5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ3000 VFS VS 0.7 0.9 VS7 Bore size (mm) Cylinder speed (mm/s) Base mounted (With sub-plate) Cv Series CJ2 Series CM2 Series CA1 6 10 16 20 25 32 40 40 50 63 80 100 150 300 VQZ1000 Body width 10 450 0.3 V V V 600 750 150 300 VQZ2000 Body width 15 0.6 450 V 600 V V 750 150 300 VQZ3000 Body width 18 0.9 450 V V V V V 600 750 Cylinder speed marked with can be controlled by speed controller
310.5 17 223.5 280.5 300 310.5 18 234 291 312.5 323 19 244.5 301.5 325 335.5 20 255 312 337.5 348 21 265.5 322.5 350 360.5 22 276 333 362.5 373 23 286.5 343.5 375 385.5 24 297 354 375 385.5 VV5QC21 (L3) (L4) L2 L1 47 76.5 38.5 P = 16 34.5 (12) 13 1 1 Manual override Indicator light Approx. 5.5 Approx. 10.5 (5.5) 127 Approx. 3.5 105.5 80 (35) (46.5) 50.5 Applicable connector: Flat ribbon
Max. load current 80 mA Max. applied voltage (NPN only) 28 VDC Internal voltage drop (Residual voltage) NPN output type: 1 V or less (at load current of 80 mA) PNP output type: 2 V or less (at load current of 80 mA) Response time*5 Select from 1 s, 2 s, or 5 s.
Nil C M 40 50 63 80 100 40 mm 50 mm 63 mm 80 mm 100 mm Standard stroke Refer to Standard Stroke on page 10-3-13. D Double acting Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.
Nil C M 40 50 63 80 100 40 mm 50 mm 63 mm 80 mm 100 mm Standard stroke Refer to Standard Stroke on page 10-3-13. D Double acting Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.
Set point 60 55.5 70 56.0 80 56.5 90 100 0 20 40 60 80 100 120 57.0 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV3000 IRV3000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 57.0 100 95 90 85 80 75 70 65 60 100 0 20 40 60 80 100 120 140 160 VAC side pressure (kPa) Flow rate (l/min
500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s Technical Data 1207 Mechanically Jointed Rodless Cylinder Linear Guide Type MY1H Series 25, 32, 40 RoHS How to Order M9BW 25 300 MY1H Z Linear guide type Linear guide type Made to Order Refer to page 1209 for details
0 20 40 60 80 100 20 40 60 80 100 Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) 5 Air Slide Table Series MXQ Table displacement due to pitch moment load Table displacement due to roll moment load Table displacement due to yaw moment load Displacement at the section indicated by the arrow when a load is applied to this section with the slide
310.5 17 223.5 280.5 300 310.5 18 234 291 312.5 323 19 244.5 301.5 325 335.5 20 255 312 337.5 348 21 265.5 322.5 350 360.5 22 276 333 362.5 373 23 286.5 343.5 375 385.5 24 297 354 375 385.5 VV5QC21 (L3) (L4) L2 L1 47 76.5 38.5 P = 16 34.5 (12) 13 1 1 Manual override Indicator light Approx. 5.5 Approx. 10.5 (5.5) 127 Approx. 3.5 105.5 80 (35) (46.5) 50.5 Applicable connector: Flat ribbon
empty weight deflection 2 2 Lateral empty weight deflection Lateral empty weight deflection 1 1 0.5 0.5 0.2 0.2 0.1 0.1 200 300 500 1000 100 Load point distance mm 200 300 500 1000 100 Load point distance mm 146
2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.
CJ2 Pressure 0.5MPa Load factor 25% Piping length 2m Speed controller: AS3000F-06 (S=6.5mm2) Cylinder stroke 50mm Fitting (One-touch fitting) Effective area (mm2) (Cv factor) Cylinder speed (mm/s) Model 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 6 3.6 (0.2) VQ1000 (Metal seal) 6 5.4 (0.3) VQ1001 (Rubber seal) Series VQ2000 Cylinder bore size (mm) Series CA1
Size 60 2 1 191.2 45 93.1 30 45 70 50 70 11 20 8 60 80 Number of components Model Combination example r A N F J M Pressure Relief 3-port Valve VHS30-03-D 1 pc.
9 14 133 142 Up to 300 8 10 32 32 52 36 108 116 118 25 Up to 450 47 4 6.8 28 102 3.2 40 55 20 8 25 135 Up to 450 Up to 300 40 37 7 4 60 75 41 111 Up to 300 9 10 19 30 9 14 137 146 Up to 300 9 10 40 40 60 40 112 120 122 32 Up to 450 47 4 6.8 28 104 3.2 40 55 20 8 25 137 Up to 450 Up to 300 40 37 7 4 60 75 41 113 Up to 300 9 10 19 30 9 14 139 148 Up to 300 9 10 40 40 60 40 114 122 124 40
400 500 600 700 800 900 1000 1200 1500 LJ1S101SC 50W to 300 LJ1S202SC 100W to 300 LJ1H101SC 50W to 500 LJ1H101PB 50W to 600 LJ1H101NB 50W to 600 Standard motor LJ1H202SC 100W to 500 [Tamagawa Seiki Co., Ltd.]
isl'r t-t 2 300 0lhy4 1 8?.6 6.4 ,7 f9.9 ( o E SC!
speed mm/s Piston speed mm/s 4 CY1F/m1 5 CY1F/m2 6 CY1F/m3 7 CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm/s Piston speed mm
90 100 110 120 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Pump Circulating fluid Pump Circulating fluid head pressure head pressure Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] [m] [MPa] [m] [MPa] HRL300-Am-20 (CH1) HRL100/200/300-Am-20 (CH2) 0.9 0.6 90 60 0.8 80 0.5 50 0.7 70 Circulating fluid outlet 0.6 0.4 60 40 Usable flow rate range Circulating fluid outlet
m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31
200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7