Bore Size: Ø50, Thread: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 50mm, Auto Switch: Y7PV--Solid State, Gen. Purpose, 3 Wire PNP, Vertical, Lead Wire or Prewired Connector: 5m, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Bore Size: Ø20, Thread: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 100mm, Auto Switch: Y7PV--Solid State, Gen. Purpose, 3 Wire PNP, Vertical, Lead Wire or Prewired Connector: 5m, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Bore Size: Ø50, Thread: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 25mm, Auto Switch: Y7PV--Solid State, Gen. Purpose, 3 Wire PNP, Vertical, Lead Wire or Prewired Connector: 5m, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Bore Size: Ø32, Thread: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 50mm, Auto Switch: Y7PV--Solid State, Gen. Purpose, 3 Wire PNP, Vertical, Lead Wire or Prewired Connector: 5m, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Bore Size: Ø25, Thread: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 150mm, Auto Switch: Y7PV--Solid State, Gen. Purpose, 3 Wire PNP, Vertical, Lead Wire or Prewired Connector: 5m, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Bore Size: 10mm, Thread: ø6-ø20 Bore: M Thread; ø25,ø32 Bore: Rc 1/8, Stroke: 10mm, Auto Switch: Y7PV--Solid State, Gen. Purpose, 3 Wire PNP, Vertical, 0.5M, Lead Wire or Prewired Connector: Z (5m)

Bore Size: 25mm, Thread: ø6-ø20 Bore: M Thread; ø25,ø32 Bore: Rc 1/8, Stroke: 50mm, Auto Switch: Y7PV--Solid State, Gen. Purpose, 3 Wire PNP, Vertical, 0.5M, Lead Wire or Prewired Connector: Z (5m)

Bore Size: 20mm, Thread: ø6-ø20 Bore: M Thread; ø25,ø32 Bore: Rc 1/8, Stroke: 100mm, Auto Switch: Y7PV--Solid State, Gen. Purpose, 3 Wire PNP, Vertical, 0.5M, Lead Wire or Prewired Connector: Z (5m)

VQ4000

00-A-5 0 0 200 400 600 800 1000 1200 1400 VQ45 (Plug lead type) B ARBQ4000-00-B-5 Flow rate (l/min(ANR)) P ARBQ4000-00-P-5 ARBQ4000-00-P (P B) 0.7 Outlet pressure (MPa) 0.6 SMC 0.5 0.4 0.3 0.2 50 147 0.1 0 0 200 400 600 800 1000 1200 1400 B 2 SMC Flow rate (l/min(ANR)) 12 1 P 5 3 R2 R1 Pressure Characteristics 59 PE 4 A Conditions Inlet pressure: 0.7 MPa Outlet pressure: 0.2 MPa Flow rate

ZR

Supply port location Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Individual Spacer Part no.

Auto Switch Guide

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Other Warning 1.

MXQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Repeatability Dimensions CX Model Height Width Parallelism Overall length Height tolerance MXQ12-30 MXS12-30 30 46 0.035 0.08 86 DSymmetric type is also standardized.

C76

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Replaceable Rod Seal Strong, Corrosion-proof Barrel Rod seal can be quickly replaced, greatly extending the cylinder life.

C85

1 y q 5A 5B CJ2 CM2 Non-rotating CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Rod cross section Built-in magnet Standard 8 MB Component Parts No.

CXWM/CXWL

MY CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX DRB0805 RB1006 RB1411 Shock absorber model -X CXWM32-25, 50 Applicable slide unit CXWM -25 10 16 CXWM -25 20 25 CXWL32-25 20Thread O.D.

VZ100/300/500

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Non-locking push type M5 x 0.8 VT For N.O.

Vacuum System Peripherals:

ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com r Stations ZL Indicate X for the position of ejector/valve, etc.

CQS

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 5 15 Note) 25 Note) 10 10 5 2 10 Note) 25 Note) RQ 5 1 15 Note) Note) Please consult with SMC for shorter stroke length than indicated in the table.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

800 1500 1500 LEL L1 L1 [mm] L1 [mm] L1 [mm] L1 [mm] 600 600 1000 1000 X m Me LEM 400 400 500 500 200 200 LEY 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LES Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 LEPY LEPS 1000 1000 800 800 1500 1500 Horizontal L2 [mm] L2 [mm] L2 [mm] L2 [mm] LER L2 600 600 1000 1000 Y m Me 400 400 LEH

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200