VKF300

Mounted Type Common SUP, Common EXH Type 40/for base mounted type (Port A bottom ported) How to Order Applicable solenoid valves VKF334VV3KF3-40 05 01 Applicable blanking plate assembly VK300-42-1A Option Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Valve stations None With bracket (not mounted) Nil 1 station 01 Bracket VK300-43-1A F 20 stations 20 Port A: Rc(PT) 1/8 Port size 01 Rc(PT) 1/8 Type

REC

7 1 1 Head cover Aluminum alloy Rod seal B NBR White anodized w !8 1 1 Cylinder tube Aluminum alloy Piston seal NBR Hard anodized e !

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Mounted Type Common SUP, Common EXH Type 40/for base mounted type (Port A bottom ported) How to Order Applicable solenoid valves VKF334VV3KF3-40 05 01 Applicable blanking plate assembly VK300-42-1A Option Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Valve stations None With bracket (not mounted) Nil 1 station 01 Bracket VK300-43-1A F 20 stations 20 Port A: Rc(PT) 1/8 Port size 01 Rc(PT) 1/8 Type

HRX-OM-W032

(IEC 60417-5032-1) How to see the serial number W Z 001 December 2018 W Z 001 Year Symbol Remarks Month Symbol Remarks Serial no. 2018 W Repeated from A to Z in alphabetic al order 1 o Repeated from O to Z in alphabetical order, with O for January and Z for December 2019 X 2 P 2020 y 3 Q Fig. 1-1 Position of the product label HRS Series 1.4 Product Label 1-3 HRX-OM-W032 Chapter 1 Safety Instructions

REA/REB

Maximum load weight W 1 = W/Wmax = 1/9 = 0.111 L2 CE1 Examine W. CE2 L1 ML2B 2. Static moment M2 = WL1 = 10 x 0.2 = 2 [Nm] 2 = M2/M2max = 2/16 = 0.125 W = 1 [kg] = 10 [N] W C J G5-S Examine M2. Since M1 & M3 are not generated, investigation is unnecessary.

REA/REB

Maximum load weight W 1 = W/Wmax = 1/9 = 0.111 L2 CE1 Examine W. CE2 L1 ML2B 2. Static moment M2 = WL1 = 10 x 0.2 = 2 [Nm] 2 = M2/M2max = 2/16 = 0.125 W = 1 [kg] = 10 [N] W C J G5-S Examine M2. Since M1 & M3 are not generated, investigation is unnecessary.

REA/REB

0 e w #1 #3 !1 @0 i !7 @3 @1 @7 @2 @6 @5 #0 REAL10 Parts list Parts list Note No. Description No.

Tamper Proof and Flat Head Screw

Type Metric sizes Inch sizes Elbow Universal 2 3 3.2 01 23 1/8 5/32 3/16 1/4 5/16 3/8 1/2 04 06 08 10 12 03 05 07 09 11 13 4 6 8 10 12 Control type Meter-out Meter-in 0 1 Use 1/8 tubing.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

P Note 1) U S U S U S U S w AXT100-1-J 20 Note 1) AXT100-1-FU15 AXT100-1-FS e Note 1) Top entry connector for PU, JU while side entry connector for PS, JS.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

P Note 1) U S U S U S U S w AXT100-1-J 20 Note 1) AXT100-1-FU15 AXT100-1-FS e Note 1) Top entry connector for PU, JU while side entry connector for PS, JS.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 10-AS2301F-01-06-X214 1.

•

G flats 12 .., ~ w w ,. u Rat with rib .. ~ 2 .5 B '--=-1 1/ ' Flat with rib ' 8 . 8 >; ~ \L~~~!

VQ4000

D side Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R (1) (2) 3 m 2-5-11 Base Mounted 12 Series VQ4000 Kit (D-sub connector kit) F Applicable connector: D-sub connector (25P) (Conforming to MIL-C-24308) 70 38 2-Rc 1/8 (Pilot EXH port) 18 18 17.5 PE 30 42 R2 R1 P 1 3 5 2n-Rc 1/4, 3/8, C8, C10, C12 4(A), 2(B) port SMC 6-Rc 1/2 Rc 1/4: Rc 1/4 thread 1(P), 5(R1), 3(R2) port

HEC-OM-S008

01 03 0040 0001 BB [CR][LF] :01 03 02 09E1 10 [CR][LF] Answer 25.29 deg.C. 0041 Reading external Sensor temperature 1 :01 03 0041 0001 BA [CR][LF] :01 03 02 09E1 10 [CR][LF] Answer 25.29 deg.C. 0043 Reading status 1 :01 03 0043 0001 B8 [CR][LF] :01 03 02 0005 F5 [CR][LF] Run with alarm 0044 Alarm flag 1 1 :01 03 0044 0001 B7 [CR][LF] :01 03 02 8000 7A [CR][LF] ERR15 :01 06 0050 0 A9 [CR][

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

-23 AS131F-M5-07 3.2 17 8.4 24.4 1/4" M5 x 0.8 12 21.6 20.7 31.9 13.7 9.3 17.5 31.8 13.1 12.7 AS131F-U10/32-07 AS231F-01-04 4 9.3 24.9 1/4" 10-32UNF 12 (12.7) 18 14.2 32.1 27.1 31.1 36.1 1/8 ASF AS231F-01-01 AS231F-01-06 26.9 37.2 17 12.7 31.8 17.5 9.3 13.1 24.4 13.5 22.9 6 11.6 10.9 14 8.4 1/8" AS231F-01-03 AS231F-01-08 30.9 41.7 28.2 18.5 8 15.2 21 12.9 16.2 9.3 5/32" 24.9 18 12 (12.7)

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

2 1 1 G 2 01 For water, air and vacuum Series Option 1 2 3 10 20 30 None Foot type bracket Nil F Note) Foot brackets are packed with valves.

90

NPN 1 output ISE30A-01-N-ML Digital pressure PNP 1 output ISE30A-01-P-ML NPN 1 output/ Voltage output ISE30A-01-C-ML switch Note 3) NPN 1 output/ Current output ISE30A-01-D-ML Note 1) This is an assembly of the bracket and resin panel nut. Note 2) l in part numbers for a round type pressure gauge indicates a type of connection thread.

CYP

Dynamic moment Me3 L2 We W = 1/3 14.7 (50 + 27) 103 Review Me3. = 0.38 [Nm] 3 = Me3/Me3 max = 0.38/3 = 0.13 Guide central axis A Me1 W We Me1 = 1/3 We (L1 + B) 103 = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 4 = Me1 /Me1 max = 0.48/3 = 0.16 Review Me1.

Shock Absorbers and Rate Controls

. 0 = 2 0 . . , . . o l:.1:/ 0 a 0 2 0 4 0 . 6 0 8 1 . 0 1 2 1 . 4 1 6 1 . 4 2 . 0 1 . 0 1 . 5 2 0 2 5 3 . 0 0 0 5 TOTAL ENERGY (i IbS/C) (Tho!

ZP

P. 82 P. 83 ZPB-X3 (J/JB/JF)01 68 Vacuum Equipment Precautions 1 Be sure to read this before handling.