Compact Cylinder with Lock Series CLQ

Note Holding force N (Maximum static load) Equivalent to 0.5MPa Switch mounting screw (M3 x 0.5 x 10l) 32, 40 50, 63 80, 100 BQ-2 Standard Strokes Switch spacer Switch mounting nut Standard stroke (m) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Bore size (mm) 20, 25 32, 40, 50, 63, 80, 100 Applicable switch Reed switch Solid state switch D-F7/J79 D-F7V

Slider Type Ball Screw Drive/11-LEFS Series

to 500 50 to 600 50 to 800 150 to 1000 LECP6/LECP1/LECPMJ 14 15 25 30 45 50 55 65 Horizontal Note 2) Work load [kg] LECPA 9 10 20 20 40 45 50 60 Vertical 2 4 7.5 15 10 20 2 23 Speed [mm/s] Note 2) 10 to 500 5 to 250 12 to 500 6 to 250 16 to 500 8 to 250 20 to 500 10 to 250 Max. acceleration/deceleration [mm/s2] 3000 Actuator specifications Positioning repeatability [mm] Basic type 0.02 High

Vacuum System Peripherals:

5 45 45 45 M5 x 0.8 ZX 1 8 1 4 , , , , 1 4 3 8 1 4 3 8 1 2 ZR 3 4 3 4 , 1 1 ZM Inlet pressure 0.7 MPa, Pressure drop 0.05 MPa ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Modular, Regulator Series AR Flow rate (l/min (ANR)) Set pressure (MPa) Pressure

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Mounting same side MGC D-C7 D-C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 50+45(n2) 50 15 10 15+45( n2 ) (n=2, 4, 6) MGF 2 60+45(n2) 60 15 10 CY1 15+50( n2 ) (n=2, 4, 6) MY1 2 65 15 10 65+50(n2) 20+50( n2 ) (n=2, 4, 6) 2 65 20 D-H7LF 10 15+50( n2 ) (n=2, 4, 6) 2 D-B5/B6 D-G5NTL 10 75 15 75+55(n2) 20+50( n2 ) (n=2, 4, 6) 2 15 75 20 D-B59W D-A3A D-G39A D-K39A D-A44A 10 100+100(n2) 35+30

Series PF2W Digital Flow Switch For Water

) and ethylene glycol (50%) 1.7 to 17.0 L/min 1.7 to 17.0 L/min 2 to 16 L/min 0.1 L/min 0.1 L/pulse 0 to 90C (with no cavitation) 5% F.S. 3% F.S. 5% F.S. (0 to 90C, 25C reference) 70 mA or less 710 g 3/8, 1/2 Karman vortex 3-digit, 7-segment LED L/min, gal(US)/min L, gal(US) 0 to 1 MPa 1.5 MPa 0 to 9 L 3.5 to 45 L/min 3.5 to 45 L/min 5 to 40 L/min 0.5 L/min 0.5 L/pulse 0.35 to 4.5 L/min 0.35

SMC Pneumatic Clean Series

117 29 1/8 44 111 27 1/8 38 104 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 5.5, 9.5 counterbore depth 6 6.6, 11 counterbore depth 7 9, 14 counterbore depth 9 11, 17.5 counterbore depth 12 18 18 58 64.5 19 17 155 12 12 27 20 45 11 2 7 114 108 62 39 33 12 12 63 Up to 300 35 32 32 27 20 11 45 2 7 72 76.6 50 Up to 300 35 32 30 M18 x 1.5 M18 x 1.5 44 1/4 46 41 50 1/4 64 161

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 220 VAC 50/60 Hz [230 VAC 50/60 Hz] With surge voltage suppressor (Non-polar type) T With light/surge voltage suppressor (Non-polar type) With surge voltage suppressor (Non-polar type) Power saving circuit is not available for W type.

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ZPRI6Il is_ f8 .16 25 33. 50 5 I 6 '7 , ZPRlOO 1 0 1 2 15 24 32.9 49 5 6 6 51 , 50 51 51 50 48 ZPR25 I 48 51 50 48 Appl/cable tube (mm) .P Applicable tube 0 .0 Q ' R .s ,.4 4 20.6 15.6 16.6 ZPR32 ZPR40 56 54 56 54 57 55 56 54 lOA 12.8 ,.6 6 .21.6 ZI!

Micro Mechanical Valve Series VM1000

Recessed portion (Bad) (Good) VR Fastening ring Above 45 Abrupt angle Below 45 Below 45 VR51 VHK 2. Push button (Mushroom and extended types) At the time of shipment, only 1 button of the color that you specified is attached to the body.

KJ

(inch) Connection thread UNF NPT H (Width across flats) 8.4 9.6 <10-32 UNF> <10-32 UNF> Min. port size D1 Note) D2 L1 M A Weight (g) Model L2 L3 Applicable tubing L1 M 5 18 6 18 19 16 19 37 30 38 67 60 70 85 104 10 14 11 15.5 14 11.5 14 17.5 17 20 20.5 17.5 19.5 21 24 12.7 15.5 2.3 2.5 2.5 2.8 3.5 2.3 20 29.5 20 29.5 29.5 27 29.5 38.5 31 38.5 45 41 45 42 50 16.5 25.5 16 25.5 25.5 23.5 25.5

Fluoropolymer Piping Equipment

LQ1B62-M 19 15 LQ1B63-M 25 1" 35 22.5 21.2 8 39.5 18 36 36 69.5 45 49 LQ1B64-M 19 15 LQ1B66-M 25 1/2" 37 10 10 Note) Products marked are produced upon receipt of order.

Compact Cylinder

Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 5, 10, 15, 20, 25, 30 20, 25, 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 50, 63, 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50 Intermediate strokes are available as a special order.

CLA

ZZ StrO ke ~ 131 71 339 65 12.5 80 ~ 148 72 358 65 14.0 81 367 P PG PH PL PW S W X V oLD LH LS LT LX LV r 40 7/16 20 27 50 30 63 % 16 31 80 37 81 51 244 43 11.2 59 F 90 58 266 52 11.2 66 ~ 'f, 106 58 290 52 11 .2 66 'I, 42 11 20 45 153 8 27 13 9 40 207 3.2 42 70 'I, 46 10 21 50 168 0 27 13 9 45 222 3.2 50 80 'I, 48.5 13 23 60 182 0 34 16 11.5 50 250 3.2 59 93 \I, 55 15 23 70 208 0 44 16

HRX-OM-W002

Note1) Applicable model HRR012/018-A/W-10-T/MT HRR012/018/024/030-A/W-20-T HRR012/018/024/030-A/W-20-MT Rated flow50/60Hz Note23 L/min 7(0.36MPa)/10(0.42MPa) 10(0.42MPa)/14(0.40MPa) 10(0.32MPa/)/14(0.32MPa) Maximum pumphead 50/60Hz m 50 50 50 Pump Output W 320 550 Circuit protector A 15 15A10A for standard Recommended earth leakage breaker capacity A 15 Cooling capacity Note 4 W The cooling

Air-hydro Unit

86 45 83 60 1/2 223 1/2 92 139 116 123 61 121.8 156.5 98 35 18 35 109 65 86 45 88 65 1/2 259 3/4 92 139 116 123 61 133.8 185.5 134 40 24 50 140 65 116 66 112 85 3/4 319.5 3/4 144 202.5 180 183 60 133.8 181.5 134 40 24 50 136 93 116 66 108 81 L Dimension (mm) T Model NB Effective oil level stroke W QL S QB NL P 50 100 200 300 400 600 700 800 500 CC63-S1-G CC100-S1-G CC100-L1-G CC160-L1-G

Stability of suction position,

Mounting thread size ZP3E ZP3E 32 to 50 ZP3E-(T/Y)(32 to 50)(UM/BM)**JB M18 x 1.5 28 to 32 ZP3E-(T/Y)F(32 to 50)(UM/BM)**JB ZP2 63 to 125 ZP3E-(T/Y)(63 to 125)(UM/BM)**JB M22 x 1.5 45 to 50 ZP3E-(T/Y)F(63 to 125)(UM/BM)**JB ZP2V ZP P Time of Replacement of Vacuum Pad ZPT ZPR The vacuum pad is disposable. Replace it on a regular basis.

HRX-OM-X071

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]

LEC-OM02704CN

20 50 20 9 15 9 (2) (a) PB06 GD2 4.0 PB07 PG1 100 rad/s PB08 PG2 120 rad/s PB09 VG2 3000 rad/s PB10 VIC 20 ms PB29 GD2B 10.0 PB30 PG2B 84 rad/s PB31 VG2B 4000 rad/s PB32 VICB 50 ms PB26 CDP 0003 () PB27 CDS 50 pulse PB28 CDT 100 ms (b) CDS [pulse] 0 pulse CDS CDT100ms 100 4.0 10.0 4.0 10.0 120 84 120 84 3000 4000 3000 4000 20 50 20 50 9 16 10 10 .2 10.1

Rotary Actuator/Vane Type

(Rotation range of single flat (key) when mounting 2 stopper blocks on the other sides groove is the opposite side from and the setting range is within either right 50 or 60 against port A and B.) Four chamfers for wrench Long groove Stopper block Section A-A (Double vane) Section A-A (Single vane) 60 50 Note) For size 40, each stopper block comes with 2 holding screws.

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Bore size (mm) 20 32 40 50 63 80 100 Standard strokes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Made to Order 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Page 34 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 JIS symbol 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30