Type of Connector: D-sub Connector 25 Pin, Connector Outlet Direction: Connector Side Direction, Stations: 4 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, Built-in Silencer, A, B Port: 5/32" One-touch Fitting, Mounting Method: -

Type of Connector: D-sub Connector 25 Pin, Connector Outlet Direction: Connector Side Direction, Stations: 4 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, Built-in Silencer, A, B Port: ø6 One-touch Fitting, Mounting Method: -

Type of Connector: D-sub Connector 25 Pin, Connector Outlet Direction: Connector Top Direction, Stations: 4 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, Built-in Silencer, A, B Port: ø6 One-touch Fitting

Type of Connector: D-sub Connector 25 Pin, Connector Outlet Direction: Connector Top Direction, Stations: 4 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, Built-in Silencer, A, B Port: ø4 One-touch Fitting

Type of Connector: D-sub Connector 25 Pin, Connector Outlet Direction: Connector Side Direction, Stations: 4 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, Built-in Silencer, A, B Port: 5/32" One-touch Fitting

Type of Connector: D-sub Connector 25 Pin, Connector Outlet Direction: Connector Side Direction, Stations: 4 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, Built-in Silencer, A, B Port: ø6 One-touch Fitting

Type of Connector: D-sub Connector 25 Pin, Connector Outlet Direction: Connector Side Direction, Stations: 4 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, Built-in Silencer, A, B Port: ø4 One-touch Fitting

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 4 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: C6 (ø6 One-touch Fitting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 4 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N3 (5/32" One-touch Fitting)

Stations: 4 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: C4 (ø4 One-touch Fitting)

V100

) (D, Y) VS N.C.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(-L) 95.5 2.8 depth 8.4 2.5 depth 6 PF2M711/721S-C8(-L) 96 2.8 depth 6.2 2.5 depth 5 PF2M711/721S-N7(-L) 92.6 2.8 depth 6.2 2.5 depth 5 2 x P Q 2 x P Q PF2M7mW-C4/C6/C8/N7(-L) A D A D 58 58 48 48 18 18 OUT1 OUT2 OUT1 OUT2 10.2 DC() DC(+) 1.4 10.2 DC() DC(+) 1.4 46.9 (Max. 53.9) 46.9 (Max. 53.9) 38.5 (30.9) 38.5 (30.9) 3 3 C 18 C OUT IN 18 2 x One-touch fitting Applicable tubing O.D.: 4, 6

Series VQ Metal Seal/Rubber Seal Body Ported

Kit (D-sub connector) 15 pin F Kit (Flat cable connector) 10 pin, 16 pin, 20 pin P How to Order Manifold How to Order Manifold 06 FSA D VV5Q14 06 P SC VV5Q14 D Ex.) Ex.)

VQC

D-side w How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

from the 1st station on the D-side.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

from the 1st station on the D-side.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

, M5 N1: One-touch fittings for 1/8" N3: One-touch fittings for 5/32" N7: One-touch fittings for 1/4" M5: M5 thread (4.5) (7.5) 20 DIN rail clamp screw U side n Manual override 5 A 2 A 2 A 2 A 2 4 P=10.5 (L4) (L3) L1 L2 3 2 1 16.5 Stations 6.5 D side 2.3 2-M5 x 0.8 External pilot port 21.6 (Only external pilot port type(R)) 34.5 53 5.5 (Lead wire length) 39.5 7.8 (N1, N3, N7) 300 (M5) Cover

Table of Contents

How to order manifold VV5Q13 1(P), 3(R) port size: 1/4 08FSO DN 00T P How to order valves VQC VQ1130 5 N7 Cylinder ports Example) VV5Q13-09FS0-D K S SQ Applicable tube O.D. (Inch) 1/8" 5/32" 1/4" N1 N3 N7 Symbol VQ0 DIN Rail Mounting Others, option symbols: to be indicated alphabetically. VQ4 Each manifold can be mounted on a DIN rail.

5 Port Solenoid Valve, Series VQC

D-side How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.

SYJ300/500/700

It is already built-in to the rectifier circuit. 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 3 4 220 VAC 50/60 Hz [230 VAC 50/60 Hz] Electrical entry D With connector DIN terminal DC specifications of type D and DO is only available with 12 and 24 VDC. Power saving circuit is not available in the case of D or DO type.