Air Preparation Equipment

Element mounting figure 265 Industrial Filter Series FGC Replacement Procedure is P.476 Replacement Parts and Seal List How to Order FGC 1 A 04 C B N 002 Symbol Maximum operating pressure Symbol Element seal material Note 1) Maximum operating pressure 1 MPa 2 MPa 4 MPa Element seal material Non-asbestos Fluororesin NBR FKM 1 2 4 A Note 2) T N V Vessel material (wetted parts) Note 1) Not used

Digital Flow Switches, Series PF2A, Series PF2W

SMC FLOW SWITCH Blue 5 1 12 to 24VDC Series PF2W5 35.8 A 40 UNIT RESET PF2W30-A SET Panel fitting dimension 8-M3 3 x 7.2 (= 21.6) 36 +0.5 0 6.4 OUT2 NC Sensor 8 Load 4 OUT1 Black 1 2 3 4 7 3 Load +0.5 0 Brown 19.4 6 2 + 36 Blue 5 1 12 to 24VDC 5 6 7 8 Series PF2W5 PF2W31-A The applicable panel thickness is 1 to 3.2mm.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

EXH SS5Y7-20 1/4 C10 3.60 0.93 0.88 0.27 3.60 0.93 2 to 20 (1) Valve stations Note) Values for 5 stations manifold with a 2 position single type valve. 4/2 (A/B) Location Valve 1,3,5 (P,EA,EB) Port 1/4 1/8 C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) 1/4 C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) Port size 4,2 (A,B) Port Manifold

2/3 Port Valve for Various

Stainless steel, Silver (15 to 25 A) Not available for 32 A to 50 A Note 1) If using for other fluids, please contact SMC.

KB

M12 x 1 14 14 13.6 17 17.0 6 M14 x 1 17 17.6 18.5 21.0 18.5 21.0 M16 x 1 M20 x 1 M16 x 1 M20 x 1 19 24 19 24 8 10 8 10 Applicable tubing 22 25.2 18.5 Mounting plate thickness 7 mm or less 22.0 12 M22 x 1 24 27 18.0 27.0 15-2-114 Piping Module Series KB Air Supply Port 2 Male Connector Socket: KBB H (width across flats) T Weight (g) Model D L1 L2 A Connection thread M5 x 0.8 M6 x 1 Rc Rc

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

AN

Model Port size Effective area (mm2) Weight (g) ANB1-01 22 81 25 18 35 93 30 21 94 107 46 24 175 133 50 41 462 190 74 41 612 230 74 60 871 271 86 70 A B C Dimensions (mm) 1 8 ANB1-02 15 10 51 22 1 4 ANB1-03 35 3 8 ANB1-04 60 1 2 ANB1-06 90 3 4 ANB1-10 160 1 1 1 ANB1-12 280 1 4 ANB1-14 450 1 2 610 Construction/Parts/Dimensions ANB1-01 to 04 JIS symbol ANB1-04: PP ANB1-06 to 14 How to Order

2/3 Port Valve for Various

Port size 04 06 10 12 14 20 LVH 1 2 3 4 Refer to page 17-3-16 for ordering coil only. 1 1 1 2 LVD 1 4 1 2 Thread type Nil T F N LVQ Rc NPTF G NPT Refer to the table (1) given below for availability.

VFA3000

(1.9) 38 (2.1) 02 03 04 JIS Symbol 3 8 1 2 1 4 , , 2 position double 2 position single : 0.66 02 03 04: 0.71 VFA5444 -X1 3 position exhaustcenter 1 8 39 (2.2) 44 (2.4) 02 03 04 3 8 1 2 1 4 , , : 0.66 02 03 04: 0.71 VFA5544 -X1 3 position pressuretcenter 1 8 36 (2) 15.3 (0.85) 39.6 (2.2) 15.3 (0.85) 02 03 04 ( ) for normal position.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

(With 2 input blocks) With External Pilot Specifications 46.5 (Pitch) Ground terminal 16.5 13.5 P=10.5 14.1 8.4 18.3 2 x M12 8.6 10 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 17.7 24.6 23 59.5 3 PWR 3 3 3 3 5 E 5 3 E 3 5 E 5 3 E 42.7 PWR 43 T T 56.5 2 2 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 1 P 1 P 1 P 1 P 1 1 1 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 8 5/16" BUS

Fluoropolymer Piping Equipment

Class 1 1 2 2 2 3 3 3 4 4 5 5 6 6 1 2 1 2 C 1 2 3 1 2 1 2 1 2 A A B C A B A B A B A B LVH LVD LVQ LVP LVW LQ1 LQ1 Note 1) Tubing of different sizes can only be used in combination if within the same body class.

SX

Port size M5 x 0.8 SX3000 SX3000-39-1 A SX5000 SX5000-39-1 A SX7000 SX7000-39-20A Series Assembly part no. Port size M5 x 0.8 Rc Rc Round head combination screw SX3000 SX3000-38-1 A SX5000 SX5000-38-1 A SX7000 SX7000-38-20A 1 8 1 4 1 8 1 4 Note) The SUP port may be either on the lead wire side or on the end plate side.

Air Cylinder Series CA2

9 @0 @1 @2 @3 !2 A A-A' Piston rod section A' !1 !3 !4 Component Parts No.

E-P HYREG

Refer to Specific Product Precautions on page 1006. 990 E-P HYREG VY1 Series R Standard Specifications 0 1 0 1 0 1 VY110 01 02 0 1 0 1 VY140 0 1 VY150 0 1 VY170 0 1 20 VY190 0 1 VY1D00 M5 VY1A0 VY1B0 M5 VY120 01 02 VY130 02 03 Model 10 12 10 04 02 03 04 04 06 14 M5 01 Port 1(P) 11 2 Port size 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 1 M5 M5 2 2 M5 2(A) 1 4 3(R) Weight

Check Valve Series AK 1

NPT thread Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32 1/4 5/16 3/8 1/2 From One-touch fitting to male thread B Bushing type AKB 01 A 01 S With seal (Standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction Female/Male

30

A L Note 1) D is maximum diameter.

ARJ1020F

Description ARJM10-4, -6, -10 Manifold base ARJ1020F-M5-06 ARJ1020F-M5-04 How to Order M5 ARJ 20 10 F 04 1 Option 1 0.2 MPa setting Miniature regulator Note 1) Compared with standard specifications, its adjusting spring has only been changed. It is not the product which does not allow the pressure more than 0.2 MPa. Adjusting spring is not replaceable.

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Do not use in a line where a pressurized condition is maintained since the body may be damaged. Warning Caution 1. Tubing attachment/detachment for one-touch fittings 1) Installing of tubing (1) Use tubing with no flaws on its periphery and cut it off at a right angle. When cutting the tubing, use a tube cutter, TK-1, 2 or 3. Do not use pinchers, nippers or scissors, etc.

Suction Filter with Case FH99 Series

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM, EPDM Model/Rated Flow Rate Model Port size Note 2) INLET OUTLET Rated flow rate (L/min) FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 1B 1/2B 20 1B 3/4B 50 1 1/2B 1B 100 1 1/2B 1 1/4B 150 2B 1 1/2B 200 2B 2B 300 2 1/2B 2 1/2B 450 3B 3B 600 3 1/2B 3 1/2B 750 4B 4B 900 Note 2) Both flange

KDM

Possible to use from vacuum (100 kPa) to 1 MPa. Irregular shape permits engagement in a proper position. Model Tubing O.D. No. of connecting tubes Model Weight Color of release button KDM10-23 KDM10-04 KDM10-06 KDM10-08 KDM20-23 KDM20-04 KDM20-06 KDM20-08 3.2 4 6 300 g 10 520 g 8 3.2 Blue 520 g 4 6 8 20 950 g KDM20 Applicable Tubing Tubing material Tubing O.D.