SMC Corporation of America
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How to Order Manifold Assemblies (Example) How to Order Valves Example (SZ3000, positive common with power supply terminals) SZ3 5 1 C6 LOZ 60 Double solenoid SZ3260-5LOZ-C6 (3 sets) Single solenoid SZ3160-5LOZ-C6 (2 sets) Type of actuation Supply/Exhaust block (U side mounting) 1 2 3 4 5 A B C 2 position single solenoid 2 position double solenoid 3 position closed center Switch specifications

Thomas Oil-less Articulating Piston Compressor Flow Rate: 1.43 CFM / 40 LPM , 1.43 CFM / 40 LPM, Max Pressure: 175 PSIG / 12.1 bar , 175 PSIG / 12.1 bar, Horsepower (60 Hz): .5, Kilowatts (60 Hz): .38, Voltage (50 Hz): 110 / 220 - 240, Frequency (Hz): 50, Phase: 1-phase, Item Dimensions: Length: 16.3 in / 414 mm Width: 11.2 in / 284 mm Height: 9.04 in / 230

Thomas WOB-L Piston Compressor Flow Rate: 2.75 CFM / 77.9 LPM , 2.75 CFM / 77.9 LPM, Max Pressure: 175 PSIG / 12.1 bar , 175 PSIG / 12.1 bar, Voltage (60 Hz): 230, Voltage (50 Hz): 230, Frequency (Hz): 50/60, Phase: 1-phase, Number of Stages: 2, Item Dimensions: Length: 10.35 in / 262.89 mm Width: 5.37 in / 136.4 mm Height: 9.32 in / 236.73 mm Net Weight

Slider guide + Slide screw IX IY High rigidity IX H Low High rigidity achieved by the use of a hollow box type aluminum construction Low High Work load/Allowable moment IY W Model IX IY W H Sectional secondary moment Low noise (slide screw type) Slide screw + Slider guide: 47dB (LJ1S) Linear guide LJ1H10 LJ1H20 LJ1H30 LJ1S10 LJ1S20 LJ1S30 Slider guide 24.7 44.8 55 36 56.3 73.3 7 40 84 15 60

22 19.5 17 20 12 12 18 2 12 12 40 6 31.3 43 38 M5 x 0.8 depth 8 to 800 40 30 27 19 26 16 15 25 2 13 13 50 8 38.3 52.5 47 M6 x 1 depth 12 to 1200 50 35 32 27 32 20 16.5 30 2 14 14 58 11 44.5 58.5 58 M8 x 1.25 depth 16 to 1200 63 35 32 27 38 20 16.5 32 2 14 14 58 11 45 59 72 M10 x 1.5 depth 16 to 1400 80 40 37 32 50 25 19 40 3 20 20 71 13 53.5 68 89 M10 x 1.5 depth 22 to 1500 100 40 37 41 60

1000 a = 500 20 L3 (mm) a = 2000 L3 10 m Mey a 0 1 2 3 4 5 Transfer load m (kg) Refer to page 145 for deflection data. 88 Standard Motor/Horizontal Mount Specification Series LJ1S10 Dimensions/LJ1S101SC Scale: 15% 10 6 Work piece mounting reference plane 80 5H10 depth 8 8-M5 x 0.8 thread depth 8 45 20 Cable entry side Body mounting reference plane 5H10 depth 6 Z section detail 100 201 60

Slider guide + Slide screw IX IY High rigidity IX H Low High rigidity achieved by the use of a hollow box type aluminum construction Low High Work load/Allowable moment IY W Model IX IY W H Sectional secondary moment Low noise (slide screw type) Slide screw + Slider guide: 47dB (LJ1S) Linear guide LJ1H10 LJ1H20 LJ1H30 LJ1S10 LJ1S20 LJ1S30 Slider guide 24.7 44.8 55 36 56.3 73.3 7 40 84 15 60

L X P Table displacement (m) Table displacement (m) LXPB-200 LXPB-200 1500 1500 LXPB-175 LXPB-175 1000 1000 LXPB-150 LXPB-150 LXPB-125 LXPB-125 LXPB-100 LXPB-100 500 500 LXPB-75 LXPB-75 LXPB-50 LXPB-50 0 Weight (kg) 0 Weight (kg) 1 2 3 4 5 6 1 2 3 4 5 6 Displacement at the section indicated by the arrow when a load is applied to this section with the slide table fully extended.

, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

C8) 17.5 3.5 20.5 10.5 300 75.5 (Lead wire) Cover dia 1.6 Cross section 0.34mm2 (C10) (02) 63 56 (11) PE port R 3 1 P (24) 9 2-Rc(PT)1/4 P(SUP) port 2-Rc(PT)1/4 R(EXH) port 21 10 41 DIN terminal (Y) L plug connector (L) 300 (Lead wire) 88.5 89.5 Indicator light Pg.7 92.5 MAX.10 Indicator light 56 59.5 R 3 1 P Cover dia 1.5 Cross section 0.23mm2 Applicable cord O.D. 3.5 to 7 : AC 85.5 78 60

C -40 to +75 C -40 to +85 C ND9_E2/I02 -40 to +60 C -40 to +75 C -40 to +85 C ND9_E2/I09 -25 to +60 C -25 to +75 C -25 to +85 C ND9_E2/I32 -25 to +60 C -25 to +70 C -25 to +70 C ND9_E2/D33 -40 to +60 C -40 to +75 C -40 to +82 C ND9_E2/D44 -40 to +60 C -40 to +75 C -40 to +82 C ND9_E2/I45 -25 to +60 C -25 to +75 C -25 to +85 C ND9_E2/K05 -40 to +60 C -40 to +75 C -40 to +85 C ND9_E2/IK06

Applicable pad 04S Applicable pad 06S Applicable pad 08S Applicable pad 10S Applicable pad 15S 60 70 60 60 60 4 4 4 4 4 1.5 1.5 1.5 1.5 1.5 4.1 0.8 1.5 2.5 4.1 6.1 3.1 1.6 4.1 10.1 6.9 4.9 2.1 3.9 10.9 Refer to pages 70 and 71 for adapter applicable to the ZP2 series. 30 Series ZP2 How to Order GS ZP2 T 06 S A3 With adapter Vacuum inlet direction Mounting Direction Vertical Symbol Symbol

80 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.3 (7.6) (Mounting hole) AP1000HF 100 psig (0.69 MPa) 30 psig (0.21 MPa) Inlet pressure: 50 psig (0.34 MPa) 70 0.48 60 0.41 Delivery pressure (MPa) Delivery pressure (psig) 50 0.34 Connections A 40 0.28 (mm) inch FV4 MV4 TW4 FV6 MV6 TW6 (94.0) 3.70 30 0.21 2.96 (75.2) 20 0.14 4.70 (119.4) 10 0.07 2.96 (75.2) 0 0.00 0 20 40 60 80 100 120 140 160

60 50 0 to 120 30 to 200 0 to 60 0 to 250 20 to 150 X X X X The above table covers only general characteristics of subject rubber materials.

60 74 94 118 142 Z 160 200 220 280 340 400 460 PA 40 50 60 80 100 120 140 NC 13.5 17 21 26 32 43.5 56 U1 5.5 5.5 5.5 5.5 6.5 6.5 8.5 NH 27.7 33.7 40.5 50 63.5 83.5 105 PG 3.5 4.5 7 8 9 10 12 PB 40 40 50 60 80 90 110 NE 28 34 41.8 52.3 65.3 84.5 104 U2 3 3 3 3 3.8 3.8 5 Q 153 191 206 264 322 380 436 U3 2 2 2 2 2 2 2.5 QW 48 45 46 60 72 90 110 U4 3.4 3.4 3.4 3.4 4.5 4.5 5.5 W 68 72 84 102

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 60 0.5 MPa 0.7 MPa 0.9 MPa 0.5 MPa 0.7 MPa 0.9 MPa 50 0.3 MPa 0.3 MPa Atmosp heric pressure Atmospheric pressure 0.1 MPa 0.1 MPa 40 30 Pressure dew point ( C) 20 10 0 10 20 30 40 50 60 50 60 40 30 20 10 0 10 20 30 Atmospheric pressure dew point ( C) 14

Y = 6.525 x 9.8 x 29.6 x 103 = 1.89 (Nm) Y Load factor 2 = M3/M3max = 1.89/60 = 0.03 MTS m4 M3 MY 5.

W Mounting orientation: Horizontal Operating pressure: 0.5 MPa Allowable Lateral Load at Rod End Standard Type: MQQTB Anti-lateral Load Type: MQQLB/Built-in Ball Bushing Type 60 5 50 4 Maximum allowable lateral load W (N) Maximum allowable lateral load W (N) 28 40 3 28 25 30 25 2 20 20 20 16 16 1 10 10 10 30 60 75 100 30 60 75 100 Stroke (mm) Stroke (mm) Note 1) The allowable lateral load

The load factor for each direction can be obtained as follows. x = 0/400 = 0 y = 50/250 = 0.2 z = 200/1500 = 0.13 5. x + y + z = 0.33 1 2000 1000 2000 800 1500 1500 Lz 600 L1 [mm] L3 [mm] L2 [mm] 1000 1000 400 Ly 500 500 200 Lx 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 44 Model Selection LEF Series Step Motor (Servo/24