Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 1/2, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 1/2, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: w/o Lead Wire w/M8 Connector, Units on Label: Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 1/2, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

Modular Type Filter Regulator Series AW

Standard specifications Model Port sizes Fluid Proof pressure Maximum operating pressure Set pressure range Note 1) AW30K 1/4, 3/8 AW20K 1/8, 1/4 AW40K 1/4, 3/8, 1/2 AW40K-06 3/4 Air 1.5MPa 1.0MPa 0.05 to 0.85MPa Rc, NPT, G 1/8 Rc, NPT, G 1/8 Rc, NPT, G 1/4 Rc, NPT, G 1/4 Pressure gauge port size Note 2) Set pressure + 0.05MPa [at relief flow rate of 0.1L/min (ANR)] 5 to 60C (with no freezing

Series VQ Base Mounted Metal Seal/Rubber Seal

G H J1 J2 K Q R1 R2 V Note 1) Refer to p.1.10160 for details.

LEC-OM02704CN

0 1 1 1 1 b6 0 0 1 1 0 0 1 1 b5 0 1 0 1 0 1 0 1 b8 b5 b4 b3 b2 b1 C 0 1 2 3 4 5 6 7 R 0 0 0 0 0 NUL DLE Space 0 P 0 0 0 1 1 SOH DC1 1 A Q 0 0 1 0 2 STX DC2 2 B R 0 0 1 1 3 ETX DC3 3 C S 0 1 0 0 4 4 D T 0 1 0 1 5 5 E U 0 1 1 0 6 6 F V 0 1 1 1 7 7 G W 1 0 0 0 8 ( 2 H 1 0 0 1 9 ) 9 I Y i 1 0 1 0 10 J 1 0 1 1 11 + 1 1 0 0 12 L 1 1 0 1 13 = M m 1 1 1 0 14 N 1



the External Pilot VEX1 3 3 B A M5 G 1.

Air Combination

Note 4) Based on ISO8573-1:2010 Compressed air Part 1: Contaminants and purity classes. The compressed air quality class on the inlet side is [7:4:4]. -15- 4. How to Order 4-1. AC20-D to AC60-D 30 03 DE AC D Symbol Description Body size 20 30 40 50 60 Nil Rc Thread type N NPT F G 01 1/8 02 1/4 3/8 Port size 03 1/2 04 06 3/4 10 1 Nil Without auto drain a Float type C N.C.

E-P HYREG

Refer to Specific Product Precautions on page 1006. 990 E-P HYREG VY1 Series R Standard Specifications 0 1 0 1 0 1 VY110 01 02 0 1 0 1 VY140 0 1 VY150 0 1 VY170 0 1 20 VY190 0 1 VY1D00 M5 VY1A0 VY1B0 M5 VY120 01 02 VY130 02 03 Model 10 12 10 04 02 03 04 04 06 14 M5 01 Port 1(P) 11 2 Port size 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 1 M5 M5 2 2 M5 2(A) 1 4 3(R) Weight

VXR21/22/23

Port size 04 06 10 12 14 20 LVH 1 2 3 4 Refer to page 17-3-16 for ordering coil only. 1 1 1 2 LVD 1 4 1 2 Thread type Nil T F N LVQ Rc NPTF G NPT Refer to the table (1) given below for availability.

Fieldbus system EtherCAT compatible SI Unit

01 40xA:04 Channel 0 Channel 3 (Analogue range) Enum080E 1: x = Unit No.

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Metric size Inch size 100 200 205 M5 standard 1/8 standard 1/4 standard 3.2 4 6 8 23 04 06 08 01 03 05 07 09 1/8" 5/32" 3/16" 1/4" 5/16" Use 1/8" tube.

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Standard Combinations

Metal bowl B B B B B Dimensions B B N.O.: Black B N.C.: Gray 1/8 10 One-touch fitting 1/4 Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 17 Width across flats 17 Standard specifications Bracket mount Model Port size A B C D N P E G H1 H2 J K L L M (1) (1) (1) (1) (1) (1) ACG20B ACG30B ACG40B 1/8, 1/4 83 87 29 60 2.5 28.5 41.5 30 3.2 1/4, 3/8 110 115 41 80 2.5 29.5 55 41

Intrinsically Safe Valve

/8 With sub-plate 1 1/2 With sub-plate 04 53-SY9000 1 (P) (EA) 5 3 (EB) 2-position double Manual override 2 (B) (A) 4 2 E: Push-turn locking lever type D: Push-turn locking slotted type Nil: Non-locking push type (EA) 5 1 (P) 3 (EB) 3-position closed center 2 (B) (A) 4 3 Note 1) (EA) 5 1 (P) 3 (EB) 3-position exhaust center 2 (B) (A) 4 4 Note 1) (EA) 5 1 (P) 3 (EB) Lead wire length 3-position

Series VS

8060 ISO 1 8080 ISO 2 8100 ISO 3 NIL Rc(PT) T NPTF F G(PF) CODE A, B, PORT SIZE / LOCATION APPLICABLE ISO SIZE NOTES 02 1/4" SIDE ONLY 1 NO PORTS ON BOTTOM OF MANIFOLD 03 3/8" SIDE ONLY 1, 2 04 1/2" SIDE ONLY 1, 2, 3 06 3/4" SIDE ONLY 2, 3 10 1" SIDE 3 02B 1/4" BOTTOM 1 SIDE PORTS PLUGGED 03B 3/8" BOTTOM 1, 2 04B 1/2" BOTTOM 2, 3 06B 3/4" BOTTOM 3 02S 1/4" SIDE 1 BOTTOM PORTS PLUGGED 03S

Check Valve Series AK 1

4 1 2 1 2 4 6 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Thread type Nil N F Rc NPT G AK4000-03/-04 AK6000-06/-10 Port size 0.5 MPa 0.5 MPa Port size Applicable series AK2000 AK2000/4000 AK4000 AK4000 AK6000 AK6000 Inlet pressure: 0.1 MPa Inlet pressure: 0.1 MPa 0.3 MPa 0.3 MPa 0.7 MPa 0.7 MPa 01 02 03 04 06 10 1 8 1 4 3 8 1 2 3 4 1 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 15-

Modular Type Lubricators Series AL

IS400-1 (1S-1) IS400-2 (1S-2) Model Port size B J A C D E F G H I , 1 4 1 2 1 1 AL800-12 to 14-1 AL900-20-1 431 (481) 437 (487) 3 x M5 x 0.8 x depth 6 3 x M5 x 0.8 x depth 6 230 230 ( ): With float switch 117 117 60 60 100 100 2 59 63 166 162 73 73 950

VP300/500/700

Common exhaust: VV3P7-41Stations 1-04 (G) (E) (T) (D, Y) N.C.

KB

Air Output Port: KBV, KBZ (P.2.1-76) 04 KB 1 V Elbow module: KBV Elbow socket module: KBV T Connecting thread Tube O.D.