HRL

75 71 Accessories Operation Manual (for installation/operation) 2 pcs.

SYJ3000/5000/7000

Connector Socket Lead wire Hook 1-5-75 76 Series SYJ3000/5000/7000 Specific Product Precautions 3 Be sure to read before handling.

IR1000/2000/3000

55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 100 0 20 40 60 80 100 120 57.0 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV3000 IRV3000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 57.0 100 95 90 85 80 75 70 65 60 100 0 20 40 60 80 100 120 140 160 VAC side pressure (kPa) Flow rate

Compact

CQ-M3 x 70 L 40 75 CQ-M3 x 75 L 45 80 CQ-M3 x 80 L 50 85 CQ-M3 x 85 L 20 5.5 D C 5 45 CQ-M3 x 45 L 10 50 CQ-M3 x 50 L 15 55 CQ-M3 x 55 L 20 60 CQ-M3 x 60 L 25 65 CQ-M3 x 65 L 30 70 CQ-M3 x 70 L 35 75 CQ-M3 x 75 L 40 80 CQ-M3 x 80 L 45 85 CQ-M3 x 85 L 50 90 CQ-M3 x 90 L 25 8 6 MXZ Series Dimensions: MXZ12 MXZ12Standard (Pilot port location: Front) 4 x 6 4 x M3 x 0.5 depth 5 17 14 14 2 x 3.4

ZX

Operation stop 13-2-70 70 Series ZX Made to Order Specifications: Please consult with SMC for detailed specifications, size and delivery. ZX ZR Combination Symbol: J3 Combination Symbol: D2 ZM An N.C. solenoid valve is used as the supply valve. A vacuum release valve is not used. An N.C. solenoid valve is used as the vacuum release valve. A supply valve is not used.

CG5-S

, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting Basic type Axial foot type Front flange type Double clevis type B L F D CJ5 L 16 S R 60 Without Auto Switch CDJ5 L 16 S R 60 H7BAL With Auto Switch With auto switch (built-in magnet) Number of auto switches 2 pcs. 1 pc.

Sine Rodless Cylinder Series REBR Direct Mount Type

100 300 500600 70 100 300 500600 Maximum speed U (mm/s) Maximum speed U (mm/s) 72 Sine Rodless Cylinder High Precision Guide Type Series REBH Moment generated by the self weight of the load even when the cylinder is stopped Static moment Pitch moment M1 = WL Yaw moment M3 = W(LA) Roll moment M2 = WL (mm) Model REBH15 REBH25 REBHT25 REBHT32 A 17.5 23.5 0 L L A L 0

A

-06 3/4 75 172.5 20 70 14 50 54 25 8.5 10.5 70 2.3 73 198 Float type Courtesy of Steven Engineering, Inc. !

CJ5-S

ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-14-3 4 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10 mm 16 mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes by the 1 mm interval are available without using spacers for stroke adjustment.

CJ5-S

ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-14-3 4 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10 mm 16 mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes by the 1 mm interval are available without using spacers for stroke adjustment.

ITV

1.0 0 2 6 4 8 1.0 100 0 25 50 75 10 Input signal (%F.S.)

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

0.017 15 0 0.043 0 0.052 75 14.9 28 27 25 30 30 20 M8 x 1.25 depth 12 1/4 R8 95 90 3 13 16 5 70 48 94 63 7.5 9 110 23.5 53.5 19 15 0 0.043 0 0.052 88 0.006 0.017 17 16.9 30 29 30 32 35.5 24 M10 x 1.5 depth 13 0.007 0.020 25 1/4 R11 0 0.052 0 0.062 125 103 4 19 22 5 80 60 120 78 7.5 11 140 30 65 28 11.5 108 24.9 45 38 38 For single vane: Above illustrations show actuators for 180 when

Compact Manifold Regulator

75 76 77 82 83 84 SRP SRF ITV IC ITVH ITVX 4.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

78 8/Rc 10/Rc 5 8 13 12 20 23 24 34 46 40 70 78 55 75 95 65 110 150 85 135 185 SUP VAC EXH 28 28 33 66 11 12 16 27 43 55 95 ZH ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 1 8 1 8 Box type (Built-in silencer) 0.7 1.0 1.3 0.5 0.7 88 48 1 4 1 8 ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

MGQ

, 40, 50, 75, 100, 125, 150, 175, 200 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 26 64 17 10 19 52 74 2 8.5 4 46 36 72 8 30 10 60 37 13 18 47 8 M5 x 0.8 13 M5 x 0.8 7 M5 x 0.8 Rc 1/8 10.5 32 76 21 10 21 62 88 2 9 2 56 42 86 8 38 12 70 37.5 14 26 47.5 9 M6 x 1.0 15 M6 x 1.0 8 M6 x 1.0 Rc 1/8 11.5 MGQM (Slide bearing) A, DB, E Dimensions MGQL (Ball bushing bearing) A, DB, E Dimensions E E

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

0.017 15 0 0.043 0 0.052 75 14.9 28 27 25 30 30 20 M8 x 1.25 depth 12 1/4 R8 95 90 3 13 16 5 70 48 94 63 7.5 9 110 23.5 53.5 19 15 0 0.043 0 0.052 88 0.006 0.017 17 16.9 30 29 30 32 35.5 24 M10 x 1.5 depth 13 0.007 0.020 25 1/4 R11 0 0.052 0 0.062 125 103 4 19 22 5 80 60 120 78 7.5 11 140 30 65 28 11.5 108 24.9 45 38 38 For single vane: Above illustrations show actuators for 180 when

Refrigerated Air Dryer

Applicable dryer Weight lb [g] A B A 0.8 [20] 0.8 [20] AME 8.7 [220] 9.4 [240] 0.08 [35] IDF-FL209 IDFB3E AMF IDFB4E 14.8 [375] 7.7 [195] 0.12 [55] IDF-FL203 B IDFB6E ZFC 13.3 [340] 0.15 [70] IDF-FL204 IDFB8E 10.4 [265] SF 14.8 [375] 0.17 [75] IDF-FL205 IDFB11E 0.4 [10] SFD [17.3] 440 [14.5] 370 [0.26] 120 IDF-FL206 IDFB15E LLB (IDF-FL209) (IDF-FL203 to 208, 213, 214) IDFB22E 21.7 [550] 14.4

Air Fittings & Tubing

Burst pressure Min. bending radius (mm) 100 15 20 30 60 75 75 60 48 36 24 25 13 20 to +60C (Water: 0 to 40 C) (No freezing) Operating temp. Nylon 12 Material Precautions How to Order Be sure to read before handling.

SMC Basic Pneumatics

Solenoid Operation Direct Piping Manifolds Sub Bass Multiple Sub Bases Ganged Sub Bases Valve Sizing Indications for Flow capacity Orifices in series connection Flow capacity of lubes Valves with Cylinders Auxiliary Valves 70 70 70 71 71 71 72 73 73 73 74 74 75 76 76 78 76 T7 78 79 80 80 81 81 81 82 82 83 84 85 88 APPENDIX Symbols Air Tratment Equipment Actuators Valves Circuits Basic Rules

Booster Regulator/Air Tank

60 4 x 5.5 60 4 x 5.5 EXH port 1/4 8.5 70 70 50 SRP (When silencer installed: 107) (When high-noise reduction silencer installed: 126) (97) EXH port 1/4 VBA20A-03 SRF 300 39 ITV Pressure gauge (Option) 28 IC IN side gauge port 1/8 OUT side gauge port 1/8 ITVH IN port 3/8 176 ITVX 43 46 15 Silencer (Option) PVQ OUT port 3/8 21 VY1 24 53 VBA VBAT VBA VBAT 98 4 x 12 EXH port 3/8 3.2 73 118