Thermo-chiller

or less Maximum load current 500 mA AC/DC (resistance load) Minimum load current 5 VDC 10 mA Output voltage 24 VDC 10% 500 mA MAX (No inductive load) Contact output signal To the thermo-chiller Users equipment side 7 24 VDC 6 24 VDC output (500 mA MAX) 5 15 14 24 VCOM output 13 24 VCOM Signal description Default setting 12 4.7 k Contact input signal 2 Circuit diagram 4 1 k 11 Run/stop signal

PF2D

or less Data Weight 45 g Maximum load current: 80 mA NPN open collector Internal voltage drop: 1.5 V or less (With load current of 80 mA) (PF2D300, PF2W300, PF2W330) Maximum applied voltage: 30 V 2 outputs Environmental resistance Note 4) Output specifications Switch output PNP open collector Maximum load current: 80 mA Internal voltage drop: 1.5 V or less (With load current of 80 mA) (PF2D301

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

less 200 mA or less 100 mA or less 100 mA or less Compatible encoder Incremental A/B phase (800 pulse/rotation) Protocol EtherCAT*2 EtherNet/IP*2 PROFINET*2 DeviceNet IO-Link Communication specifications Applicable system Version*1 Conformance Test Record V.1.2.6 Volume 1 (Edition 3.14) Volume 2 (Edition 1.15) Specification Version 2.32 Volume 1 (Edition 3.14) Volume 3 (Edition 1.13) Version

Nozzle Type Ionizer

or less Discharge stop signal Connected to 0 V Voltage range: 5 VDC or less Current consumption: 5 mA or less Connected to +24 V Voltage range: 19 VDC to power supply voltage Current consumption: 5 mA or less Reset signal Input signal External switch signal 1 External switch signal 2 Discharge signal Max. load current: 40 mA Residual voltage: 1 V or less (Load current at 40 mA) Max. applied

Speed Controller with

Flow Rate and Sonic Conductance Model AS1002F-mA AS2002F-mA AS2052F-mA AS3002F-mA AS4002F-mA Tubing O.D.

10

Cushion valve G 2 x Rc P W V Port G E Width across flats KA TX D E B C H1 AL MM MB MA N 2 x 4 x J N TY B C Width across flats B1 A H K F TT ZZ + Stroke S + Stroke With rod boot d e 10.2 10.2 f h l [mm] Bore size [mm] A AL B B1 C D E F G H H1 J K KA MA MB MM N P S TT TX TY V W ZZ 32 22 19.5 46 17 32.5 12 30 13 13 47 6 M6 x 1 6 10 16 4 M10 x 1.25 27 1/8 84 17 48 49 4 6.5 135 40 30 27 52 22

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Coil rated voltage (V) 24, 6, 12, 48 Allowable voltage fluctuation (%) Power consumption (W) [Current mA] 15 to +10% of rated voltage 1.8 (With indicator light 2.1) [24 VDC: 75 (With indicator light 87.5)] Note) DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Inrush Note) Apparent power (VA) [Current mA] AC 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200

Pin Clamp Cylinder Series CKQ/CLKQ

Contact Protection Box Specifications CD-P12 CD-P11 Part no. 100 VAC 200 VAC Load voltage 24 VDC Note 2) 25 mA 12.5 mA Max. load current 50 mA Lead wire length Switch connection side 0.5 m Load connection side 0.5 m Note 3) (Example) D-F9PWL61 Part No. of Lead Wires with Connectors (Applicable only for connector type) Flexible lead wire specifications Contact Protection Box Internal Circuit

IC

Step 20 Step 5 Analog output 4-20 mA 0-10 VDC P4 Set pressure P3 PPA P2 AL P1 0 1023 Digital input data Time Digital signal Digital signal Analog signal Analog signal Analog signal Analog signal Controller Actuator Electro-pneumatic regulator Actuator Electro-pneumatic regulator Controller PLC PWR PWR ERR ERR 1bit 2 bit . . . . 10 bit 010 VDC 420 mA 010 VDC 420 mA Series ITV Series ITV Series

Ejector Valve Unit Series ZYY/ZYX 1

OUT1: Red, OUT2: Green) Setting trimmer rotation angle 3 turns 200 degrees 3 turns 200 degrees 3 turns 200 degrees 200 degrees 17 mA or less (When 24 VDC is ON) 25 mA or less (When 24 VDC is ON) 17 mA or less (When 24 VDC is ON) Current consumption 0.2 MPa Max. operating pressure Note 1) When using an ejector, there is no problem if pressure of 0.5 MPa is applied for 1 second or less.

Plug-in Unit

), 0.5 W DC (21 mA) 24 VDC 12 VDC Power consumption (Current) 1 W DC (83 mA), 0.5 W DC (42 mA) Note 1) Use dry air to prevent condensation at low temperatures.

100

Residual voltage 2 V or less Max. 80 mA Residual voltage 2 V or less * The FUNC terminal is connected when using the copy function.

ZSE30A(F)/ISE30A

Approx. 1 k Analog output 2.4 to 20 mA 2.5% F.S. 4 to 20 mA 2.5% F.S. Output current (Rated pressure range) Linearity Note 3) 1% F .S.

Lightweight and Compact

100/150 Rated load voltage 48 VAC or less/30 VDC or less Maximum load current 500 mA AC/DC (resistance load) Minimum load current 5 VDC 10 mA Output voltage 24 VDC 10% 500 mA MAX (No inductive load) Contact output signal HRSH 090 HRSH To the thermo-chiller Users equipment side HRSE 7 24 VDC 6 24 VDC output (500 mA MAX) 5 HRZ 15 14 HRZD 24 VCOM output 13 24 VCOM HRW Signal description Default

53

kW Input signal Rated load voltage 48 VAC or less/30 VDC or less Maximum load current 500 mA AC/DC (resistance load) Minimum load current 5 VDC 10 mA Output voltage 24 VDC 10% 500 mA MAX (not usable for inductive load) Contact output signal To the thermo-chiller Users equipment side 7 24 VDC 6 24 VDC output (500 mA MAX) 5 15 14 24 VCOM output 13 24 VCOM Signal description Default setting

VQC

Current consumption Note 2) Max. 100 mA Max. 65 mA SQ Input/output specifications Number of inputs 8 4 VQ0 Number of outputs 8 4 24 VDC 10% Valve supply voltage VQ4 Possible supply current Note 3) Max. 240 mA Max. 120 mA VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

ISE70/75/75H

Maximum 30 V (NPN only), 80 mA, Residual voltage 1 V or less See the operation manual for information on how to set and on handling precautions. Output -43 Output -65 DC (+) DC (+) (Brown) (Brown) N.C.

q"s

collector oulput: I\rax. 30 V, 30 mA PNP ooen colleclor outout: l\,4ax. 30 mA :: W Lineariiy Within 11% (full sDan Hysleresis Within 0.5% (full span) Repeatability Within 10.5% (fullspan Sensitivity Wilhin 0.2% (full span) TemDerature characteristics Wilhin 10.12% (f ull span)/'C Output p.

C95Series

5-40 mA I' Response time 1 mS or less 1 mS or less 1 mS or less I mS or less Output response -OffDefay lime -Internal voltage d~ 0.8 V or less 0.8 V or less 4 V or less 4 V or less Leak current 24 YDC: 10)l.A or less 24 VDC: 10).lA or less 24 VDC: 1 mA or less 24 VDC: 1 mA or less Response position: Response posihon: Response position: Response posilion: Indicator lamp Red: ON Red: ON Red

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

), 0.95 W DC (40 mA) Note 3) Power consumption (Current) 12 VDC 0.4 W DC (34 mA), 0.95 W DC (80 mA) Note 3) Note 1) Use dry air to prevent condensation when operating at low temperatures.