Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

0 5 10 15 20 25 30 CRA1 0 9 8 7 6 5 4 3 2 1 Load N Load N MSQ2A MSQ20 CRQ2 MSQ 300 MSQB20 (Basic type) MSQB2A (Basic type) 100 MRQ Displacement m Displacement m 80 250 D60 20MSQA2A (High precision type) 10 20 30 40 190 200 40 MSQA20 (High precision type) 20 0 10 20 30 40 50 12 10 8 6 4 2 0 Load N Load N MSQ30 MSQ3A MSQB30 (Basic type) 300 MSQB3A (Basic type) 100 250 Displacement m Displacement

CXWM/CXWL

Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.

NCA1

Bore Piston Area Forces (lbs); Push Stroke (in) (in) Operating medium Pressure (PSI) 50 60 80 100 200 250 1.5 1.767 88 106 141 177 353 442 HOW TO USE THIS TABLE 1 Locate column with desired operating pressure. 2 Move down that column and locate the thrust value which is equal (or the next larger to the force to be delivered by the cylinder.) 3 On that same line, locate in the first (left)

Air Cylinder NCA1 Series

Bore Piston Area Forces (lbs); Push Stroke (in) (in) Operating medium Pressure (PSI) 50 60 80 100 200 250 1.5 1.767 88 106 141 177 353 442 HOW TO USE THIS TABLE 1 Locate column with desired operating pressure. 2 Move down that column and locate the thrust value which is equal (or the next larger to the force to be delivered by the cylinder.) 3 On that same line, locate in the first (left)

Series CE1

, 125, 150, 175, 200, 250, 300 100, 125, 150, 175, 200, 250, 300, 400, 500 32 131 90 27 16 45 49.5 64 M14 X 1.5 14 4.5 14 40 177 136 27 16 52 57 71.5 M14 X 1.5 24 5 14 50 63 200, 300, 500 193 144 32 20 64 71 85.5 M18 X 1.5 22.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 X 1.5 21 7 18 P T* X M N O Q Z L Bore size (mm) 32 40 50 63 Rc(PT) 1/8 57.5 41 34 5.5 M6 X 1 56 30 14 Rc(PT) 1/8 64.5

A

283 59 112 Flow rate quoted at: 0.5MPa supply 0.03MPa pressure drop NAL900 100 288 63 2 H O W T O O R D E R L U B R I C AT O R S E R I E S AL AL800-12 (1 14 PT) AL800-14 (1 12 PT) AL900-20 (2 PT) Courtesy of Steven Engineering, Inc. !

Magnetically Coupled Rodless Cylinder/ Basic Type CY3B Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Standard stroke 6 10 15 20 25 32 40 50 63 6mm 10mm 15mm Port thread type 20mm Bore size 6, 10, 15 Type M thread Rc NPT G Symbol 25mm 32mm Nil 20, 25, 32, 40 40mm TN TF 50, 63 50mm 63mm Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) 300 50, 100, 150, 200 6 500 50, 100, 150, 200, 250, 300 10 15 20 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 1000 1500 100

Magnetically Coupled Rodless Cylinder Slider Type: Ball Bushing Bearing CY1L Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40

Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) Made to Order: Individual Specifications (For details, refer to pages 1538 and 1539.) 6 10 300 500 50, 100, 150, 200 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350 400, 450, 500 Symbol Specifications -X116 -X168 -X322 -X431 Hydro specifications 15 750 Helical insert thread specifications 20 25

q"s

Relief flotv characledstics suppry pressurc: i .0 r pa Pressure characteiistics sei plessu:0.4 Mpa Flow characteristics supp y pGssure: 1.0 M Pa 1 0.9 0.8 d : 0 . 7 0 6 0 .s 'rt E o.+ 0 0.1 0.0 0.0" " " o 50 100 150 200 250 300 o 1 0.6 0.8 1 1.2 Supply pfessure (lvlPa) 50 100 150 200 250 Frow rale (4min (ANB)) Series lTV205n Hysteresis Linearity Repeatability 0.9 0.8 o.7 ii 0.6 3 o.s : 0.4

VZ100/300/500

It can be used in the vacuum (up to 100 kPa) or low pressure line with 0.15 MPa or less.

HRL

Technical Data HRS-R HRS HRS090 HRS 100/150 HRS200 HRSH090 HRSH HRSE HRR HRL HRZ HRZD HRW HECR HEC HED HEB Lots of variations are available according to the users requirements.

Thermo-con/Rack Mount Type

Overcurrent protector 10 A 14 A Current consumption 5 A (100 V) to 2.5 A (240 V) 9 A (100 V) to 4 A (240 V) 10 A (100 V) to 4 A (240 V) 8 A (200 V) Power consumption 440 W*1 850 W*1 900 W*2 1500 W*2 Alarm Refer to Alarm.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

Non-contact Gripper

150 300 200 120 Consumption flow rate [L/min (ANR)] Consumption flow rate [L/min (ANR)] Consumption flow rate [L/min (ANR)] 250 100 160 ZP3 200 80 120/150 120 150 60 ZP3E 40/60/80 80 100 40 ZP2 40 50 20 ZP2V 0 0 0 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 0.4 0.45 Supply pressure (MPa) 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 0.4 0.45 Supply pressure (MPa) 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 0.4 0.45 Supply

CQS

Rubber bumper is standard equipment for long stroke type. 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 Action 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 D Double acting 25 For "Manufacture of Intermediate Strokes", refer to page 7-4-5. Applicable Auto Switch/Refer to page 7-9-1 for further information on auto switches.

Low Profile Guide Type

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit. For a stroke in the standard stroke range, suffix the part number with -XB10.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit. For a stroke in the standard stroke range, suffix the part number with -XB10.

CQS

Cylinder stroke (mm) Long stroke (mm) 35, 40, 45, 50, 75, 100 Bore size (mm) Standard stroke (mm) 5, 10, 15, 20, 25, 30 Action D Double acting 12, 16 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switch.

CY1F

Standard Stroke Maximum stroke available (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.