Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

C9 Technical Data C11.2 1215 MY1H Series Stroke Adjustment Unit With adjustment bolt MY1H AZ Stroke Bore size E EA EB W h TT Stroke adjustment unit FC FA EC EY Applicable cylinder E EA EB EC EY h TT FC W FA MY1H25 18 9 40 7.5 53.5 16 21 3.5 53 5 (Max.16.5) MY1H32 25 14 45.6 9.5 67.5 23 20 4.5 64 8 (Max.20) MY1H40 31 19 55 11 82 24.5 26 4.5 9 (Max.25) 75 With low load shock absorber + adjustment

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

125 (0.9) Compression Rc, R, NPT P.1 Female thread type Compression Manually Operated Type Fitting Knob Body material Max. operating pressure psig (MPa) Cv Note) Connections Page Series 0.5 316 SS Knob with a raised section on top (indication window) 250 (1.7) AK3652 0.29 P.3 Compression Rc, R, NPT Female thread type Compression AK4652 Note) Cv calculation based on SEMI Standard Series AZ

AP500

Single Stage Compact Regulator for Ultra High Purity Series AP500 AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Option High flow Higher flow capacity with internal changes only, no change in external dimensions.

Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.

Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.

2-Apr-01 Quick Reference Auto Switch Chart with (PnP) M-8 (3 pin) & M-12 (4 pin) Connectors, Page 1/2 32, 40, 50, 63, 80 & 100 Bore sizes (Auto Switch Spacer # BMP1-032 required) 32, 40, 50, 63, 80, 100, 125 & 200 Gripper Bore sizes (sizes depend on seri

CHARLOTTE, NC (704) 597-9292 DALLAS, TX (972) 446-9554 INDIANAPOLIS, IN (317) 899-4440 MINNEAPOLIS, MN (651) 688-3490 PHOENIX, AZ (623) 492-0908 ATLANTA, GA (770) 624-1940 SAN FRANCISCO, CA (408) 943-9600 CHICAGO, IL (630) 393-0080 DETROIT, MI (248) 299-0202 LOS ANGELES, CA (714) 669-1701 NASHVILLE, TN (615) 331-0020 PORTLAND, OR (503) 252-9299 AUSTIN, TX (512) 926-2646 ST.

Title not found

NJ Tel: (908) 253-3241 FAX: (908) 253-3452 Milwaukee,WI T el: (262) 827-0080 FAX: (262) 827-0092 T oronto Tel: (905) 812-0400 FAX: (905) 812-8686 Los Angeles, CA T el: (714) 669-1701 FAX: (714) 669-1715 Rochester, NY Tel: (716) 321-1300 FAX: (716) 321-1865 Southeast Region Minneapolis, MN T el: (952) 943-1299 FAX: (952) 943-1614 Vancouver Tel: (604) 517-1646 FAX: (604) 517-1647 Phoenix,AZ

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Tel: (414) 827-0080 FAX: (414) 827-0092 Southwest Region Austin, TX Tel: (512) 926-2646 FAX: (512) 926-7055 Dallas, TX Tel: (972) 406-0082 FAX: (972) 406-9904 Houston, TX Tel: (713) 460-0762 FAX: (713) 460-1510 Tulsa, OK Tel: (918) 252-7820 FAX: (918) 252-9511 Nashville, TN Tel: (615) 331-0020 FAX: (615) 331-9950 West Region Los Angeles, CA Tel: (714) 669-1701 FAX: (714) 669-1715 Phoenix, AZ

PFA/PFW

Melinda Lane Phoenix, AZ 85027 Tel: (623) 492-0908 FAX: (623) 492-9493 SMC Pneumatics Inc. (Columbus) 3687 Corporate Drive Columbus, OH 43231 Tel: (614) 895-9765 FAX: (614) 895-9780 SMC Pneumatics Inc. (Portland) 14107 N.E. Airport Way Portland, OR 97230 Tel: (503) 252-9299 FAX: (503) 252-9253 SMC Pneumatics Inc. (Dallas) 12801 N.

VCB

AZ-T-VCB Valve model no. on page 17-2-24 Seal part no. w Valve For VCB20 Tilt the screwdriver down in direction q so that the clip slides out in direction w. OR-1860-120F F: FKM E: EPDM For VCB30 OR-2380-130F F: FKM E: EPDM For VCB40 OR-2600-180F F: FKM E: EPDM e When external leakage occurs after disassembling a valve, replace the above seals.

VCL

AZ-T-VCL Valve model no. on page 17-2-32/36. e For use of H type coil, wave washer is included. r When the loosened clip is pulled out in direction e using pinchers, etc., the coil can be removed and replaced in direction r. t After replacing coil, press the clip in the direction of t. 17-2-30 3 Series VCL Direct Operated 2 Port Solenoid Valve For Oil Precautions Be sure to read before handling

VCS

AZ-T-VCS Valve model no. on page 17-2-42/46 Seal part no. Valve w For VCS20 OR-1860-120P Tilt the screwdriver down in direction q so that the clip slides out in direction w.

VCW

AZ-T-VCW Valve model no. on page 17-2-52/57. Tilt the screwdriver down in direction q so that the clip slides out in direction w. Seal part no.

VDW

N.C. (2) N.O. (3) AZ-T-VDW Valve model no. on page 17-2-64/68/74 LVA (1) IN 3 Port Valve LVH Clip part no. (2 port) Max. operating pressure differential (MPa) Series VDW 2 0 10 2 Orifice size (mm ) LVD Model Pressure port 1 Pressure port 2, 3 (1) LVQ 0.9 1 0.3 2 3 10, 20 30 VDW200 0.7 1.6 0.1 LQ 0.8 2 0.2 Socket assembly part no. (3 port) VDW300 0.4 3 0.1 LVN 0.2 4 0.05 Series VDW 2 0 12A

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Clip 1 1 G N VX02 AZ-T-VX Valve model Enter by referring to How to Order (Single Unit). Name plate Series Valve/Material 1 2 3 VX21 VX22 VX23 Symbol Valve N.C. N.O. Solenoid coil Nil 2 Clip part no. (For N.C.)

ZFC Series

Melinda Lane Phoenix, AZ 85027 Tel: (623) 492-0908 FAX: (623) 492-9493 SMC Pneumatics Inc. (Chicago) 27725 Diehl Road Warrenville, IL 60555 Tel: (630) 393-0080 FAX: (630) 393-0084 SMC Pneumatics Inc. (Tampa) 8507-H Benjamin Road Tampa, FL 33634 Tel: (813) 243-8350 FAX: (813) 243-8621 SMC Pneumatics Inc.

P

CHICAGO, IL (630) 393-0080 ATLANTA, GA (770) 624-1940 SAN FRANCISCO, CA (408) 943-9600 DALLAS, TX (972) 406-0082 INDIANAPOLIS, IN (317) 899-4743 MINNEAPOLIS, MN (612) 688-3490 PHOENIX, AZ (602) 492-0908 CINCINNATI, OH (606) 647-5600 AUSTIN, TX (512) 926-2646 ST.

Series DXT474

Melinda Lane Phoenix, AZ 85027 TEL: (623) 492-0908 FAX: (623) 492-9493 KOREA SMC Pneumatics Korea Co., Ltd. SMC Pneumatiques (Canada) Ltd.(Quebec) 3260 Rue Watt Local 112 Ste-Foy, PQ G1X 4T5 TEL: (418) 654-1997 FAX: (418) 654-1998 CHINA SMC (China) Co., Ltd.

Series SV

Melinda Lane Phoenix, AZ 85027 TEL: (623) 492-0908 FAX: (623) 492-9493 KOREA SMC Pneumatics Korea Co., Ltd. CHINA SMC (China) Co., Ltd. SMC Pneumatiques (Canada) Ltd.(Quebec) 3260 Rue Watt Local 112 Ste-Foy, PQ G1X 4T5 TEL: (418) 654-1997 FAX: (418) 654-1998 HONG KONG SMC Pneumatics (Hong Kong) Ltd.

VCB

Clip part numbers AZ-T-VCB Page 1 Valve model How to Order Valves Page 5 Valve model Note) Indicate the valve model, as a label will be attached to the clip. Seal part numbers Valve For VCB20 OR-1860-120F Tilt the screw driver down in direction so that the clip slides out in direction .