series

19 32 33 33 34 36 54 55 57 54 55 57 94 96 14.5 5 32" 1 8 14.2 36.1 31.1 30.5 25.5 14.3 3 16" 16.5 17 18.5 14.5 16.5 17 18.5 21 17 18.5 21 17 18.5 21 21 22 12 1 4" 5 16" 5 32" 3 16" 17.2 17 1 4 1 4" 18.5 39.4 34.4 32.0 26.6 5 16" 3 8" 19 1 4" 1 4 45.9 40.9 38.1 33.1 23.0 19 20.3 5 16" 3 8" 1 4" 5 16" 19.4 45.0 40.0 37.6 32.6 19 3 8 23.0 3 8" 3 8" 1 2 18.6 24 22.4 54.6 47.1 44.5 37.0 1 2"

Vacuum Pad

2 1.5 2 1.5 8 8 8 3 3 9 8 5.2 2 4 1.8 7 6 3.4 2 2.2 Lateral 4.5 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-10B;[Weight: 0.8 g] ZP3-13B;[Weight: 1.0 g] ZP3-16B;[Weight: 1.1 g] 9 9 6 4 4 6 9 6 4 2 2 2 2 2 2 2 2 2 10 10 10 17 16 11.4 3 14 13 8.4 3 11 10 6 2 Buffer Assembly Part No.