VQC

SUP port EHX I/O Cylinder port 2, 4 (A, B) 1, 3 (P, R) Serial unit: EX240 25-pin 26-pin 20-pin Conforms to IP67 Conforms to IP67 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) C8 (for 8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) N3 (5/32") N7 (1/4") N9 (5/16") N11 (3/8") C8 (for 8) C10 (for 10) C12 (for 12) ^{Rc 1/2 N7 (1/4") N9 (5}

V

0 Single 36.0 (2.0) 20 or less 22 or less 2 P o s i t i o n s 3 P o s i t i o n s Rubber Seal VQ41(0, 5)0 39.6 (2.2) 25 or less 27 or less Double Metal Seal VQ42(0, 5)0 36.0 (2.0) 12 or less 12 or less Rubber Seal VQ42(0, 5)0 39.6 (2.2) 15 or less 15 or less Closed Metal Seal VQ43(0, 5)0 32.4 (1.8) 45 or less 47 or less Center Rubber Seal VQ43(0, 5)0 36.0 (2.0) 50 or less 52 or less Exhaust

VQZ1000/2000/3000

3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

CJ2X/CUX/CQSX/CQ2X/CM2X

, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion

CJ2X/CUX/CQSX/CQ2X/CM2X

, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion

MY1

(Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) With low load shock absorber + Adjusting bolts MY1W Bore size Stroke L TT h h E F EA h EB W F Stroke adjusting unit S (Shock absorber stroke) T MY1W16, 20 F MY1W50, 63 Shock absorber EC EY h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) S 40.8

Cylinder with Lock

5!6 !0!1 !7 @1@0 @2 @6 @3 @5@8 @4@9 #5 #7 #9 #8#6#4 #0#1 $1 $0 t !9 #3 #2 @7 Component Parts Component Parts No. Description Material Qty.

IDG

to 55(3) (3) 5 to 50 Ambient temperature (C) 5 to 50 5 to 55 5 to 50 5 to 50 Outlet air atmospheric pressure dew point (C) Standard performance 15 Inlet air flow rate (l/min (ANR)) (4) 56 111 222 335 560 830 1110 665 28 Outlet air flow rate (l/min (ANR)) Purge air flow rate (l/min (ANR)) (5) 50 100 200 300 500 600 750 1000 25 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

MNB

20 111.2 22.4 M8 x 1.25 5 183 47 1/4 58 63 31.5 8.5 7 9 259 M18 x 1.5 12 23 55 123.5 20.7 M8 x 1.25 5 197 55.5 3/8 58 80 38 10.5 10 11.5 321 M22 x 1.5 14 33 61 157 26 M10 x 1.5 5 245 61.5 3/8 72 100 10.5 38 10 17 341 M26 x 1.5 15 68 37.5 177 26 M10 x 1.5 5 265 69.5 1/2 72 With Rod Boot 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5

MNB

22.4 47.5 M8 x 1.25 5 183 47 1/4 58 63 8.5 31.5 7 9 259 M18 x 1.5 12 55 23 123.5 20.7 M8 x 1.25 5 197 55.5 3/8 58 80 10.5 10 38 11.5 321 M22 x 1.5 61 33 14 157 26 M10 x 1.5 5 245 61.5 3/8 72 100 10 38 10.5 17 341 M26 x 1.5 37.5 15 68 177 26 M10 x 1.5 5 265 69.5 1/2 72 With Rod Boot 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5

Slider Type/Ball Bushing Bearing

(mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 5 10 15 20 0 Moment (Nm) 25 25 25 5 10 15 20 0 5 10 15 20 0 Moment (Nm) Moment (Nm) CY1HT25/32 CY1HT25/32 CY1HT25/32 CY1HT25 CY1HT32 CY1HT25 CY1HT25 CY1HT32 0.05 CY3B CY3R 0.03 0.04 Deflection (mm) Deflection (mm) 0.02 CY1S 0.03 0.02 CY1HT32 CY1L 0.02 0.01 0.01 0.01 CY1H CY1H 20 40 0 60 20 40 0 60 20 40 0 60 80 CY1F Moment (Nm) Moment (Nm) Moment (

HRX-OM-M090

[] 60Hz 50Hz Fig 9.5-1 Heating capacity(HRS012--10, HRS018--10) 9.5.2 HRS012--20,HRS018--20, HRS024--20 1000 1000 Ambient Ambient temperature temperature 800 800 5 20 25 5 Heating capacity [W] 20 25 32 40 [W] 600 600 32 40 400 400 200 200 0 0 5 15 25 35 45 5 15 25 35 45 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9.5-2 Heating capacity(HRS012--20, HRS018

5 Port Solenoid Valve, Series VQC

SUP port EHX I/O Cylinder port 2, 4 (A, B) 1, 3 (P, R) Serial unit: EX240 25-pin 26-pin 20-pin Conforms to IP67 Conforms to IP67 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) C8 (for 8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) N3 (5/32") N7 (1/4") N9 (5/16") N11 (3/8") C8 (for 8) C10 (for 10) C12 (for 12) ^{Rc 1/2 N7 (1/4") N9 (5}

HRX-OM-X071

1000 32 32 25 25 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circullating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR050-A/W-20-) 9.5.2 HRR050-A/W-402000 2000 Ambient temp Ambient temp 1500 1500 Heating capacity[W] Heating capacity[W] 40 40 32 32 25 25 1000 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature

Environment

Nil Without cable 2 2 5 5 A 10 !

MU

5, !6, !7, and !

Vacuum

Bellows type Bellows type 25 8 31 5.5 3.85 5 8.5 8.7 't9 1 0 5 25 6 1 8 20 29 35 9.9 8.5 '106 IPI $eries Wi[r Bulfen ilimsns Pad Diameters a2. s4 . @6 . @8 Pad Dfameters @10. s13. s16 Flat type Flat type 45 Frs* Flat with rib Deep typezPTloD. 16D only r Adaptor plate: Provided as stahdard Flat type 2 2.6 3 5 8 0.8 4 4.8 r 6 3 5 0.8 6 7 2.5 3 5 0.8 2.5 3 6 5 8 1 (sr) Female Th reacl/Weight

CG5-S

GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 12 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4 x 0.7 M10 x 1.0 12.5 9.5 46 6 9 74 16 15 18 18 20 20 5 8 8 5 28 23 5.5 14 2.5 33 25 42 M5 x 0.8 M12 x 1.0 12.5 9.5 47 6 9 75 4 Series CJ5-S Dimensions R V Front flange type (F)/CJ5FS CA Rod cover side Piping port 2-M5 x 0.8 Piping port M5 x 0.8 GB GA NN MM Cover surface BA CB D FY FB

MHZ2/MHZJ2

No setting 1 4 2 5 7 2 5 3 2 2 3 5 3 1 MHZ2-16 No setting 3 2 4 1 MHZ2-20 MHZ2-25 MHZJ2-10 No setting No setting MHZJ2-16 No setting No setting 3 2 1 MHZJ2-20 MHZJ2-25 Note) "" in the table indicates a skip with no dimension.

Vacuum

Bellows type Bellows type 25 8 31 5.5 3.85 5 8.5 8.7 't9 1 0 5 25 6 1 8 20 29 35 9.9 8.5 '106 IPI $eries Wi[r Bulfen ilimsns Pad Diameters a2. s4 . @6 . @8 Pad Dfameters @10. s13. s16 Flat type Flat type 45 Frs* Flat with rib Deep typezPTloD. 16D only ) r Adaptor plate: Provided as stahdard Flat type 2 2.6 3 5 8 0.8 4 4.8 r 6 3 5 0.8 6 7 2.5 3 5 0.8 2.5 3 6 5 8 1 (sr) Female Th reacl/Weight