C85

40) (100) 89 0.5 W W W F 10.0 (40) (40) (40) 74 36 0.7 93 (40) 54 37 26 33 0.3 69 G 41 27 39 19 25 0.5 52 C8525 33 22 32 15 20 0.7 C8520 43 1.0 Foot: L Rod side flange: F Head side flange: G (100) (40) (40) (40) (40) (100) 0.3 L (100) (40) (40) (40) (40) (100) 0.5 W W F W (100) (40) (40) (40) (40) (100) 0.7 (40) (40) (40) (100) 79 38 0.3 0.1 G (40) (40) 60 29 37 0.5 76 600 500 400 300 1000

CM2

With Rod Boot Data l Z Symbol h B3 e f Stroke Bore size (mm) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 36 17 30 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 160 173 185 198 223 248 273 25 36 17 32 72 85 97

CQ2

mounting height. 20.5 23.5 M14 X 1.5 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 28.5 20.5 23.5 28.5 26 28.5 33.5 26 28.5 33.5 32.5 35.5 43.5 32.5 35.5 43.5 Standard (mm) Bore (mm) 32 40 50 63 80 100 Stroke range (mm) 5 to 100 5 to 100 10 to 100 10 to 100 10 to 100 10 to 100 O N M I E L A H D F J K P Q S U W Z B C M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 M16 X 2.0 M20 X 2.5 10.5 10 13

MY1

G D Za -X 4-MM 20E1 E1 E4 E4 E3 E3 C E2 E2 F B Data G D Section Za detail (Adjustable range) Section Z detail (Adjustable range) Q P Zb JJ F B3 K B2 H B1 C1 Z B F A L 2 x 2-LD Section Zb detail (Adjustable range) H A H A holding bolt (mm) A 110 131 B 110 130 C 55 65 D 70 80 F 126 149 G H 37 37 Model MY-J50 MY-J63 Applicable bore size MY1B50 MY1B63 90 100 J Mounting direction (1) Mounting

MXQ

Bore size/Stroke (mm) 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Standard type With buffer With end lock Axial piping type With buffer and end lock With buffer, Axial piping type Nil F R (2) P FR (2) Adjuster option FP Nil

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Type of actuation Bracket 1 2 Normally closed Normally open Nil: Without bracket F: With bracket AC specifications (50/60Hz) 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] 3 port Thread type For type "W", DC voltage is only available. F Nil Rc G N T NPT NPTF Brackets are not installed.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Control Valves Air Grippers Modular F.

CNA

CNA63 or more. 0.5 MPa Graph (4) Load in the direction of rod extension Load in the direction of rod retraction m 0.3 MPa Graph (5) F 0.4 MPa Graph (6) m 0.5 MPa Graph (7) F 9-7-6 7 Model Selection Series CNA Selection Graph Graph (5) Graph (2) 0.3 MPa P < 0.4 MPa 0.3 MPa P < 0.4 MPa 1000 1000 500 400 300 500 400 300 100 80 200 200 100 63 CL 80 50 40 100 100 Load weight: m (kg) Load

CNA

CNA63 or more. 0.5 MPa Graph (4) Load in the direction of rod extension Load in the direction of rod retraction m 0.3 MPa Graph (5) F 0.4 MPa Graph (6) m 0.5 MPa Graph (7) F 9-7-6 7 Model Selection Series CNA Selection Graph Graph (5) Graph (2) 0.3 MPa P < 0.4 MPa 0.3 MPa P < 0.4 MPa 1000 1000 500 400 300 500 400 300 100 80 200 200 100 63 CL 80 50 40 100 100 Load weight: m (kg) Load

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

ZP 40HB ZP HB ZP HB 40 50 63 80 100 125 F F 4 x 9.5 F 4 x 8 4 x 6 3 x 6.5 4 x 5 G 3 x 4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions (mm) Dimensions (mm) Dimensions (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41 28 43 20.5 30 13 63 65 46 68 31.5 50 4.5 21.5 100 103 69 107 47.5 80 35.5 ZP125HB ZP50HB ZP80HB 50 52 36 54

Table of Contents

A B C D E F G H J Bracket dimensions Bracket part no.

VFR

exhaust center: VFR540 -F(Z) 3 position pressure center: VFR550 -F(Z) 0 1 0 1 0 1 0 1 [For Rc 3/4] Rc 1/8 External pilot port 3-2.3 2-7 (Mounting hole) Rc1/8 (PE port) 174.5 [176.5] 31 [41] 100 9 [20] 2 (Lead wire electrical entry) Manual override (Non-locking) A B [13] 11 2 48 60 72 [79] 12 COM A B PE A B X EA EB P [For Rc 3/8, 3/2] Rc 1/8 External pilot port 21 [31] 34 8 161.5 [165.5]

Proposals for Energy Saving

120 140 63.5 75.5 88 to 1000 to 1000 to 1000 Front flange type (F) 4FD FY B FT FX (mm) FZ Stroke range Bore size (mm) B FT FD FX FY FZ 40 50 63 74 78 100 9 9 12 12 16 16 80 100 112 58 61 75 100 125 138 to 1000 to 1000 to 1000 Rear flange type (G) 4FD FY B FT FX ZZ + Stroke FZ (mm) Stroke range Bore size (mm) B FT FD FX FY FZ ZZ 40 50 63 74 78 100 9 9 12 12 16 16 80 100 112 58 61 75 100 125

air-filter-e

AFF75B AFF-EL75B AFF2C AFF-EL2B AFF-EL2B-F AFF4C AFF-EL4B AFF-EL4B-F AFF8C AFF-EL8B AFF-EL8B-F AFF22C AFF-EL22B AFF-EL22B-F AFF37B AFF-EL37B AFF-EL2B AFF-EL37B AFF-EL4B AFF-EL8B AFF-EL11B AFF-EL22B AFF-EL75B Except option F For option F Element assembly Cotton paper, others AFF-EL11B AFF-EL11B-F 4 AFF-EL2B-F AFF-EL4B-F AFF-EL8B-F AFF-EL11B-F AFF-EL22B-F 1) Element assembly: With gasket

Air Preparation Equipment

AFF75B AFF-EL75B AFF2C AFF-EL2B AFF-EL2B-F AFF4C AFF-EL4B AFF-EL4B-F AFF8C AFF-EL8B AFF-EL8B-F AFF22C AFF-EL22B AFF-EL22B-F AFF37B AFF-EL37B AFF-EL2B AFF-EL37B AFF-EL4B AFF-EL8B AFF-EL11B AFF-EL22B AFF-EL75B Except option F For option F Element assembly Cotton paper, others AFF-EL11B AFF-EL11B-F 4 AFF-EL2B-F AFF-EL4B-F AFF-EL8B-F AFF-EL11B-F AFF-EL22B-F 1) Element assembly: With gasket

LG1H

Refer to pages starting with 181 for mounting. 30 100 95 95 B 8(4)-6.2 (160) () () 110 95 20 95 A () () (140) A B 100 200 300 400 500 600 700 800 900 1000 1200 Stroke Model LG1H202SC-100-F LG1H202SC-200-F LG1H202SC-300-F LG1H202SC-400-F LG1H202SC-500-F LG1H202SC-600-F LG1H202SC-700-F LG1H202SC-800-F LG1H202SC-900-F LG1H202SC-1000-F LG1H202SC-1200-F 50 150 250 350 450 550 650 750 850 1050

MGG

0.5 0.5 200st 100st 200st 100st 100st 75st 75st 0 0 0 0 0 0 10 20 30 40 50 20 40 60 80 100 10 20 30 40 50 60 70 Allowable end load F (N) Allowable end load F (N) Allowable end load F (N) MGGM 40Stroke 3 (Slide bearing type) 2.5 Deflection Y (mm) 800st 2 700st 600st 1.5 500st 1 300st 400st st: Stroke (mm) 0.5 100st 200st 0 0 20 40 60 80 100 120 140 160 Allowable end load F (N) MGGM 50Stroke

ZP

EPR AMJ Material Pad diameter (mm) ZP 40HBN ZP 50HBN ZP 63HBN ZP 80HBN ZP100HBN ZP125HBN 40 1 0 17 +10 +1 50 2 0 33 +19 +1 N NBR Misc. 63 40 3 0 63 +37 +2 40 S Silicon rubber 80 50 6 0 103 +61 +2 50 U Urethane rubber 100 63 12 1 206 +121 +4 63 F Fluoro rubber 125 80 22 3 390 +228 +7 80 E EPR 100 100 Pad type 125 125 HB Large bellows pad Dimensions 40 50 63 80 100 125 ZP 40HB ZP HB ZP HB F

Single Axis Electric Actuator Series LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil G R Y Brake 50W 100W 200W 1 2 3 None With brake Nil K Power supply voltage Stroke 100/110VAC 50/60Hz 100/115VAC 50/60Hz 200/220VAC 50/60Hz 200/230VAC 50/60Hz Without motor Lead screw lead 1 H B C F A D E 8mm 12mm 20mm 5mm 10mm 25mm 40mm 2 0 Lead screw type The tables above show the definition for each symbol only and cannot

MXS

F A F Lr CL 16 16 16 Lr=89mm MLGC 0.035 0.14 0.04 MXS16-100 MXS16-20 MXS16-10 MXS16-125 MXS16-100 CNA MXS1675 MXS1650 MXS1640 0.12 0.030 MXS16-125 MXS16-50 MXS16-75 MXS16-125 MXS16-30 MXS16-40 MXS16-100 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.10 0.025 MXS1630 CB 0.08 0.020 MXS1620 MXS1675 0.02 CV/MVG 0.06 MXS1610 0.015 MXS1650 MXS1640 0.04 0.010 MXS1630 MXS1620