Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Symbol Thread type R Rc N NPT F G DIN terminal with light (With surge voltage suppressor) V V V All voltages DZ DIN terminal without connector (With surge voltage suppressor) V V V All voltages o Option u Rated voltage AC DN DC Symbol Option Nil None Symbol Rated voltage 5 24 VDC 6 12 VDC Symbol Rated voltage Symbol Rated voltage 1 100 VAC 7 240 VAC 2 200 VAC 8 48 VAC 3 120 (110) VAC B 24

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

87 435 255 100 56 12.8 108 150 4 x M12 x 1.75 22 40 (1 1/2B) 50 (2B) 0 60 450 94 545 356 120 70 20.4 126 180 4 x M12 x 1.75 22 0 209 62 285 147 90 51 6.9 98 120 2 x M10 x 1.5 18 0 1 0 1 0 1 0 1 0 1 15 (1/2B) 4 x M10 x 1.5 4 x M10 x 1.5 4 x M12 x 1.75 4 x M12 x 1.75 4 x M16 x 2 4 x M16 x 2 20 (3/4B) 0 250 73 330 177 120 65 12.9 124 155 2 x M10 x 1.5 18 25 (1B) 32 (1 1/4B) 0 50 342 87 435

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Refer to page 100 for part numbers. 125 Made to Order/TSUBAKI CABLEVEYOR Specification Series LJ1H30 Dimensions/LJ1H303 (X40) Scale: 20% Dimensions other than those shown in the drawing are the same as standard. 120 160 20 2-8H10 depth 10 4-M12 x 1.75 For work piece mounting 4-12.2 4-20 Mounting plate (4-M12 x 1.75) 13 15 30 Work piece mounting dimensions 170 110 40 118 20.5 14 128 170 64

Direct Solenoid

115/00 120/60 0,01s 0.018 115/60 120/60 0.014 0_014 .011 liho lo Dedr.rgiz: (S@nds) tLts: R.9or'6 liir'.6 et r|easurd with solsoid5 al 70'F (21iC.), 10o% voltags, srtd tr vstu clan ed lobdtod. At tin6s ft mGUd by mizirE ar rhe 160 ooint m f|o sm waw.

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

9 P3313128 P3313228 MHR3-10 MHR3-15 Description Cover Main parts MA D533 MHR3/MDHR3 Series Nominal Size 10 Without auto switch: MHR3-10R 3 x M3 x 0.5 thread depth 6 P.C.D.24 (Mounting thread) 120 120 25 25 M3 x 0.5 Finger opening port M3 x 0.5 Finger closing port 44 29 9h9 0 0.036 33.5 1 5 4 16 (36.5) 12 2 2 3e8 0.014 0.028 Open: 11 Closed: 8 8 0 0.05 4 3 x M3 x 0.5 thread depth 6 (Thread

Modular F.R.L. Units

with the digital pressure switch 10 AC10-A Series AC20-B to AC60-B Series Flow Rate Characteristics (Representative values) Condition: Inlet pressure of 0.7 MPa AC10-A M5 x 0.8 AC20-B Rc1/4 AC25-B Rc3/8 0.6 0.6 0.6 Outlet pressure [MPa] Outlet pressure [MPa] Outlet pressure [MPa] 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 500 1000 1500 0 200 400 600 800 00 25 50 75 100 125

D. P. Lube ALD600/900 Series

33.2 33.2 250 250 125 639 230 120 227 2 1 1055 ALD600/900 Series Related Products: Strainer At the terminal of an air pressure line in which a D.P.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

M6 34 52 14 4 14 40 25, 50, 75 100, 125, 150, 175 200, 250, 300, 350 12 13 107 44 20 16 47 64 148 M8 35 64 19 50 11 7 14 115 49 20 16 50 78 162 M10 38 77 19 63 16.5 16.5 13.5 6.5 16.5 Bore size (mm) J K L MM ML NN OA OB OL P PA PB PW Q R S T U VA 18 M8 x 1.25 7.5 M8 x 1.25 27 27 40 20 6.6 11 1/8 38 30 104 44 118 86 106 40 13 21.5 9 M10 x 1.5 9 32 32 46 22 8.6 14 1/4 47 40 130 60 146 110

Process Pump Series PA3000/5000/PAX1000 Series PB1000

.> 140 Air consumption l/min (ANR) 120 SUP=0.5MPa 100 Note 1) If the discharge pressure is required instead of the total lifting height, a total lift of 10m corresponds to a discharge pressure of 0.1MPa. SUP=0.3MPa 80 SUP=0.2MPa 60 Note 2) 1 cycle discharge rate PA3000: Approx. 22ml PA5000: Approx. 100ml Selection procedure 1.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

.> 140 Air consumption l/min (ANR) 120 SUP=0.5MPa 100 Note 1) If the discharge pressure is required instead of the total lifting height, a total lift of 10m corresponds to a discharge pressure of 0.1MPa. SUP=0.3MPa 80 SUP=0.2MPa 60 Note 2) 1 cycle discharge rate PA3000: Approx. 22ml PA5000: Approx. 100ml Selection procedure 1.

Mounting: L (Foot), Bore Size: 32mm, Thread: Rc, Full Stroke: 200mm, First Stroke: 120mm

Mounting: L (Foot), Bore Size: 32mm, Thread: Rc, Full Stroke: 250mm, First Stroke: 120mm

Mounting: Foot, Bore Size: 32mm, Thread: Rc, Full Stroke: 250mm, First Stroke: 120mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

AZ1000

When the source pressure is 1700 psig (11.7 MPa), achievable delivery pressure is around 125 psig (0.86 MPa ) (HF and FC option 120 psig (0.83 MPa)). 2) 250 psig outlet pressure preset at 800 psig (5.5MPa) inlet pressure. Custom inlet/outlet pressure settings available.

Rotary Actuator

The rotation range under the adjustment of an angle at 120 is indicated below. The rotation range under the adjustment of an angle at 120 is indicated below. R o t Note) If it is pressurized from the port indicated with the arrow, the shaft rotates in the clockwise direction. Note) If it is pressurized from the port indicated with the arrow, the shaft rotates in the clockwise direction.

MY1

Refer to the Made to Order specifications on page 21 for details. 2 Series MY1W Theoretical Output Unit: N Operating pressure (MPa) Bore size (mm) Piston area (mm) 0.3 0.4 0.5 0.6 0.2 0.7 0.8 16 200 40 60 80 100 120 140 160 20 314 62 94 125 157 188 219 251 25 490 98 147 196 245 294 343 392 32 804 161 241 322 402 483 563 643 40 1256 251 377 502 628 754 879 1005 50 1962 392 588 784 981 1177

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

For details, refer to the Made to Order Specifications on page 8-31-1. 8-12-15 16 Series MY1W Theoretical Output (N) Operating pressure (MPa) Bore size (mm) Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 200 40 60 80 100 120 140 160 16 314 62 94 125 157 188 219 251 20 490 98 147 196 245 294 343 392 25 804 161 241 322 402 483 563 643 32 1256 251 377 502 628 754 879 1005 40 1962 392 588 784

Suction Guard (Produced upon receipt of order) FHG Series

120 177 177 177 227 227 227 285 285 110 110 110 130 130 130 150 150 120 120 120 140 140 140 170 170 30 310 380 450 520 590 45 385 485 585 685 560 650 750 850 Fixed Connection part dimensions/ Companion flange Female threaded companion flange L-type block companion flange Differential pressure indication switch d Differential pressure indicator d (75) (50) E (Rc) L-type block Y P Z G Q

Series AP500

When the source pressure is 1700 psig (11.7 MPa), achievable delivery pressure is around 125 psig (0.86 MPa ) (HF and FC option 120 psig (0.83 MPa)). 2) 250 psig outlet pressure preset at 800 psig (5.5MPa) inlet pressure. Custom inlet/outlet pressure settings available.

I/O Configurator (NFC version)

Error Codes 120 9. Troubleshooting 121 10. Release Notes 123 -2No.EX-OMV0017-C 1. Introduction This operation manual describes the installation, construction of screens and operation method of the I/O configurator for NFC.