VCA

AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 No. Part no.

Series VQ Metal Seal/Rubber Seal Body Ported

Blank plug Dimensions 23 04 06 KQP-X19 A L D Model Fittings size d Color: White 3.2 4 6 16 16 18 3.2 6 8 31.5 32 35 KQP-23-X19 KQP-04-X19 KQP-06-X19 It is inserted into an unused cylinder port and SUP/ EXH ports. The minimum order quantity is 10 pcs.

Speed Controller: Standard Type Large Flow In-line Type AS Series

series 02 03 04 06 10 12 14 20 Caution L (2) Note 1) AS800 is available as special.

Compact Manifold Regulator

OUT Fitting Type Metric size Inch size Symbol Position 1 2 Bottom Top Straight Elbow 4 6 4 6 Straight Elbow 5/32 1/4 5/32 1/4 Fitting type Symbol Fitting type Symbol 04 05 16 17 54 55 66 67 4. Accessory (Pressure Display) 5.

Compact manifold regulator ARM5 Series

Panel cut dimension 2 x 3.2 16.5 14.5 11 8.2 20 2 x 3.2 2 x 3.2 M3 thread hole 8.2 8.2 P U P S U H S H L O L C O K C K R V R S W V X S W T 19 T X 19 L2=50+T+X L2=50+T+X L1=50+R+V 14 L1=50+R+V 14 Pressure gauge (Accessory) 50 Pressure gauge (Accessory) 50 55 (at knob locked) 55 (at knob locked) IN OUT IN OUT 41.5 43.5 U Y 4 25 6 25 U Y 14 14 SMC SMC 2 x 3.2 2 x 3.2 42 42 IN side OUT side IN

KA

(mm) Fitting size d Soft nylon Polyurethane D L A M Part No. 3.2 9.6 18.5 17.5 18 4 33.5 34.5 36.5 18.5 15.5 KAR23-04 3.4 2.9 2.0 1.8 5 KAR04-06 KAR04-08 5.6 5.6 6 8 10.4 4 16 12.8 39.5 37 39.5 10 KAR04-10 3.3 2.5 KAR06-08 8 18.5 6 17 12.8 KAR06-12 42 4.7 12 20 10 KAR06-10 13.1 13.1 3.0 8 KAR08-10 41 4.0 18.0 18.0 10 20 18.5 15.2 KAR08-12 42 4.6 12 10 KAR10-12 44.5 33 32.8 32.8 12 20 21 18.5

3

Option Note ZS-40-A Lead wire and M8 connector Length: 3 m ZS-42-A Bracket Mounting screw for PFMC7501/7102 (M3 x 5, 2 pcs.) ZS-42-B Bracket Mounting screw for PFMC7202 (M3 x 5, 2 pcs.) 4 Series PFMC For Flow Switch Precautions, refer to Handling Precautions for SMC Products on SMC website. For Specific Product Precautions, refer to the Operation Manual on SMC website.

IDG

IDG60S to IDG100S IDG3 to IDG50 IDG3H to IDG50H IDG30L, IDG50L Port size Symbol Bore Size V IDG60 to IDG100 IDG60H to IDG100H IDG60L to IDG100L 3 5 10 20 30 50 60 75 100 01 1/8 02 1/4 IDG60S to IDG100S Note) Note) 03 3/8 04 1/2 Note 1) Element service indicator is also available. Refer to Made to Order Specifications on page 14-19-48.

4-channel Flow Monitor ( compatible)

(Linked to OUT1) Other parameter settings Item Page Default setting [F 3] Digital filter setting Page 42 0.00 sec.

PF-OMN0009_C

20 40 11 21 0.5~4 L/min 2~16 L/min 5~40 L/min 10~100 L/min 50~250 L/min 2 04 20 40 11 21 R 04 20 40 11 21 S 250L/min G L/min(gal/min) / : SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] 1=9/5+32 L/min 100L/min250L/min Rc N NPT F G IS0228 1 N M8(3m) 04 20 40 11 21 03 3/8 04 1/2 06 3/4 10 1/1 12 11/4 14 11/2 / OUT1 OUT2 1 1~5 V 2 4~20 mA 1T 1~5 V 1~5 V (PF3W3)1~5V (-1-1T

Modular Type Regulator Series AR

Note 6) Refer to P/A catalog CAT.ES100-42 for detailed specifications and instructions of digital pressure switch.

IR1000/2000/3000

Note 3) IR1000 uses KT-IR1000 and IR1010/1020 use KT-IR1010. 14-5-8 8 Precision Regulator Series IR1000/2000/3000 Dimensions IR100-01 IR200-02 10.5 42 Mounting hole 28 2 50 Mounting hole 12.5 36 Panel mounting hole Bracket (Option) 30 2 25 Bracket (Option) F.R.L.

Vacuum System Peripherals:

42 e Valve Model Fill in the blanks below with symbols of necessary specifications.

CQ2

Rod end male thread (mm) Bore (mm) A1 C1 H1 L1 X 125 140 160 45 45 50 58 58 64 42 42 47 M30 X 1.5 M30 X 1.5 M36 X 1.5 199 199 219 CU CQS CQ2 MU Above auto switch: D-A73/A80 Refer to below for auto switch setting position and mounting height.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

38.5 41.5 37.5 30.5 32.5 50 36 50 41 42 48 44.5 47.5 43.5 36.5 38.5 63 39.5 56.5 47.5 48.5 54.5 51 54 50 40 42 80 49.5 66.5 57.5 58.5 64.5 61 64 60 50 52 100 59.5 76.5 67.5 68.5 74.5 71 74 70 60 62 7-6-24 25 Compact Cylinder: Standard Type Double Acting, Double Rod Series CQ2W 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 How to Order CUJ Without auto switch CU CQ2W B 20 30 D CQS B 20 30 D J79W

Electric Actuators

Positioning driver Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 Torque (Nm) 42 2.87 0.09 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 218 2 Phase Stepper Motor/Without

Table of Contents

Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Torque (Nm) Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 0.09 42 2.87 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 234 27 Courtesy of Steven Engineering, Inc.-230

60

VHS2510 VHS3510 VHS4510 VHS5510 Double action 1/8 1/4 3/8 1/2 3/4 Body 1 Features 2 Conforming to OSHA Standard Pressure Relief 3 Port Valve with Locking Holes (Single Action) SeriesVHS20/30/40/50 RoHS How to Order 04 A BS VHS 40 Single action Pressure relief 3 port valve Made to Order Symbol Description Body size X1 Body: Red Note) Symbol Note) Refer to Photo of X1 in Feature 2 Thread type

AMR3000 to 6000

06 10 1/4 3/8 1/2 3/4 1 Applicable model AMR3l00-02 to 03 AMR4l00-02 to 04 AMR5l00-04 to 06 AMR6l00-10 R 3 4 5 6 Body size 3 4 5 6 Adapter ass'y port size (2 pcs.)

VM

JIS Symbol How to Order VR 12 1 06 0 F Body size Applicable tubing diameter Metric size Inch size 1 2 1/8 standard 1/4 standard 23 04 06 08 10 3.2 01 03 07 09 11 1/8" 5/32" 1/4" 5/16" 3/8" 4 6 8 10 Shuttle valve With One-touch fittings For 3.2, use 1/8" tubing. 5-7-5 63 Series VR1210F/1220F Example of Operating Circuit OR circuit Self-hold circuit Interlock circuit When either A or B is