Hydraulic

thread depth 8 10 (11) Rod end male threads M M 48 24.5 D D 10 10 2-5.5 through 4-9 counter bore depth 7 36 36 8 20 2-Rc 1/8 (port size) 20 57 + Stroke 5 5 + Stroke 67 + 2 strokes C X L C X L + Stroke 47 32 to 100 2-P (port size) Approx.

CV/MVGQ

ML2B 0.030 0.060 + 0.048 0 Y-J010B 3.2 8 10 3.3 3.3 0.030 0.060 + 0.048 0 Y-J016B 6.5 12 10 5 5 C J G5-S CV MVGQ CC RB J D-X 20Data 10-15-9 10 Valve Mounted Cylinder Single Acting, Single Rod, Spring Return/Extend Series CVJ3 10, 16 How to Order Stroke (mm) Electrical entry G L M Grommet L plug connector M plug connector 10 16 15, 30, 45, 60 15, 30, 45, 60 Bore size 10 16 10 mm 16 mm Light

CV/MVGQ

ML2B 0.030 0.060 + 0.048 0 Y-J010B 3.2 8 10 3.3 3.3 0.030 0.060 + 0.048 0 Y-J016B 6.5 12 10 5 5 C J G5-S CV MVGQ CC RB J D-X 20Data 10-15-9 10 Valve Mounted Cylinder Single Acting, Single Rod, Spring Return/Extend Series CVJ3 10, 16 How to Order Stroke (mm) Electrical entry G L M Grommet L plug connector M plug connector 10 16 15, 30, 45, 60 15, 30, 45, 60 Bore size 10 16 10 mm 16 mm Light

Table of Contents

3 6 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 14 10,11 12 20 Flow rate (l/min (ANR)) Flow rate (l/min (ANR

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

[mm] 100 1000 70 10 75 LEY u L = 50 mm Max. speed = Over 200 mm/s i L = 100 mm Max. speed = Over 200 mm/s LES 10 10 Load mass m [kg] Load mass m [kg] LEYG32M LEYG32M LEPY LEPS LEYG32M LEYG32M LEYG25M LEYG25M 1 1 LER LEYG25M LEYG25M LEH 0.1 0.1 LEY -X5 Stroke [mm] 100 1000 70 10 75 Stroke [mm] 100 1000 70 10 75 11LEFS Horizontal Mounting, Ball Bushing Bearing o L = 50 mm Max. speed = 200

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

248 237.5 216 16 Stations L1 L2 L3 L4 (Pitch) L plug connector (L) DIN terminal (D) M plug connector (M) 300 (Lead wire length) MAX. 10 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 (mm) 2 110.5 100 88 11.5 3 135.5 125 104 16 4 148 137.5 120 14 5 160.5 150 136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 8 210.5 200 184 13.5 9 223 212.5 200 11.5 10 248 237.5 216 16 Stations L1 L2 L3

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

CQS

CQSKB125D 10D 15D 20D 25D 30D M3 X 30 l X 35 l X 40 l X 45 l X 50 l X 55 l M3 X 30 l X 35 l X 40 l X 45 l X 50 l X 55 l M5 X 30 l X 35 l X 40 l X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l M5 X 35 l X 40 l X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l M3 X 25 l X 30 l X 35 l X 40 l X 45 l X 50 l M3 X 25 l X 30 l X 35 l X 40 l X 45 l X 50 l M5 X 25 l X 30 l X 35 l X 40 l X 45

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A L L1 Bore size (mm) 12 16 20 25 5 st 10 st 5 st 10 st 5 st 10 st Rod end male thread 61.4 13.5 24 51.4 8.5 19 59.5 13.5 25.5 49.5 8.5 20.5 64 14.5 28.5 54 9.5 23.5 Rod end nut 65.5 15 32.5 55.5 10 27.5 Flange bracket material: Carbon steel Double clevis style: CDQ2D Double Clevis Style A B CL L Bore size (mm) 12 16 20 25 CB CD CZ CT CU CW CX 5 st 10 st 5 st 10 st 5 st 10 st 5 st 10 st

15

70 10 75 Stroke [mm] 100 1000 70 10 75 LEY u L = 50 mm Max. speed = Over 200 mm/s i L = 100 mm Max. speed = Over 200 mm/s LES 10 10 LEYG32M Load mass m [kg] Load mass m [kg] LEYG32M LEPY LEPS LEYG32M LEYG32M LEYG25M LEYG25M 1 1 LER LEYG25M LEYG25M LEH 0.1 0.1 LEY -X5 Stroke [mm] 100 1000 70 10 75 Stroke [mm] 100 1000 70 10 75 11LEFS Horizontal Mounting, Ball Bushing Bearing o L = 50 mm Max

CA2

9 f l 9 f l + Stroke h + l + Stroke h + l S + Stroke h + l MB ZZ + l + 2 strokes ZZ + 2l + 2 strokes Stroke range (mm) A Bore size (mm) MB1 AL B B1 C D E F G H1 K KA J M MM N Without rod boot With rod boot 40 60 8 6 up to 500 20 to 500 30 27 22 44 16 32 10 15 M8 x 1.25 14 11 M14 x 1.5 27 CA2 50 70 11 7 up to 600 20 to 600 35 32 27 52 20 40 10 17 M8 x 1.25 18 11 M18 x 1.5 30 63 85 11 7 up

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

20 750 kPa 30 kPa 50 kPa 50 kPa 350 kPa 10 70 kPa 70 kPa 350 kPa 00 20 40 60 80 100 Flow [L/min] Flow [L/min] Flow Rate Characteristics (Reference Data) PF2M710(-L) PF2M705(-L) PF2M725(-L) 10 L/min 5 L/min 25 L/min 12 10 8 6 4 2 0 0 2 4 6 8 10 12 14 30 25 20 15 10 5 0 0 2 4 6 8 10 12 14 6 5 150 kPa 350 kPa 150 kPa 150 kPa Flow [L/min] Flow [L/min] Flow [L/min] 4 3 350 kPa 350 kPa 2 750 kPa

Compact 5-Port Solenoid Valve

Station 8 113 SOL.b SOL.a 47.04 (+) (+) () () 22 9 Station 9 SOL.b SOL.a (+) (+) () () 23 10 D-sub connector cable [IP67 compliant] D-sub connector cable [IP20/40 compliant] Station 10 Cable length (L) Assembly part no. Note Cable length (L) Assembly part no.

1

C0.5 file chamfer C WA DA F L X L R sphere F X X L R sphere TP H1 L T W1 L T L W1 L L 6-17-10 6-17-11 10 Simple Specials -XA1 to XA38: Change of Rod End Shape These changes are dealt with Simple Specials System.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Pressure Switches/ Pressure Sensors 28 L plug connector (L): 10-SYJ3143-L-M5 M8 connector (WO): 10-SYJ3143-WO-M5 M plug connector (M): 10-SYJ3143-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 64.3 [66.5] 54.5 [56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6

Proposals for Energy Saving

Table 1 Display Real-time flow rate l/min Accumulated flow l, m, m x 10 ft, ft x 10, ft x 10 CFM Note 1) For the type with unit switching function [The type without the unit switching function will have a fixed SI unit (l/min, or l, m or m x 10)]. 98 &RXUWHV\RI6WHYHQ(QJLQHHULQJ,QF5\DQ:D\6RXWK6DQ)UDQFLVFR&$ *HQHUDO For Air Digital Flow Switch Series PFA 4.

LJ1H

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

SQ1000/2000

Refer to the dimensions drawing of each kit for dimension L. L 1.25 P = 12.5 5.25 7.5 35 25 5.5 Dimension L L = 12.5 x n + 10.5 No. Dimension L 1 23 2 35.5 3 48 4 60.5 5 73 6 85.5 7 98 8 110.5 9 123 10 135.5 No. Dimension L 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 No.

MGP

(kg) 25 25 20 20 16 16 1 10 50 100 200 1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MGPL32 to 63 1 2 25mm stroke V = 400mm/s 1 3 Over 25mm stroke V = 400mm/s 50 50 63 63 50 50 Load weight m (kg) Load weight m (kg) 10 10 40 40 5 5 32 32 1 10 50 100 200 1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MGPL80, 100 1 4 V = 400mm/s Note: 1kg = 2.2046 lb