Brake mechanism added

x 1.5 31 187 3/8 254 0 58 326 52 11.2 66 334 stroke M22 x 1.5 37 205 1/2 284 0 71 372 65 12.5 80 381 M26 x 1.5 40 214 1/2 300 0 72 389 65 14 81 398 Foot type 4 x LD LS + stroke ZZ + stroke (mm) B LH LS LX X Y ZZ LD Bore size (mm) 40 50 63 80 100 58.5 40 272.5 42 27 13 309.5 9 68.5 45 289.5 50 27 13 333.5 9 83 50 322 59 34 16 362 11.5 100 65 372 76 44 16 415 13.5 114 75 386 92 43 17 432 13.5

Thermo-chiller/Rack Mount Type

0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRR010-W-20 [50 Hz] [60 Hz] 400 400 35C Heating capacity [W] Heating capacity [W] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature Facility water temperature Facility water temperature Facility water temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35

2 Phase Stepper Motor/Without Motor Brake Series LXP

Allowable lateral load (F) Allowable plate rotation torque (T) Load (N) Torque (Nm) Stroke 50 75 100 125 150 175 200 Stroke 50 75 100 125 150 175 200 L L 42 2.87 m m 42 2.47 40 2.17 42 2.38 32 2.16 24 1.98 17 1.82 50 to 200mm stroke F T 10 Load weight m (kg) F 125 to 200mm stroke Plate non-rotating accuracy () 50 to 100mm stroke Non-rotating accuracy () 0.09 1 + 0.1 10 50 100 Eccentric distance

Basic Type/Direct Mount Type

Caution Theoretical Cylinder Thrust 6, 10 15, 20, 25, 32, 40 50, 63 CY3B CY3R CY3B CY3R CY1S 63 63 1200 40 40 1100 3000 100 90 80 70 60 50 40 30 20 10 Theoretical thrust (holding force) (N) Theoretical thrust (holding force) (N) Theoretical thrust (holding force) (N) H CY1L Bore size 10 Bore size 2500 1000 900 800 700 10 50 50 H 32 32 2000 CY1H 1500 600 25 25 500 400 300 200 100 CY1F 1000

SMC Pneumatic Clean Series

58 70 9 11 9 9 80 104 40 3 82 11 11 100 128 50 3 100 14 14 Bore size 20 25 32 40 Note) End boss is machined on the flange for E.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Nil Standard P Note 1) Axial piping Note 1) The combination of axial piping and both ends adjusters or retraction end adjusters is not available.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG The above values are the maximum allowable values for moment and load.

Profile Design ISO/VDMA Air Cylinder Series CP95

10 11 50 15 12 9 50 65 12 33 11 30 32 45 45 12 12 63 15 16 9 52 67 14 37 11 35 40 50 50 12 15 80 18 16 11 66 86 18 47 12.5 40 50 60 63 14 15 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting type CR Rear clevis with ball joint A B C D EN ER F G E L M N P H R (mm) 0.2 maxi JS15H7 -0.1 maxi H11 H13 H13 0.5 0.5 0.5 32 32.5 10.5 22 10 14 15 30 10 6.6 45 10.5 5.5 5 40 38 12 25 12 16

Compact Cylinder with Air Cushion Series RQ

30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 9 8 9.5 13.5 10 3 Compact Cylinder with Air Cushion Double Acting: Single Rod Series RQ Auto Switch Mounting Bracket Part Nos.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA 40, 50, 63, 80, 100, 125, 160 3.5MPa How to Order Bore size 40 50 63 80 100 125 160 40mm 50mm 63mm 80mm 100mm 125mm 160mm Aluminum tube Steel tube Tube material Aluminum alloy Steel tube Nil F Without auto switch Nil Auto switch type CHA 40 100 L L With Auto Switch Select applicable auto switch models from

MU

MU-C02 MU-C03 MU-C04 MU-C05 MU-C06 Bore (mm) 25 32 40 50 63 Part no.

51

pin part no. 20 25, 32 40 50, 63 80 100 Part no.

Guide Cylinder Series MGG

118 102 129 75 50 134 95 93 50 170 45 M8 175 105 186 170 19 19 M8 x 1.25 depth 16 12 9 150 134 152 90 56 152 115 103 55 194 50 M10 200 115 210 190 21 25 M10 x 1.5 depth 21 12 11 160 140 182 For long strokes Bracket mounting strokes Stroke range (mm) Bore size (mm) Bore size (mm) Bracket mounting stroke Bore size (mm) P Y Z Y X T W S V R Q R U 20 25 32 40 50 20 25 32 40 50 20 25 32 40 50 Rc

ZPT/ZPX

121 12 ZPT125HBNJ25-B01-A22 50-B01-A22 75-B01-A22 100-B01-A22 +7 +228 22 How to Order ZPT 40 HB N J 25 B01 A18 Mounting thread Pad diameter (mm) 40 50 63 80 100 125 M18 x 1.5 (40 to 80) 40 A18 50 M22 x 1.5 (100, 125) A22 63 80 Vacuum entry 100 B01 Rc 1/8 125 Applicable buffer stroke (Rotating) HB Pad type Material 40 50 63 80 100 125 Stroke 25 50 75 100 Large bellows pad N S U F E NBR Spring

MK

-40-PS 50 MK-50-PS 63 MK-63-PS Kit no.

ZPT/ZPX

How to Order B01 H N 40 25 ZPT A18 J Pad diameter (mm) Mounting thread 40 50 40 50 A18 A22 M18 x 1.5 (40 to 80) M22 x 1.5 (100, 125) 63 63 Vacuum entry 80 80 100 100 B01 Rc 1 8 125 125 Buffer stroke (Rotating) Pad type H Heavy duty Stroke 40 50 63 80 100 125 50 25 Material 75 100 N S NBR Silicon rubber Spring Force U Urethane rubber 40 to 80 Pad diameter 100, 125 F Fluoro rubber E EPR 6.9

CG5-S

83 13 25 8 137 146 7 9 2 14 30 27.6 21 3 56.5 42 30 158 CG-E020SUS 9 83 13 32 10 141 7 11 4 22 40 38.4 29 4 70.5 56 40 170 152 CG-E032SUS 11 85 15 40 10 159 7 11 4 22 40 38.4 29 4 70.5 56 40 188 170 CG-E032SUS 11 93 15 50 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 15 109 21 63 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 15 109 21 80 22 234 14 23 6 40 80

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

) Min. operating pressure differential origin line (P1 + 1.033) = (1 to 1.89)(P2 + 1.033) 1.0 Upstre am pre 0.9 ssu re of val ve 0.8 Downstream pressure of valve (P2) [MPa] P 1 1 0.9 .0 0.7 M Pa 0.8 Subsonic 0.6 Critical pressure 0.7 0.5 0.6 Sonic 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 JSXD70 Port size 1 1/4 JSXD80 Port size 1 1/2 JSXD90 Port size 2 35 50 10 20 30 40 40 20 40 60 50 20 40 60

RHC

HS A B B A Auto switch 50 to 100 50 to 100 HS HS 12 12 SMC SMC 24.5 24.5 A 33 B A 33 Auto switch B D-C73C/C80C 20 to 40 D-H7C 20 to 40 HS HS Auto switch Auto switch B A B A 50 to 100 50 to 100 HS HS 8.5 8.5 SMC SMC 16 16 A 36.7 Auto switch A 38.2 B Auto switch D-A3/G39/K39 D-A44 Auto switch HS HS 36 36 Auto switch A 49 B A 49.5 B G 1/2 (Applicable cable O.D. 6.8 to 11.5) G 1/2 (Applicable

RLQ

Bore size (mm) 32, 40 50, 63 T2 T1 M F E D B Part No.