Modular Design with Uniform Body Style

40 55 9 18 7 50 65 AC40A-06-D 3/4 1/8 155.2 149.1 93 38.4 77.6 110 35.5 50 40 55 9 18 7 50 65 AC50A-D 3/4, 1 1/8 191.2 234.1 155 98.1 110 45 70 50 70 11 20 8 60 80 AC60A-D 1 1/8 196.2 234.1 155 98.1 110 45 70 50 70 11 20 8 60 80 Model Optional specifications Semi-standard specifications PC/PA bowl Metal bowl Metal bowl with level gauge Square embedded type pressure gauge Round type

Series AK1000

0.34 0.62 45 0.31 80 0.55 40 0.28 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 35 0.24 70 0.48 30 0.21 60 25 0.17 0.41 20 0.14 50 0.34 15 0.10 10 0.07 40 0.28 0 5 0.00 0.03 30 0.21 0 100 200 300 400 500 600 700 800 900 1000 Flow rate (slpm, N2) 0 50 100 150 200 250 300 350 400 450 500 550 600 650 700 Flow rate (slpm, N2) AK1200HF 150 psig

0.5

distance [mm] wStatic Neutralization Range IZF10 IZF10-L 300 mm 300 mm 8 s 8 s 4 s 4 s 0 0 2 s 6 s 2 s 6 s 300 mm 300 mm 600 300 900 1200 600 300 900 1200 Installation distance [mm] Installation distance [mm] IZF10R (Air flow level: 4) IZF10R (Air flow level: 1) 300 mm 300 mm 6 s 2 s 8 s 6 s 4 s 2 s 8 s 0 0 4 s 300 mm 300 mm 600 300 900 1200 600 300 900 1200 Installation distance [mm] Installation

AC

Model Port size A B C D M N P R B B E F G H J K L M5 X 0.8 58 90 117 154 164 109.5 164.5 207.5 259 263 25 40 53 70 70 26 56.8 60.8 70.5 70.5 25 30 41 50 50 50.5 78 92.5 112 114 29 45 58.5 77 82 20 24 35 40 40 4.5 5.5 7 9 9 7.5 8.5 11 13 13 38.5 50 70.5 88 88 50 80 80 105 105 17.5 22 34.2 42.2 46.2 16 23 26 33 36 5 5 7 7 7 130 187.5 AC1010 AC2010 AC3010 AC4010 AC4010-06 1/8, 1/4 248.5 300

energy saving effect

HECR 50 0.43 0.45 Outlet Pump head [m] Pump head [m] Outlet 0.4 0.4 40 40 HEC 0.3 30 0.3 30 HEB 0.2 20 0.2 20 HED Return port 0.1 10 0.1 10 Return port 0 0 0 0 HEA 45 40 50 0 10 20 30 60 70 80 90 100 110 120 Circulating fluid flow rate [L/min] 45 0 20 10 40 30 50 60 70 80 90 100 110 120 130 Circulating fluid flow rate [L/min] IDH HRSH250/300-A-20/4090 0.9 Usable flow rate range Circulating

Air Cylinder Series MB

Order Made 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 Symbol Specifications/Descriptions 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 XA 100 Change of rod end shape 1500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450,

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

/60Hz 5 6 V S R 1 2 Series Without light/surge voltage suppressor Nil SY3000 SY5000 3 5 With surge voltage suppressor S With light/surge voltage suppressor Z A, B port size A, B port size 200VAC 50/60Hz 110VAC 50/60Hz [115VAC 50/60Hz] With surge voltage suppressor (non-polar type) Applicable series Applicable series Port size Port size Symbol Symbol R 3 02 C8 C10 Rc(PT) 1/4 8 One-touch fitting

JA/JAH/JB/JS

40 50, 63 80 100 125, 140 160 12 16 20 25 40 63 80 100 140 160 3-050 4-070 5-080 6-100 8-125 10-150 16-200 20-250 22-250 24-300 Precautions 2.

JA/JAH/JB/JS

Refer to pages 10-24-3 to 10-24-6 for Safety Instructions and Actuator Precautions. 40 M12 x 1.5 4400 4400 4400 0.75 30, 40 M12 x 1.75 4400 4400 4400 0.75 5 50 M16 x 1.5 11000 11000 9000 1 50, 63 M16 x 2 11000 11000 9000 1 Mounting 80 M20 x 2.5 18000 18000 14000 1.25 Warning JA100-24-300 JA100-27-150 JA125-27-200 JAl160-33-200 100 M24 x 3 28000 28000 22000 2 1.

Solid State Auto Switches

40 40 45 50 45 63 45 80 45 100 Mountable models 50 Note) The operating range above indicates average values at room temperature including hysteresis (assuming approximately 30% dispersion).

ZP

50 50 B 42 42 42 52 52 52 C 63 98 134 63 98 134 D 118.5 ZPT40H 25-A18 ZPT40H 50-A18 ZPT40H 75-A18 ZPT50H 25-A18 ZPT50H 50-A18 ZPT50H 75-A18 ZPT63H 25-A18 ZPT63H 50-A18 ZPT63H 75-A18 ZPT80H 25-A18 ZPT80H 50-A18 ZPT80H 75-A18 ZPT100H 25-A22 ZPT100H 50-A22 ZPT100H 75-A22 ZPT100H 100-A22 ZPT125H 25-A22 ZPT125H 50-A22 ZPT125H 75-A22 ZPT125H 100-A22 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

22 8.6 14 9 1/4 14 55 50 130 70 158 124 142 63 M10 x 1.5 M10 x 1.5 WA WB Bore size (mm) VB X XA XB XC XL YY YL Z st25 25300300300 34 84 122 172 50 4 3 6 16 22 46 40 M8 x 1.25 6 92 24 48 124 200 300 36 86 124 174 66 5 4 8 20 24 48 50 M10 x 1.5 28 52 128 200 300 38 50 88 124 174 110 80 5 6 4 8 20

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

40 80 50 50 20 20 Load mass m (kg) Load mass m (kg) Load mass m (kg) 20 10 10 10 63 63 63 5 5 5 50 50 50 [Example ] 40 40 40 1 1 1 70 100 300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

Cylinder with Lock Series CLS

m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31

Cylinder with Lock Series CNS

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7

Vacuum Unit

100 100 100 Vacuum pressure [kPa] 80 90 90 60 80 80 40 Suction flow (High-noise reduction silencer exhaust) Vacuum pressure 70 70 Port exhaust 20 Silencer exhaust/Complex exhaust Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 Suction flow (Port exhaust) 60 60 Suction flow [L/min (ANR)] 50 50 Flow Rate Characteristics Suction flow (Silencer exhaust/ Complex exhaust) Suction flow (Silencer exhaust

CNS

: m (kg) 700 800 900 700 800 900 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-8-7 8 Cylinder with Lock Double Acting, Single Rod Series CNS 125, 140, 160 How to Order 125 125 100 100 Y7BW CDNS D CNS D L Without auto switch L With auto switch Number of auto switches Built-in magnet Port

Stroke Reading Cylinder and Counter

75 100 125 150 175 200 300 500 25 50 75 100 250 400 12 20 32 40 50 63 12 equivalent 25 to 150 1 to 150 20 equivalent 25 to 300 1 to 300 Strokes other than standard strokes are available upon request.

Table of Contents

AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12 1 Large Flow Air Filter Series AF800/900 Standard Specifications F.R.L.

CQS

CQ2 Mounting Bolt for CDQSK MU Mounting bolt Mounting bolt C' D' 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 Model C D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 Special long bolt for through hole mounting is available as an option. How to Order: Specify the required bolts.