VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

Fluoropolymer Tubing Variations

Fixed end Maximum Operating Pressure How to Order Inch size TID01 8 2.0 1.8 Max. operating pressure MPa TID07 Length per roll 1.6 Symbol 8 16 Length 8 m (25 ft) roll 16 m (50 ft) roll TID01/TID05/TID11 1.4 1.2 TID13 1.0 Tubing model 0.8 0.6 0.4 0.2 0.0 20 0 20 40 60 80 100 120 140 160 180 200 220 240 260 280 300 Operating temperature C 510 TL/TIL/TD/TID Series Applicable Fluid List Chemical

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

D-F5/J5 Same side 10 115 115 120 130 140 150 1 pc. 10 Different sides 10 2 pcs. D-F5W/J5W D-F5BAL Same side 10 120 120 120 135 140 150 1 pc. 10 Different sides 10 2 pcs. D-F59F D-F5NTL Same side 10 125 125 130 140 150 160 1 pc. 10 D-B5/B6 D-G5/K59 D-G5W/K59W D-G59F D-G5BAL/G5NTL Different sides 15 2 pcs. Same side 75 110 110 115 125 135 145 1 pc. 10 Different sides 20 2 pcs.

2/3 Port Valve

OFF-time (adjournment to nest output): 1 to 120 sec.

OMR0032

LAT3LAT3MLAT3F600 350 700 Min. travel time [ms] Min. travel time [ms] Min. travel time [ms] Load weight1000g Load weight1000g Load weight1000g 300 600 [ms] 500 [ms] [ms] 700g 700g 700g 250 500 400 500g 500g 500g 200 400 300 150 300 200 100 200 300g 300g 300g 100 100g 100g 50 100 100g 0g 0g 0g 0 0 0 0 10 20 30 40 50 0 5 10 15 20 25 30 0 10 20 30 40 50 Total travel distance [mm] Total travel

ITV

Count Pressure Characteristics Flow Characteristics Supply pressure: 0.6 MPa Set pressure: 0.25 MPa 600 1 500 kPa 500 Output deviation factor (% F.S.) 0.5 Set pressure (kPa) 400 kPa 400 Out 300 kPa 300 0 Return 200 kPa 200 0.5 100 kPa 100 50 kPa 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0 2 1 3 4 5 6 0 7 1.0 Supply pressure (MPa) Flow rate (l/min (ANR)) 14-8-6 7 Compact Electro-pneumatic Regulator

70pvpump

Air consumption (l/min (ANR)) 140 120 SUP = 0.5 MPa 100 SUP = 0.3 MPa 80 SUP = 0.2 MPa 60 40 20 1 0 2 3 4 5 6 7 Cycle (Hz) PA513 Air Consumption 400 Air consumption (l/min (ANR)) SUP = 0.5 MPa 350 300 Calculating Air Consumption (PA3000) 250 SUP = 0.3 MPa 200 Find the air consumption for operation with a 4 Hz switching cycle and pilot air pressure of 0.3 MPa from the air consumption graph

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

ML1C

Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) 25 32 40 2000 2000 2000 Stroke adjustment unit symbol Refer to page 1109 for stroke adjustment unit. 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 When stroke is required, which is longer than the standard stroke, refer

ML1

switches S n 25 32 40 25mm 32mm 40mm 2 1 n Standard stroke Bore size (mm) Max. stroke (mm) Standard stroke* (mm) 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 25 32 40 2000 2000 2000 *When the required stroke is longer than the standard stroke , refer to the specifications for Made to

Table of Contents

No. of connecting tubes Model Weight Color of release button KDM10-23 KDM10-04 KDM10-06 KDM10-08 KDM20-23 KDM20-04 KDM20-06 KDM20-08 3.2 4 6 300 g 10 520 g 8 3.2 Blue 520 g 4 6 8 20 950 g KDM20 Applicable Tubing Tubing material Tubing O.D.

RHC

Solenoid valve ( ): Effective area [mm2] : Metal : Metal seal Speed controller Composed effective area (mm2) E 64.8 to 67 D 36 to 45 VQ4000 (36.0) VQ4000 (39.6) VFR3000 (41.4) VFS3000 (36.0) G 180 to 300 VFR6000 (191) VFS6000 (180) VP70 (300) F 102.6 to 120 2 Standard type 1 With One-touch fittings C 16.2 to 21.6 VQ2000 (16.2) SY7000 (21.6) SX7000 (21.6) Elbow type 1-A Refer to System

180

25 100 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa 250 20 0.6 80 0.6 Gripping force (N) Gripping force (N) Gripping force (N) 0.6 200 0.5 0.5 0.5 60 15 0.4 0.3 0.4 150 0.4 40 0.3 10 0.3 100 0.2 0.2 0.2 5 20 50 0 0 40 Gripping point L (mm) 120 80 160 200 20 40 60 Gripping point L (mm) 80 0 20 40 60 Gripping point L (mm) 80 100 120 MHW2-25D MHW2-40D 160 50 Pressure 0.7 MPa Pressure

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

/Specific Product Precautions Exhaust Cleaner for Vaccum (Series AMV) Exhaust Cleaner for Clean Room (Series AMP) Page 5-10-15 Related Products 5-10-1 2 Silencer Standard Type Series AN00 How to Order Over 30 dB (A) noise reduction Low back pressure Compact and easy mounting AN 400 04 Port size Thread type Body size 02 03 04 06 10 12 14 20 1/4 3/8 1/2 3/4 1 1 1/4 1 1/2 2 R NPT Nil N 200 300

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

0.2 MPa ML2B 300 0.2 MPa 160 C J G5-S 80 120 200 CV 80 40 MVGQ 100 40 CC 40 120 100 80 60 180 140 100 60 240 200 160 120 80 RB Point of application L (mm) Point of application L (mm) Point of application L (mm) J D-X 20Data 10-11-7 7 Escapements Series MIW/MIS 8, 12, 20, 25, 32 How to Order Finger option Nil: Basic type (Standard) 1: Tapped on upper and lower faces 2: Tapped on all faces

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

0.2 MPa ML2B 300 0.2 MPa 160 C J G5-S 80 120 200 CV 80 40 MVGQ 100 40 CC 40 120 100 80 60 180 140 100 60 240 200 160 120 80 RB Point of application L (mm) Point of application L (mm) Point of application L (mm) J D-X 20Data 10-11-7 7 Escapements Series MIW/MIS 8, 12, 20, 25, 32 How to Order Finger option Nil: Basic type (Standard) 1: Tapped on upper and lower faces 2: Tapped on all faces

XL

.: 120C [248F]) Uniform baking temperature Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. 3, 4, 5 3 120 120 Comparison with KF25 flange 100 100 Body 1 4 Temperature (C) Body 2 80 5 2 Temperature (C) Body 3 1 1, 2 Bellows 60 30 0 60 30 0 Time (minutes) Time (minutes) Valve F=(1.8xC

SYJ3000/5000/7000

Standard length is 300 mm, but the following lengths are also available.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Standard length is 300 mm, but the following lengths are also available.