Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 03 (3/8), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: None, Calibration Certificate: A (Calibration Certificate)

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: NPT, Port Size: 3/8, Output Specification/Temperature Sensor: Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: None; Temperature Sensor: None, Lead Wire: w/o Lead Wire and M8 Connector, Unit Specification: Instantaneous Flow: L/min, Temperature: °C, Bracket: None, Calibration Certificate: w/Calibration

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 3/8, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: None, Calibration Certificate: Calibration Certificate, Made to Order: -

Electric Actuator/Slider Type

Calculate the load factor for each direction. x = Xc/Lx, y = Yc/Ly, z = Zc/Lz 5. Conrm the total of x, y and z is 1 or less. x + y + z 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series. Acceleration [mm/s2]: a Work load [kg]: m Work load center position [mm]: Xc/Yc/Zc z y 1. Horizontal 3.

Slider Type Ball Screw Drive/11-LEFS Series

Calculate the load factor for each direction. x = Xc/Lx, y = Yc/Ly, z = Zc/Lz 5. Confirm the total of x, y and z is 1 or less. x + y + z 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series. Acceleration [mm/s2]: a Work load [kg]: m Work load center position [mm]: Xc/Yc/Zc z y 1. Horizontal 3.

Environment

PB H thread depth C Vent hole Note 3) J PC EV Z T M U D K Note 2) L R 4 x O1 thread depth R W A + Stroke B + Stroke S EH M 6 x MO thread depth MR XA H9 depth XA MH Section XX details MA ML + Stroke MC MD Section XX XB XA H9 XA [mm] Incremental encoder Absolute encoder B C D EH EV Without lock With lock Without lock With lock A W Z A W Z A W Z A W Z Size Stroke range [mm] 25 15 to 100 238

Modular F.R.L. Units

Example) AW30K-03BE-1N-B q w e r t y Made to order (Refer to pages 106 to 110 for details.)

•

FT ZZ1 +t+ Stroke Z Z t Stroke (mm) .. ,.,.,." .".

Secondary Batteries

compatible with secondary batteries Port size 02 (8A) 1 4 90 Material restriction T Body ported Body type Light/Surge voltage suppressor Electrical entry D Symbol Nil S Z Valve option Standard type Continuous duty type For vacuum Nil E V Z: With light/surge voltage suppressor Rated voltage 5 6 24 VDC 12 VDC Electrical entry D DIN terminal *Specifications and dimensions for the 90-series

7

1A VXD2 Z 3 0 A A VXK Enter standard product number.

Air Pilot Operated Series NVSA

U , (14r) (179) a'|A, a1A 10,,{, (255) 1 1 % r @3) 1A h. (31) 14'1Az (3691 16 t, t4071 L. (12() (154) tl60r 9 % r QUI 10 "ti a2 12 t, 1310) 13 "1, B{a) 1 5 t , 86) 16 rxr t4211 L r = 3 8 N + z z L z = 3 8 N + + l 13 DIRECTIONAL AIR VALVE INTERFACE SPEED CONTBO PILOTINDICATORS SERIES NVSA 4(914 INIERFACE SPEED CONTBOL FEATURES 1Eliminates expense ol Plping and "External" Flow Conlrols. 2.

AR Series Modular Type Regulator

Example) AR30-03BG-1N-A r t w Made to Order (Refer to pages 456 and 457 for details.)

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

'i,-.1-)^' l z N F Noz l!

Title not found

'i,-.1-)^' l z N F Noz l!

Title not found

In this position, the gripper will only require clearance for the body allowing for X-Y movemenl without an additional Z-axis linear actuator. lmproved mounting repeatability Stainless steel lingers ale standard.

Large Bore Compact Cylinder Series CQ2

Z Y69BZ Auto switches marked with a "" symbol are produced upon receipt of order.

Title not found

The lock nut on lhe fieter-aul type is electroless n|ckel plated, while he meter-in type is btack z nc chromale plaled. Note 3) O[,4arking is electroless nickel plated, provLded as standard.

Regulator AR30 to 60

Regulator AR30 to 60 Related Equipment How to Order AR 30 BE F 1N 03 Optional specifications Regulator Contents 0.02 to 0.2MPa setting Non-relieving Flow direction: Right to left Symbol 1 N R Z Applicable models AR30 to 60 AR30 to 60 AR30 to 60 AR30 to 60 Note 1) Body size 30 40 50 60 1 3 8 1 2 3 4 Display units for product name plate and pressure gauge: PSI, F.

Filter Regulator AW30, 40

Filter Regulator AW30, 40 Related Equipment How to Order Integration of a filter and regulator allows simple wiring. 03 BE 30 1N AW F Optional specifications Filter regulator Applicable models AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 Symbol 1 2 6 8 J N R W Z Contents 0.02 to 0.2MPa setting Metal bowl Nylon bowl Metal bowl with level gauge Drain guide

High Power Cylinder Series RHC

Load voltage Lead wire length (m) Auto switch model DC AC Indicator light Special function Wiring (output) Electrical entry Applicable loads Type Reed switch Solid state switch 0.5 (Nil) 3 (L) 5 (Z) None (N) Refer to Page 2 for part numbers of air cylinder mounting brackets other than the basic type. 3 wire (NPN equiv.)