Table of Contents

Dimensions . 46 47 48 50 52 52 53 54 54 55 55 56 57 58 60 60 60 61 62 63 65 65 65 66 66 67 67 68 69 69 70 70 71 72 73 75 75 75 77 77 78 78 78 79 80 82 84 84 84 85 86 87 87 88 89 90 Series AS * 2 * 0-D Speed Controller Adjustable by Flat Head Screwdriver: Standard Type Elbow Type \(Metal Body\) . Specifications. How to Order . Construction. Dimensions .

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Double acting single rod only 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30 12, 16 5, 10, 15, 20, 25, 30 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches Mounting Bracket Part No.

Power Clamp Cylinder

75 15 65 70 108 68 76 15 8 50 50 90 96.5 12 3.5 113.7 197.3 192.8 148.3 199 Series CKZT Dimensions (Clamp Arm: Offset 15) 40 How to Order Right type CKZT40 A015 C S 31 23 33 54 Arm position 0 16-0.1 C R L Center Right Left Center type Left type 2 x 6H7 through (7) 200.2 Weight kg (lbs) 2 x 7 through CKZT40-A015CS CKZT40-A015RS CKZT40-A015LS 0.49 (1.08) 0.51 (1.12) 0.51 (1.12) 200.02 900.1

15

30 1 CY1S20-Z M10 x 1 RJ1007LN 40 70 90 90 4.5 9 73 16.5 87 18.5 37 106 M6 x 1 Rc1/8 NPT1/8 G1/8 38 1.5 CY1S25-Z M14 x 1.5 RJ1412LN 73 M6 x 1 Rc1/8 NPT1/8 G1/8 40 70 99 90 4.5 9 16.5 96 18.5 37 106 42 1.5 CY1S32-Z M20 x 1.5 RJ2015HN 91 M8 x 1.25 Rc1/8 NPT1/8 G1/8 40 75 119 110 5.5 11 18.5 116 18.5 37 128 50 3 CY1S40-Z M20 x 1.5 RJ2015LN M8 x 1.25 Rc1/4 NPT1/4 G1/4 65 105 142 120 4.5 9 99

HRL

75 71 Accessories Operation Manual (for installation/operation) 2 pcs.

SYJ3000/5000/7000

Connector Socket Lead wire Hook 1-5-75 76 Series SYJ3000/5000/7000 Specific Product Precautions 3 Be sure to read before handling.

IR1000/2000/3000

55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 100 0 20 40 60 80 100 120 57.0 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV3000 IRV3000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 57.0 100 95 90 85 80 75 70 65 60 100 0 20 40 60 80 100 120 140 160 VAC side pressure (kPa) Flow rate

Compact

CQ-M3 x 70 L 40 75 CQ-M3 x 75 L 45 80 CQ-M3 x 80 L 50 85 CQ-M3 x 85 L 20 5.5 D C 5 45 CQ-M3 x 45 L 10 50 CQ-M3 x 50 L 15 55 CQ-M3 x 55 L 20 60 CQ-M3 x 60 L 25 65 CQ-M3 x 65 L 30 70 CQ-M3 x 70 L 35 75 CQ-M3 x 75 L 40 80 CQ-M3 x 80 L 45 85 CQ-M3 x 85 L 50 90 CQ-M3 x 90 L 25 8 6 MXZ Series Dimensions: MXZ12 MXZ12Standard (Pilot port location: Front) 4 x 6 4 x M3 x 0.5 depth 5 17 14 14 2 x 3.4

ZX

Operation stop 13-2-70 70 Series ZX Made to Order Specifications: Please consult with SMC for detailed specifications, size and delivery. ZX ZR Combination Symbol: J3 Combination Symbol: D2 ZM An N.C. solenoid valve is used as the supply valve. A vacuum release valve is not used. An N.C. solenoid valve is used as the vacuum release valve. A supply valve is not used.

CG5-S

, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting Basic type Axial foot type Front flange type Double clevis type B L F D CJ5 L 16 S R 60 Without Auto Switch CDJ5 L 16 S R 60 H7BAL With Auto Switch With auto switch (built-in magnet) Number of auto switches 2 pcs. 1 pc.

Sine Rodless Cylinder Series REBR Direct Mount Type

100 300 500600 70 100 300 500600 Maximum speed U (mm/s) Maximum speed U (mm/s) 72 Sine Rodless Cylinder High Precision Guide Type Series REBH Moment generated by the self weight of the load even when the cylinder is stopped Static moment Pitch moment M1 = WL Yaw moment M3 = W(LA) Roll moment M2 = WL (mm) Model REBH15 REBH25 REBHT25 REBHT32 A 17.5 23.5 0 L L A L 0

A

-06 3/4 75 172.5 20 70 14 50 54 25 8.5 10.5 70 2.3 73 198 Float type Courtesy of Steven Engineering, Inc. !

CJ5-S

ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-14-3 4 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10 mm 16 mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes by the 1 mm interval are available without using spacers for stroke adjustment.

CJ5-S

ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-14-3 4 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10 mm 16 mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes by the 1 mm interval are available without using spacers for stroke adjustment.

ITV

1.0 0 2 6 4 8 1.0 100 0 25 50 75 10 Input signal (%F.S.)

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

0.017 15 0 0.043 0 0.052 75 14.9 28 27 25 30 30 20 M8 x 1.25 depth 12 1/4 R8 95 90 3 13 16 5 70 48 94 63 7.5 9 110 23.5 53.5 19 15 0 0.043 0 0.052 88 0.006 0.017 17 16.9 30 29 30 32 35.5 24 M10 x 1.5 depth 13 0.007 0.020 25 1/4 R11 0 0.052 0 0.062 125 103 4 19 22 5 80 60 120 78 7.5 11 140 30 65 28 11.5 108 24.9 45 38 38 For single vane: Above illustrations show actuators for 180 when

Compact Manifold Regulator

75 76 77 82 83 84 SRP SRF ITV IC ITVH ITVX 4.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

78 8/Rc 10/Rc 5 8 13 12 20 23 24 34 46 40 70 78 55 75 95 65 110 150 85 135 185 SUP VAC EXH 28 28 33 66 11 12 16 27 43 55 95 ZH ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 1 8 1 8 Box type (Built-in silencer) 0.7 1.0 1.3 0.5 0.7 88 48 1 4 1 8 ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

MGQ

, 40, 50, 75, 100, 125, 150, 175, 200 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 26 64 17 10 19 52 74 2 8.5 4 46 36 72 8 30 10 60 37 13 18 47 8 M5 x 0.8 13 M5 x 0.8 7 M5 x 0.8 Rc 1/8 10.5 32 76 21 10 21 62 88 2 9 2 56 42 86 8 38 12 70 37.5 14 26 47.5 9 M6 x 1.0 15 M6 x 1.0 8 M6 x 1.0 Rc 1/8 11.5 MGQM (Slide bearing) A, DB, E Dimensions MGQL (Ball bushing bearing) A, DB, E Dimensions E E

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

0.017 15 0 0.043 0 0.052 75 14.9 28 27 25 30 30 20 M8 x 1.25 depth 12 1/4 R8 95 90 3 13 16 5 70 48 94 63 7.5 9 110 23.5 53.5 19 15 0 0.043 0 0.052 88 0.006 0.017 17 16.9 30 29 30 32 35.5 24 M10 x 1.5 depth 13 0.007 0.020 25 1/4 R11 0 0.052 0 0.062 125 103 4 19 22 5 80 60 120 78 7.5 11 140 30 65 28 11.5 108 24.9 45 38 38 For single vane: Above illustrations show actuators for 180 when