Rated Flow Range: 1 to 100 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Straight, Port Size: ø8, Output Specification: Out 1: PNP; Out 2: Analog 4 to 20 mA, Lead Wire: -, Unit Specification: -, Bracket/Panel Mount Adapter: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 1 to 100 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Straight, Port Size: NPT1/4, Output Specification: Out 1: PNP; Out 2: Analog 4 to 20 mA, Lead Wire: -, Unit Specification: -, Bracket/Panel Mount Adapter: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: F2 (G1/4), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA)

Table of Contents

-08 AS2200-02 100 200 50 100 0 0 SV100 ANA1 -C08 T0604 SV200 ANA1 -C10 T0806 200 CM2 32 400 MB 50 300 150 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS3201F -02-08 AS3000-02 200 100 100 50 0 0 200 CM2 40 400 MB 63 150 300 Stroke (mm) Stroke (mm) AS2201F -02-06 AS2200-02 100 AS4000-03 200 50 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed

Table of Contents

Gripping point L (mm) MRHQ F F Misc.

Made to Order

-XC88 -XC89 Basic: MBB MB Port V W Cushion valve 2 x Rc P G G E MM Width across flats B1 Width across flats KA Fd D E B C A AL H1 MB N B C MA N 2 x 4 x J K H F ZZ + Stroke S + Stroke Dimensions (mm) Bore size (mm) 32 40 50 63 80 100 A AL B B1 C D E F G H H1 J K KA MA Fd MB MM N P S V W ZZ 22 30 35 35 40 40 28 33 39.5 39.5 44.5 54 4 4 4 4 5 5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

Series CH2E/CH2F/CH2G/CH2H Limit stroke charts/Bore sizes 32, 40 Symbol Mounting orientation Symbol Mounting orientation Symbol Mounting orientation Symbol Mounting orientation F F F F F F F F F F F Bore size 32 B rod 2000 5 2 4 8 3 7 1 1000 6 500 Stroke (mm) 100 50 10 0.1 0.5 1 5 10 20 Load (kN) Bore size 40 B rod C rod 2 4 3 7 3 7 5 2000 4 8 1 5 8 6 2 1 1000 6 500 Stroke (mm) 100 50 0.5

PFxx-OMP0001CN

. -18No.PF-OMP0001CN-F PNP(2 ) PFMB7--BDC(+) OUT1 OUT2 DC(-) 80 mA 1.5 V PNP(1 )(15 V) PFMB7--EPNP(1 )(420 mA) PFMB7--FDC(+) OUT1 DC(-) 80 mA 1.5 V E15 V 1 k F420 mA 600 PNP(1 ) PFMB7--HDC(+) OUT1 DC(-) 80 mA 1.5 V 0.4V ()30 msec. -19No.PF-OMP0001CN-F NPN(2 ) PFMB7--ANPN(1 ) PFMB7--CPFMB7--DNPN(1 ) PFMB7--GOUT1 OUT2 (PFMC7--A-) DC(-) PNP(2 ) PFMB7--BNPN(1 ) PFMB7--EPFMB7--FPNP(1 )

PF-OMN0011_C

PNP 1~5 V F PNP 4~20 mA G NPN H PNP J 1~5 V 1~5 V K 4~20 mA 4~20 mA OUT2 C (1) T V + (2m) N M L/min L G gal/min gal F gal/min gal J L/min L GFJ : 1[L/min]0.2642[gal/min] 1[gal/min]3.785[L/min] []=9/5[]+32 15 V PF3W5--1(T) -9No.PF-OMN0011CN-C C (1 ) T V -10No.PF-OMN0011CN-C / ZS-26-B ZS-26-C ZS-26-01 ZS-40-W 2 m (e-con) ZS-28-CA-4 1 ZS-40-Y 10 -11No.PF-OMN0011CN-C

PF-OMM0004_C

1 V Max.80 mA 1.5 V NPN PF3W7--C(T)NPN PF3W7--D(T)PNP PF3W7--E(T)PNP PF3W7--F(T)Max.80 mA 1.5 V E15 V 1 k F420 mA 12 V 300 24 V 600 Max.28 V80 mA 1 V C15 V 1 k D420 mA 12 V 300 24 V 600 NPN PF3W7--GPNP PF3W7--HMax.28 V80 mA 1 V 30 ms Max.80 mA 1.5 V 30 ms -22No.PF-OMM0004-D NPN2 PF3W7--A(T)NPN PF3W7--C(T)PF3W7--D(T)NPN PF3W7--GPNP2 PF3W7--B(T)PNP PF3W7--E(T)PF3W7--F(T)PNP

1

P CXWM10, CXWL10 4-J Herical insert thread depth K F P 4-M4 x 0.7 Helical insert thread depth 6 CXWM16 CXWL16 F 25 35 32.5 37.5 42.5 55 67.5 80 F 34.5 47 53 53 65.5 78 90.5 103 P 25 30 60 75 90 90 90 90 P 52 52 65 90 90 90 90 90 I I CXWM10 CXWL10 Stroke 25 mm 50 mm 75 mm 100 mm 125 mm 150 mm 175 mm 200 mm Stroke 25 mm 50 mm 75 mm 100 mm 125 mm 150 mm 175 mm 200 mm F 21 26 26 26 F 35.5 38

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

0.00 to +20.90 mA +0.10 to +21.00 mA 0.00 to +21.00 mA 4..20 mA +3.00 to +20.90 mA +3.10 to +21.00 mA +3.00 to +21.00 mA Correspondence table for user set upper or lower limit and output value at communication error and idling (E.O.

PF-OMN0009_C

PF3W520S [] [] P: P: PF3W540S [] P: -39No.PF-OMN0009CN-F () (PF3W504/520/540) A B C 1 V 1.5 V 5 V 4 mA 6 mA 20 mA (PF3W511) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W521-12/14) A B C 1 V 1.8 V 5 V 4 mA 7.2 mA 20 mA (PF3W521-U30) A B C 1 V 1.48 V 5 V 4 mA 5.92 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521-12/14 50 250 PF3W521-U30 30 250 () A B C

ISO Standard Hydraulic Cylinder

CHSD40-PS CHSD50-PS CHSD63-PS CHSD80-PS CHSD100-PS Seal kit consists of items @1 to @5 and @9, and can be ordered by using the seal kit number for each bore size. 335 CHSD Series Dimensions Basic: CHSDB Z + Stroke PJ + Stroke Y GB GA J MM 2 x RcP V V D E MA K F G NA Cushion valve M B C A SS NB Air release S + Stroke H ZZ + Stroke Stroke range Bore size (mm) MM A B MA V C D PJ F G NB SS GA

PFxx-OMS0001CN

1]OUT1(29)[F 2]OUT2(47) -23No.PF-OMS0001CN-A <> 1 [P_1][n_1] [] 500 L/min OUT1OUT2[P_2][n_2] [F 1]OUT1(29)[F 2]OUT2(37) 30 (25) -24No.PF-OMS0001CN-A [] 2 [F 0] 2 F99 F1 F0 2 -25No.PF-OMS0001CN-A () () [F 0] [ rEF] [ ANR] 27 [ Uni] 1 [ L] L/min [ oU1] OUT1 [ HYS] [ 1ot] OUT1 [ 1_P] [ 250] 250 L/min(PFMC7501) [ P_1] OUT1 [ 500] 500 L/min(PFMC7102) 29 [F 1] [ 1000] 1000 L/min

SMC Pneumatic Clean Series

Load voltage 24 VDC, 100 VAC 24 VDC, 100 VAC, 200 VAC 24 VDC (10 to 28 VDC) 24 VDC (10 to 28 VDC) 28 VDC or less 28 VDC or less Load current range Indicator light Type Auto switch model D-C73 D-B54 D-H7B D-K59 D-H7A1 D-G59 Application Relay, PLC Relay, PLC 24 VDC relay, PLC 5 to 40 mA, 5 to 20 mA Reed switch 5 to 50 mA, 5 to 25 mA, 5 to 12.5 mA 5 to 40 mA 5 to 40 mA 40 mA or less 40 mA or

PSxx-OMM0006CN

Max.28 V80 mA 1 V -P PNP Max.80 mA 1 V (11 ) -22No.PS-OMM0006CN-E ON OFF ON 1 1 1 1 P_1 H_1 [Pa] ON OFF [s] -23No.PS-OMM0006CN-E <> 1 [P_1][n_1] OUT1 2[P_2][n_2] 2 (P1LP1H)ON P1L()P1H() (n1Ln1H) 1 -24No.PS-OMM0006CN-E 2[F 0] [F] 2 2 [-] [F 0] 27 ISE40A MPa ""M ZSE40A(F) kPa ISE40A P ZSE40A(F) psi [[F 1] OUT1 28 ONOFF ISE40A0.500 MPa ZSE40A-50.7 kPa ZSE40AF50.0 kPa

Integrated Controller

less Load voltage 28 VDC or less 24 VDC (10 to 28 VDC) Load current 40 mA or less 2.5 to 40 mA Internal voltage drop 0.8 V or less at 10 mA (2 V or less at 40 mA) 4 V or less Leakage current 100 A or less at 24 VDC 0.8 mA or less Indicator light Red LED illuminates when turned ON.

SMC Pneumatic Clean Series

D-C73 D-H7B D-H7A1 Load voltage 24 VDC, 100 VAC 24 VDC (10 to 28 VDC) 28 VDC or less 5 to 40 mA, 5 to 20 mA 5 to 40 mA 40 mA or less Refer to page 182 for a list of applicable auto switches.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

W W D E d M a MA Q C A K F NA NB B H S + Stroke M ZZ + Stroke With rod boot e 10 l f h + l ZZ + l + Stroke (mm) Bore size (mm) A a B C D d F G GA GB J K M MA MM NA NB P Q R S T V W E 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 40 17 23 10 60 44 18 25 14 17.5 9.5 M8 x 1.25 18 13 20 M14 x 1.5 30 22 1/4 5 37 106