ISO Standard Hydraulic Cylinder

120 74 13 36 30 32 36 32 80 M10 x 1.25 25 to 800 10.5 M33 x 2 57 32 60 13 42 17 1/2 74 75 96 133 73 100 150 80 45 41 17 41 45 -0.025 -0.064 40 100 M14 x 1.5 25 to 1000 14.5 M42 x 2 58 42 72 38 22 3/4 86 16 115 90 146 79 120 184 50 97 19 56 56 52 Bore size (mm) ZZ V Z 40 6.5 161.5 132 50 8 176 139 63 12 198 153 80 15 223.5 168 100 15 257.5 187 338 CHSD Series ISO Standard Hydraulic Cylinder

High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

Air Cylinder

25 25, 50, 75, 100, 125, 150 32 25, 50, 75, 100, 125, 150, 200 40 25, 50, 75, 100, 125, 150, 200, 250 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

51

Caution Standard stroke (mm) Note) Bore size (mm) 20 25 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 Note) Manufacture of intermediate strokes in 1 mm increments is possible. (Spacers are not used.)

MY2

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

VFS

Besides, as lubricant for compressors, Faircoal A-80 (Nippon Mitsubishi Oil Corp.), Dafney CS55, CS49 (Idemitsu Kosan Co., Ltd), etc. are commercially available on the market. 2. When the foreign matters from air source adhere to the spool and sleeve, disassemble the adapter plate section and end plate section (return spring insert section).

Title not found

Assuming 80 PSI and P = 80%.

Title not found

Assuming 80 PSI and P = 80%.

Basic Type/Direct Mount Type

, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 40 3000 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke type (XB11) applies to the strokes exceeding 2000 mm.

VQZ1000/2000/3000

1 5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ1000/2000/3000 Compact design with large flow capacity VQC SQ Model Flow characteristics Cylinder size VQ0 Manifold pitch (mm) Metal seal C [dm3/(sbar)] Rubber seal C [dm3/(sbar)] Up to 50 Up to 80 Up to 100 VQ4 VQZ1000 10 15 18 0.54 1.4 2.4 0.71 1.6 3.2 VQZ2000 VQ5 VQZ3000 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

MY1

MY1CW MY1MW 200 200 (kg) (kg) 190 190 (2100) (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) 130 130 L (1800) (1800) (1800) (1800) 120 120 Mass (m) Mass (m) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) 90 90 m L (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 MY1MW50 MY1MW50 80 80 m (1600) (1600) (1600) (1600) 70 70 MY1CW50 MY1CW50 MY1MW40

Lightweight and Compact

HRS HRS 090 HRS 090 HRS 100/150 HRSH 090 HRSH HRSE HRZ HRZD HRW Lots of variations are available in response to the users requirements.

25

back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 0.5 s 100 100 0.5 s 150 150 1 s 200 200 2 s 1 s 250 250 5 s 2 s 5 s 300 300 3) With energy saving type de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation distance in height

MXW

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size (Stroke (mm)) 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Auto switch Nil Without

Adsorption Plate

Adsorption surface size SP2130 SP2230 SP2330 SP2430 SP2530 SP2630 50 x 50 40 10 100 x 100 80 10 P1 150 x 150 105 10 P1 200 x 200 130 10 250 x 250 155 10 P2 P2 300 x 300 180 10 Special Order Products Products with a stainless steel body or in other shapes can be manufactured. Consult SMC separately.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

20 40 60 80 Load N 20 40 60 80 Load N 20 40 60 100 Load N 12 12 12 L = 100mm L = 100mm L = 100mm MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.05 0.04 0.08 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 Table displacement mm Table displacement mm Table displacement mm 0.04 0.03 0.06 0.03 0.04 0.02 0.02 0.01 0.02 0.01 0 50 100 150 Load N 0 50 100 150 Load N 0 50 100 150 Load

MGC

, 200 44 25 106 22 M6 110 55 9 6.6 90 75 120 105 13 11 84 25 38 80 60 MGP 52 30 120 27 M8 125 65 9 9 100 84 136 120 13 15 89 32 46 95 70 75, 100 125, 150 200, 250 300 60 35 135 32 M8 140 75 9 9 108 92 150 134 13 15 94 32 50 105 80 MGQ 70 40 160 37 M8 165 85 12 9 125 110 176 160 16 18 107 38 60 125 95 45 194 42 M10 200 95 12 11 135 115 210 190 82.5 19 23 142 50 75 150 115 MGG Bore (mm) Z Y

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

M2 M3 m1 m2 m3 16 25 40 16 25 40 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 100 120 100 38 35 35 MY2HT 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load. Refer to each graph regarding the maximum allowable moment and maximum allowable load for a particular piston speed.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

MX MTS 0 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150 160 170 180 190 MY With stroke adjuster for auto switches Stroke adjuster CY 10 Three types (rubber stopper, metal stopper, shock absorber) are available.

Turntable Cylinder Series MGT

than 100st 25st 50, 75, 100st Larger than 100st 25st 117 128 168 55 74 89 54 56 71 100 125 150 24 24 35 188 225 272 70 80 100 14 14.5 17.5 Rc1/4 Rc3/8 Rc3/8 9 8 8 14 17.5 20 124 156 188 148 198 236 39 41 51 52 52 72 50 54 47 38 42 35 128 128 148 28 28 48 110 140 166 142 180 210 28 25.5 32.5 63 80 100 88 92 85 (mm) Bore size (mm) X XA XB XC XL YY YL Z 24 28 11 8 10 10 6 7 7 5 6 6 80 100 124