Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

40 15 30 37 10 3H9 ( ) depth 3 +0.025 0 12 F +0.025 0 3H9 ( ) depth 3 N 1 x F 2 30 24 M 0.5 23 24 Z ZZ (NN 1) x H G H 13 6.5 6.5 13 B A 3.2 6.5 7 7 15 1 3H9 ( ) depth 3 +0.025 0 4 NN x M4 x 0.7 thread depth 8 B A 3H9 ( ) depth 3 +0.025 0 HA GA Section AA Section BB (mm) ZZ 74 79 90 108 126 176 M 49 54 65 83 101 151 Z 48.5 53.5 64.5 82.5 100.5 150.5 K 23.5 33.5 43.5 53.5 63.5 88.5 J 19.5

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

2 Port for Oil Dimensions (mm) (N.C.) 1in = 25.4mm Grommet: G Conduit: C Approx. 300 V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port

Rotary One-touch Fittings Series KS/KX

t i f h c u o t e n O d a e r h t e l a m ) T P ( R 3 KM12 5 1 M K h c u o t e n O g n i t t i f d o R g n i t t i f h c u o t e n O 3 6 8 0 1 KM15 6 1 M K h c u o t e n O g n i t t i f d o R g n i t t i f h c u o t e n O 3 4 6 Applicable Tube KM16 Tube material Nylon, Soft nylon, Polyurethane KM14 Tube O.D.

CL

62 62 67 19 20 21 23 12 12 11 12 85 95 95 103 12 14 18 25 14 16.5 20 26 57.5 69 69 76 91 101 102 111 38 45 45 52 13 17 17 19 24 29 36 44 18 22 22 30 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 Up to 200 Up to 300 Up to 300 Up to 300 15.5 19.5 19.5 27 M4 x 0.7 depth 7 4 5 5.5 6 6 8 8 10 12 16 10 14 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Without rod boot ZZ e f h l ZZ With rod boot

One-touch Fittings Series KQ2

H (Hex.)

Integrated Controller

H A B C H A B C 16 25 32 16 25 Rod flange: EQY H -F Head flange: EQY H -G LL FV M FV M FZ FX FT FX FZ 4 x FD FT 4 x FD The head flange type is not available for the EQY32.

Air Fittings Fitting Series For Special Environment

O e b u t ) h c n I ( . n i M e l o h . a i d d a e r h T T P N . o N t r a P H ) . x e H ( D L A * M . t W ) f g ( 6 9 . 0 ) 5 . 4 2 ( 1 8 . 0 ) 5 . 0 2 ( 5 7 . 0 ) 9 1 ( 8 1 . 0 ) 6 . 4 ( 8 / 1 S 4 3 7 0 H R K 9/ 6 1 ) 9 2 . 4 1 ( 3 6 . 0 ) 6 1 ( 1 1 5 7 . 0 ) 9 1 ( 6 1 4 / 1 S 5 3 7 0 H R K 8 9 . 0 ) 5 2 ( 4 / 1 8 / 3 S 6 3 7 0 H R K 1 1 / 6 1 ) 6 4 . 7 1 ( 3 7 . 0 ) 5 . 8 1 ( 8 2 0 4

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

8.5 13 12.7 2-2.6 (For manifold mounting) 28.1 [35.1] (Light/surge voltage suppressor) 2-2.6 (For mounting) + 14.5 3 23 20 2.3 55.6 [57.8] 12.7 28.1 [35.1] 8 9 M5 x 0.8 (P, R port) 23 7 (Bracket) R P 11 11.5 1.4 (PE port) L plug connector (L): SYJ52-L-M5 (-F) M plug connector (M): SYJ52-M-M5 (-F) DIN terminal (D): SYJ52-D-M5 (-F) M8 connector (M0): SYJ52-W0-M5 (-F) Applicable cable O.D.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

bolt MY1H LZ Stroke Bore size (Shock absorber stroke) T S E EA EB W h TT Stroke adjustment unit Shock absorber FC FA EY EC (mm) E EA EB EC EY h S T TT FA FC Shock absorber model Applicable cylinder W F MY1H25 18 9 40 7.5 53.5 16 21 3.5 46.7 7 53 RB1007 5 (Max.16.5) MY1H32 25 14 45.6 9.5 67.5 23 20 4.5 67.3 12 64 RB1412 8 (Max.20) MY1H40 31 19 55 11 82 24.5 26 4.5 67.3 12 9 (Max.25) 75

Vacuum

Panel mounl adapter H i s h-p reci s io n D i s *"l?

VCS

Stainless Steel (mm) A B C D E F G H J L Bracket part no.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Note Platinum silver q Description DXT170-Cu Common with Series VZ 000 1 3 Piston plate Body Resin Resin Black w e O-ring NBR 13 x 11 x 1 i Piston Spool valve r Aluminum, HNBR Black painted t Resin End cover y Stainless steel Spool spring 3-3-56 56 5 Port Solenoid Valve Body Ported Series VZ5000 2 Position Single Foot bracket VZ5120-01-F VZ5120 Grommet (G), (H) VZ5120-01 G H G H (Mounting

IDX-OM-W035

IDFB37E-23 IDFB55E-46 IDFB75E-46 107SCFM 161SCFM 226SCFM 300SCFM 37 F (2.8) 3/h) 3/h) 3/h) 3/h) (182m (273m (384m (510m (ANR) (1) 120SCFM 173SCFM 258SCFM 353SCFM 45 F (7.2) 3/h) 3/h) 3/h) 3/h) (205m (294m (438m (600m 130SCFM 181SCFM 297SCFM 406SCFM 50 F (10) 3/h) 3/h) 3/h) 3/h) (221m (308m (504m (690m 100psi (0.7MPa) 100 F (37.8) 100 F (37.8) 41122 F (550) 22 150psi (0.15

Floating Joint

JS20, 32, 40, 63 Center of sphere M M U U D J F B E G P A R H (mm) Max. thread depth P Center of sphere R Allowable eccentricity U Max. operating tension and compression force (N) Weight (kg) M A B C D E F G H J Model JS10-4-070 JS16-5-080 8.5 0.5 17 0.01 14.4 M4 x 0.7 9.5 12 4 7 4.7 80 4 1.5 26 12 0.5 23 19 0.02 M5 x 0.8 13.5 16 6 10 5.8 210 5 2 34.5 JS20-8-125 JS32-10-125 15.5 0.5 29.9

CE

23 Series CE1 Dimensions: 32, 40, 50, 63 Both ends tapped style: CE1B Bore size Stroke 4-N through 8-O thread depth 20 20 2.5 91 500 or 3000 K 7 H G D M E J F C X B + Stroke L Z M A + Stroke E T 2-P (Port size) I Q Metal connector 15.5 M14 x 1 A B C D E F G H I J K Bore size (mm) 32 40 50 63 Standard stroke 50, 75, 100, 125, 150, 175, 200, 250, 300 131 90 27 16 45 49.5 64 M14 x 1.5 14 4.5

ARM10/11

G H J K L M N O P Q R F.R.L.

ARM10/11

G H J K L M N O P Q R F.R.L.

C95

Bore size (mm) CP95 Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht NCM 32 23 30 23 26.5 23 25.5 27.5 77 27.5 67 25 32.5 24.5 35 31 38 40 26 34 26 30 26 29.5 27.5 81.5 27.5 71.5 27.5 36.5 27.5 38.5 33 42 NCA 50 31 38 31 34.5 31 33.5 87 77 34 41 34.5 43.5 39 46.5 63 36 43 36 40 36 39 93.5 83.5 39 46 39.5 48.5 44 51.5 D80 45 52 45 48.5 45 47.5 103 92.5 46.5 52.5 46.5 55 51.5 58 100 53.5

HRX-OM-X071

ECO F RUN MPa ALM PSI WRN LPM GPM Lighting up RUN MPa ALM M RMT WRN LPM H RUN EXT SEC RMT H AT SEC MENU RUN/ MENU RUN/ STOP STOP ENT Press and hold for approximately 1second.

Vacuum Unit

V None (SI unit only) H V V J V None (SI unit only) P Pressure sensor 0 to 101 Analog output 1 to 5 V T 100 to 100 F Individual port exhaust For Manifold 100 to 100 High-noise reduction silencer exhaust High-noise reduction silencer exhaust H N Without pressure switch for vacuum/pressure sensor 1 With exhaust port when w is 12 or 15 2 Combination of direct exhaust and end plate exhaust