CYPSeries

5 CYP32 (Nm) M1 M2 M1 0.3 3 M2 0.6 4 M3 0.3 3 Model CYP15 CYP32 m m Static moment Moment generated by the work piece weight even when the cylinder is stopped M Pich moment M1 = m x g x (L + B) x 103 M Yaw moment M3 = m x g x (L + A) x 103 M Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance

2/3 Port Valve for Various

$% % 33 1 ,) % % 1 ) ,, ) /) H B 7 !"# ! , & Ordering example VX021-001GB-01 !"# $ % & VX021-002DBT-04 ' ( !

Modular Type Lubricators Series AL

level gauge B B B B B B B Dimensions B Barb fitting Applicable tubing: T0604 Model Standard specifications Optional specifications Bracket mount P M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 A 25 40 53 70 75 90 95 B 77 115 142 176 176 250 268 C 26 36 38 40 38 41 45 D 12.5 20 26.5 35 35 45 47.5 E 30 38 38 45 G 35 60 80 110 110 110 110 J 12.5 20 26.5 35 35 45 47.5 M 30 41 50

Series AS-FM/AS-M/ASD-FM

Speed Controller for Low Speed Operation Series AS-FM/AS-M/ASD-FM In-line Type Dual Type In-line and dual types newly introduced!

CYP

5 CYP32 (Nm) M1 M2 Model CYP15 CYP32 M1 0.3 3 M2 0.6 4 M3 0.3 3 m m Static moment Moment generated by the work piece weight even when the cylinder is stopped Pich moment M1 = m x g x (L + B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

B B B B 103.2[107.6] P R R P 21 7 35 17.5 A A A A A 20.9 (DIN: 22.1) 3.5 1/8 (P, R port) 5.5 (DIN: 6.7) (Pitch) P = 16 18 Built-in speed controller (Station 1) (Station n) MAX.13.5 47.5 (Light/surge voltage suppressor) 52.6[59.6] + + + 37.2 A A 18.5 5.5 24 B B (Pitch) P = 16 23 M5 x 0.8 (A, B port) L plug connector (L) M plug connector (M) DIN Terminal (D) M8 connector (WO) 85.4 77.9 52.6

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

AS121FM-M5-23 AS121FM-M5-04 AS121FM-M5-06 AS221FM-01-23 AS221FM-01-04 AS221FM-01-06 AS221FM-01-08 AS221FM-02-04 AS221FM-02-06 AS221FM-02-08 AS221FM-02-10 3.2 4 6 3.2 4 6 8 4 6 8 10 22.1 22.1 22.9 27.5 27.5 27.5 32.4 34.4 34.4 36.4 43.2 8.4 9.3 11.6 9.3 9.3 11.6 15.2 10.4 12.8 15.2 18.5 17.3 17.3 18.1 20.4 20.4 20.4 25.3 25.2 25.2 27.2 33.9 12.7 12.3 7 28.8 25.1 30.1 9.6 33.8 M5 x 0.8 8 13.5

Clean Room Rodless Cylinder Series CYP ø15, ø32

(Nm) M1 M2 Model CYP15 CYP32 M1 0.3 3 M2 0.6 4 M3 0.3 3 m m Static Moment Moment generated by the workpiece weight even when the cylinder is stopped Pich moment M1 = m x g x (L + B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

(L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8 m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface Guide central axis m x g Cylinder central axis Dynamic Moment Moment

5 Port Solenoid Valve

2 B 2 B 2 B 2 B 2 M12 communication connector (PROFIBUS DP) D-sub communication connector (PROFIBUS DP) 4 4 4 4 A 4 A 4 A 4 A 4 A SI unit Fieldbus Features 1 Series SY3000/5000 Pressure switch Valve piping direction variations M Piping is possible from 3 directions.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model Connection threads R/NPT M L1 L2 H G F M E A B 1/8 LQ1R12-M LQ1R11-M 3 4 2 12 18.5 11.5 10 4 15.5 8 1/8" Class 1 LQ1R43-M LQ1R42-M LQ1R41-M LQ1R36-M LQ1R35-M LQ1R34-M LQ1R33-M LQ1R32-M LQ1R31-M LQ1R24-M LQ1R23-M LQ1R22-M LQ1R21-M 12 10 12 6 8 10 6 8 10 4 6 4 6 19.5 1/8" 4 16 28 16.5 15 6 12 14 22 1/4" (E) 2-B L1 M 19 1/4" 25 F 5 36.5 23 20 9 18 17 1/4 G H 21 3/8" 27 (A) (E) Class 2

VQZ1000/2000/3000

(Tool required) VQZ3000 (Standard) 12 VDC 24 VDC 5 (R1) 1 (P) 3 (R2) Base Mounted 3 position pressure center 3.0 4.6 (B) 2 (A) 4 A C B L plug connector (L) 5 (R1) M plug connector (M) 1 (P) 3 (R2) (Option) 100 VAC 200 VAC 110 VAC 220 VAC VQZ1000 M plug connector (M) B C A 0.90 1.3 (A) 4 Locking type (Tool required) 1 (P) 5 (R) DIN terminal (Y) DIN terminal (YZ) VQZ2000 N.C.

High Purity Fluoropolymer

L1 L2 H G F M E B A M 1/8 3 4 LQ1B12-M LQ1B11-M 2 10 4 8 18.5 11.5 15.5 12 1/8" Class 1 4 6 4 6 LQ1B43-M LQ1B42-M LQ1B41-M LQ1B36-M LQ1B35-M LQ1B34-M LQ1B33-M LQ1B32-M LQ1B31-M LQ1B24-M LQ1B23-M LQ1B22-M LQ1B21-M 19.5 1/8" R (NPT) Port size 4 15 6 12 14 28 16.5 16 2-B 22 1/4" M L2 A 10 F 1/4" 19 6 8 25 1/4 H G (E) (E) 5 20 9 18 17 36.5 23 L1 L1 10 Class 2 to 5 21 3/8" 6 8 27 M 12 10 12 3

REA/REB

4 @5 RE A B REC CX CY MQQ M !5 @8 @9 !9 #0 @6 !0 @4 w @7 !7 !6 RHC MK(2) Component Parts Material No. Description No.

REA/REB

s 2 or less (REA) or 15 m/s 2 or less (REB) Throughput dramatically increased (Maximum speed: 600 mm/s) RE A B Series REB introduced with a maximum speed of 600 mm/s.

ASR

Note3) L6 L8 Note 4) A2 M L7 L4 A1 Note 4) Weight (g) Note 5) Note 1) d D3 MAX.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS2001FM-04-X12 Ex.) AS2001FM-04-X21 AQ Note 1) Not particle-free ASV Throttle Valve (Without Check Valve) X214 AK Ex.) AS2001FM-04-X214 VCHC ASR ASQ Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

Series VS

(A) + 14 (A) + PIN 2 PIN 2 12 (B) + 12 (B) + PIN 2 PIN 2 PIN 3 PIN 3 COMMON COMMON PIN 3 PIN 3 PIN 3 PIN 3 COMMON COMMON COMMON COMMON COMMON COMMON PIN 3 PIN 3 PIN 4 PIN 4 14 (A) + 14 (A) + 12 (B) + 12 (B) + PIN 4 PIN 4 12 (B) + 12 (B) + PIN 4 PIN 4 14 (A) + 14 (A) + PIN 4 PIN 4 NOT USED NOT USED X17 X17 PIN 1 PIN 1 X6 X6 PIN 1 PIN 1 NOT USED NOT USED X53 X53 14 (A) + 14 (A) + PIN 1 PIN

Table of Contents

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.

Sine Rodless Cylinder Series REA/REB

Table (3) Recommended Speed Controller Bore size (mm) Model Elbow type Straight type In-line type AS1001F-04-X214 AS1001F-04-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS3001F-08-X214 AS3001F-08-X214 AS1201F-M5-04-X214 AS1301F-M5-04-X214 10 15 20 25 32 40 50 63 Caution AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 1.