20.0

Normal Bottom Peak BATTERY 1.5V x 2 LR6 G kV MADE IN JAPAN IZD IZE POWER LIGHT 110 Do not apply a strong impact on the sensing part.

Compact Cylinder

119 128 138 32 122 135 149 162 176 189 203 216 230 243 32 94 108 121 135 148 162 175 189 202 215 40 184 201 217 233 250 266 282 299 315 331 40 145 161 177 194 210 226 243 259 275 292 50 332 357 383 408 433 458 483 508 533 50 284 309 334 359 384 410 435 460 485 63 513 544 575 606 637 667 698 729 760 63 452 483 514 545 576 606 637 668 699 80 961 1010 1059 1109 1158 1207 1256 1305 1354

Return Filter FH100 Series

100 45 265 380 4.3 1 1/2 144 150 128 52 299 430 6.8 2 2 1/2 175 200 157 70 387 540 17.5 3 520

Slider Type Ball Screw Drive/11-LEFS Series

9.29 9.57 9.85 10.13 Additional weight with lock [kg] 0.53 517 11-LEFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication Dimensions: Ball Screw Drive 11-LEFS16 (72) ( ) +0.025 0 3H9 depth 3 40 Body mounting Note 1) reference plane 4 x M4 x 0.7 thread depth 6.4 24 28 3.5 39.4 ( ) +0.025 0 3H9 depth 3 L Cable length 250 (37) A (Table traveling distance) Note 2) (110

Series AK1000

Gas Select compatible materials of construction for the gas Operating pressure Vacuum to 125 psig (0.9 MPa) Proof pressure 200 psig (1.4 MPa) Ambient and operating temperature 14 to 160F (10 to 71C) (No freezing) Cv 0.29 0.5 Leak rate 1 x 1010 Pam3/sec Connections Compression, Rc, R, NPT Actuation pressure 60 to 110 psig (0.4 to 0.76 MPa) Actuation port connection M5 x 0.8 Actuation port

, 200, 220VAC , Response time (0.5MPa) w/o indicator light & surge voltage suppressor: 32ms or less , Ambient & fluid temperature: 50°C, Valve, 5 Port Solenoid, 4/5 PORT SOLENOID VALVE, 175 lb

AN

Model (Screw-in connection) Model Port size Effective area (mm2) Weight (g) ANA1-01 10 4 37 16 A B C Dimensions (mm) 1 8 ANA1-02 15 14 64 22 18 1 4 ANA1-03 35 3 8 22 84 25 21 36 98 30 24 110 111 46 36 180 132 50 41 544 200 74 60 612 230 74 60 873 271 86 70 ANA1-04 60 1 2 ANA1-06 90 3 4 JIS symbol ANA1-10 160 1 1 1 ANA1-12 280 1 4 ANA1-14 450 1 2 ANA1-20 610 2 Construction/Parts/Dimensions

MRQ

Stroke F(N) F(N) 9 15 105 110 115 14 120 125 130 8 13 140 150 175 7 12 5 200 11 Number of auto switches mounted Rotation Linear motion 2 0 0 1 0S 02 S0 S2 SS 1 20 n0 2 2S nS n2 n Combinations of made to order products No.1 to 4 are available. Consult SMC for further information. 1.5-19

Multistage Ejector (N)ZL Series

150 50 50 75 40 40 100 50 30 30 20 20 50 25 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 1.0 2.0 3.0 4.0 5.0 6.0 Supply pressure [MPa] Supply pressure [MPa] Flow rate Characteristics Flow rate characteristics Supply pressure: 0.4MPa Supply pressure: 0.4MPa 100 90 100 90 Vacuum pressure [kPa] Vacuum pressure [kPa] 80 80 70 70 60 60 50 50 40 40 30 30 20 20 10 10 0 0 10 20 30 40 50 60 70 80 90 100 110

Process Pump Series PA3000/5000/PAX1000 Series PB1000

) AIR SUP (pilot air supply port) 1/4 FLUID IN 1/4, 3/8 FLUID OUT 1/4, 3/8 PROCESS PUMP AIR SUP 110 45 29 FLUID IN FLUID OUT AIR EXH 33 AIR EXH (pilot air exhaust port) 1/4 75 5 120 32.5 45.5 Bottom 15 Series PB1000 Process Pump Built-in Solenoid Valve Type/Air operated Type (External Switching Type) How to Order 1 0 1 01 PB 1 Body size Option/Part no. 1 1/8 standard Nil Pump only With foot

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Circuit example (1) 3 port solenoid valve Process pump PAX112 Regulator Ball valve Air filter FLUID OUT AIR SUP FLUID IN Air supply AIR EXH Strainer Silencer Throttle Transfer fluid 14 Series PAX1000 Dimensions 4-M8 (M6 hexagon socket head screw can be inserted) 10.5 105 7.5 Mounting hole detail 69 Reset button 100 125 23 RESET (175) AIR SUP (pilot air supply port) Rc 1/4 FLUID IN Rc 1/4

, 200, 220VAC , Response time (0.5MPa) w/o indicator light & surge voltage suppressor: 32ms or less , Ambient & fluid temperature: 50°C, 5 port solenoid valve, 4/5 PORT SOLENOID VALVE, VVD, 175 lb

, 200, 220VAC , Response time (0.5MPa) w/o indicator light & surge voltage suppressor: 32ms or less , Ambient & fluid temperature: 50°C, 5 port solenoid valve, 4/5 PORT SOLENOID VALVE, VVD, 175 lb

, 200, 220VAC , Response time (0.5MPa) w/o indicator light & surge voltage suppressor: 32ms or less , Ambient & fluid temperature: 50°C, 5 port solenoid valve, 4/5 PORT SOLENOID VALVE, VVD, 175 lb

, 200, 220VAC , Response time (0.5MPa) w/o indicator light & surge voltage suppressor: 32ms or less , Ambient & fluid temperature: 50°C, Valve, 5 Port Solenoid, 4/5 PORT SOLENOID VALVE, VVD, 175 lb

, 200, 220VAC , Response time (0.5MPa) w/o indicator light & surge voltage suppressor: 32ms or less , Ambient & fluid temperature: 50°C, 5 port solenoid valve, 4/5 PORT SOLENOID VALVE, VVD, 175 lb

, 200, 220VAC , Response time (0.5MPa) w/o indicator light & surge voltage suppressor: 32ms or less , Ambient & fluid temperature: 50°C, 5 port solenoid valve, 4/5 PORT SOLENOID VALVE, VVD, 175 lb

, 200, 220VAC , Response time (0.5MPa) w/o indicator light & surge voltage suppressor: 32ms or less , Ambient & fluid temperature: 50°C, 5 port solenoid valve, 4/5 PORT SOLENOID VALVE, VVD, 175 lb

, 200, 220VAC , Response time (0.5MPa) w/o indicator light & surge voltage suppressor: 32ms or less , Ambient & fluid temperature: 50°C, 5 port solenoid valve, 4/5 PORT SOLENOID VALVE, 175 lb

, 200, 220VAC , Response time (0.5MPa) w/o indicator light & surge voltage suppressor: 32ms or less , Ambient & fluid temperature: 50°C, 5 port solenoid valve, 4/5 PORT SOLENOID VALVE, VVD, 175 lb