5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

R P R R P R L (10) 8 End plate side End plate side (24) (35) 5.5 Silencer with One-touch fitting This is a silencer which can be attached to the R (exhaust) port of a manifold using a One-touch fitting. Rail mounting hole pitch 12.5 C 9 8 7 6 5 4 3 2 1 0 No.

3 Port Solenoid Valve

The pressure differential between 3 (R) and 1 (P) is the maximum operating pressure differential for each type. 2 (A) 1 (P) Air supply (positive pressure) Vacuum pad Vacuum supply 3 (R) 2 Metal joint 2) Vacuum retention Please consult SMC if the allowable leakage is limited when the valve is used for vacuum retention of a vessel, even within the low vacuum range (1.33 102 Pa or above).

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Model VHS4510 VHS4510-06 VHS5510 1 (P) 2 (A) 3/4 1 1/4 3/8 1/2 3/4 Port size 1/2 1/2 3/8 3 (R) 77 1 (P) 2 (A) 27 82 125 38 55 Effective area (mm2) Push the handle and then turn. Double action construction prevents erroneous operation. 49 2 (A) 3 (R) 36 42 40 50 53 0.77 0.42 Mass (kg) 0.36 Combination with modular type FRL is possible.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

AN

Model Model Model Port size R(PT) Effective area (mm2) Weight (g) Dimensions (mm) Weight Effective area Port size Model Dimensions (mm) R(PT) (mm2) (g) AN200-02 35 17 63 22 19 25 84 25 22 35 92 30 27 165 107 46 36 225 132 50 41 490 200 74 55 580 233 74 60 820 263 86 70 A B D A B D 1 4 1 4 AN202-02 35 16 64 22 19 33 84 28 24 47 95 34 24 AN300-03 60 3 8 AN302-03 60 3 8 AN402-04 90 1 2 AN400

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

U side (FU) 83.5 55.5 M5 ground screw U side 19 34.5 n 12 X 2n-Rc3/8, 1/2 (ports A, B) A 4 B 2 Indicator light 6 A 4 B 2 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override A 4 B 2 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P=41 58.5 P=41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (single, double, 3 position, rubber type) 184.5 (3 position, metal type) 15.5 17 22

7.4

Note) The external pilot is made of aluminum. 758 Construction S0700 Series Base Mounted Construction S0715 2-Position Single 2(B) (A)4 u r e w q SJ 3(R2) (R1)5 1 (P) SY SY S0700 5 (R1) 4 (A) 1 (P) 2 (B) 3 (R2) y t S0700 S0700 2-Position Double S0725 2(B) (A)4 u r e w q 3(R2) (R1)5 1 (P) 5 (R1) 4 (A) 1 (P) 2 (B) 3 (R2) y t 3-Position Closed Center S0735 (A)4 2(B) u r e w q 3(R2) 1 (P) (R1

Soft Start-up Valve

Flow Rate Characteristics Series AV2000-A AV3000-A AV4000-A AV5000-A Port size 1(P), 2(A) 1/4 3/8 1/2 3/4 1 3(R) 1/4 3/8 1/2 3/4 1(P) R 2(A) C[dm3/(sbar)] 9.2 13.1 19.2 34.8 41.3 b 0.36 0.27 0.32 0.66 0.34 Cv 2.4 3.1 5.1 12.6 13.7 Flow rate characteristics 2(A) R 3(R) C[dm3/(sbar)] 8.8 9.2 10.1 23.7 b 0.46 0.48 0.55 0.67 Cv 2.5 2.6 3.2 9.2 Pressure for switching from low speed air supply

4/5 Port Air Operated Valve SYJA3000 Series

(P) 3(R) 1 (P) (R)3 5(R) How to Order Manifold Base 2 position double 2 position double 4(A) (B)2 4(A) (B)2 Same manifolds as SYJ3000 series are prepared. 5(R) 1 (P) (R)3 3(R) 1 (P) SS5YJA3 Fill the same as SS5YJ3 (Refer to page 166.) 3 position closed center 3 position closed center 4(A) (B)2 4(A) (B)2 Instruct by specifying the valves and blanking plate assembly to be mounted on the manifold

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

0 o u r t !1 q i !2 e !

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

2 Port for Oil Dimensions (mm) (N.C.) 1in = 25.4mm Grommet: G Conduit: C Approx. 300 V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 Symbol Specifications -X12 Lubricant: Vaseline -X21 Grease-free (Seal: Fluorine-coated) + Throttle valve (Without check valve) -X214 Throttle valve (Without check valve) Note) M5 size: S (with seal) is not necessary. 611 A AS Series Construction AS1201-M5 AS2201/3201/4201 AS3201-02 o !1 w r u y e t !5 !2 !4 q !0 !3 i Component Parts No.

Air Cylinder

2 !3 !8 @ A !5 !6 @2 q i u e o r y !0 !1 MB MB1 CA2 CS1 CS2 @ B @ C !9 @1 t @0 Rod section Boss-cut Integrated clevis Component Parts No.

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

2 Port for Steam Dimensions (mm) 1in = 25.4mm Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G (PF) 1/2 C R R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

4/5 Port Air Operated Valve Series SYJA3000 1

5 port 4 port 3 position exhaust center 5 3 position pressure center 2 position single 2 position single (B) 2 (B) 2 (A) 4 (A) 4 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) How to Order Manifold Base 2 position double 2 position double (B) 2 (A) 4 (B) 2 (A) 4 Same manifolds as series SYJ3000 are prepared. 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) SS5YJA3 Fill the same as SS5YJ3 3 position closed center 3 position

HRX-OM-W002

PTSensor PS1 PS2 PS3 PT FL WH WH BK BK DOUT2(temp) DOUT( flow) PM DC(+) DC(-) M M FAN OUT OUT OUT + + + 3 3 3 2 2 2 1 1 1 3 2 3 2 1 1 4 1 2 3 1 4 Model /A /B A E E B 3 2 1 1 BK BL BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL RS232C DIO RS485 FG 13 15 16 12 10 11 14 6 8 9 3 5 7 2 4 1 13 15 16 12 10 11 14 1 1 11 6 8 9 3 8 3 9 6 9 3 6 7 2 5 2 5 7 5 7 2 10 12 13 15 1 4 4 4 14 Thermister T3 t

SYJA3000

(Value in the initial stage) 3 position exhaust center 3 position exhaust center (B) 2 (A) 4 (B) 2 (A) 4 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) 3 position pressure center 3 position pressure center How to Order Manifold Base Pilot Pressure Range (Single pilot) (B) 2 (A) 4 (B) 2 (A) 4 Uses the same manifold bases as the SYJ3000 series. 0.6 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) SS5YJA3 The remainder part number

asilltr

Female lhread length {"1') is shonerfor the lollowing . 2o0 (2') 1/g & 1A st. 1/s & 1/a st. r/s & 1/a st. l=o.44 25O (2112')' I/s st. r/s st. '/s stl=0.44 300 (3") ]/s & 1/a st. 1/e &r/l st. 1/e & 1A st. 400 (4) 1/s &1/a st. r/s & 1/a st. 1/e &14 st. Series NCQT Dimensions Spring Extend NCQTBO-OT T Type Bore,, 9t4,F' I 60re ,b,:!

Air Cylinder NCQ7 Series Compact Cylinder

Female lhread length {"1') is shonerfor the lollowing . 2o0 (2') 1/g & 1A st. 1/s & 1/a st. r/s & 1/a st. l=o.44 25O (2112')' I/s st. r/s st. '/s stl=0.44 300 (3") ]/s & 1/a st. 1/e &r/l st. 1/e & 1A st. 400 (4) 1/s &1/a st. r/s & 1/a st. 1/e &14 st. Series NCQT Dimensions Spring Extend NCQTBO-OT T Type Bore,, 9t4,F' I 60re ,b,:!

HRX-OM-T004

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.