Table of Contents

7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

7 No. q w e r t y u i o !

15

NY M2.5 x 10 1.0 M3 x 8 0.63 M4 x 10 1.5 8 7.5 19 M3 x 0.5 5.5 45 30 5 11 38 NX M2.5 x 10 1.0 M3 x 8 0.63 M4 x 10 1.5 8 4.5 19 M4 x 0.7 7.5 46 30 3.7 11 42 NM1 M3 x 5 0.63 M3 x 8 0.63 M4 x 10 1.5 5 11.8 19 3.4 7.0 31 28 3.5 8.5 42 NM2 M2.5 x 10 1.0 M3 x 8 0.63 M4 x 10 1.5 6 48 19 3.4 7.0 31 28 3.5 8.5 42 25 NZ M3 x 12 1.5 M4 x 12 1.5 M6 x 14 5.2 14 4.5 30 M5 x 0.8 8.5 70 50 4.6 13 60 NY

Table of Contents

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMG850 1 2 13 42 348 220 57.5 220 10 14-20-7 1 Please refer to pages 14-20-62 to 64 for specific product precautions.

Electric Actuator/Slider Type

(Refer to page 42.)

Rotary Actuator/Vane Type

q END w END q A B A B B A Switch for rotation END q Switch for rotation END q Switch for rotation END w Switch for rotation END w Auto switch B port A port * Solid-lined curves indicate the rotation range of the output shaft with single flat (key).

MGP

6e q u !4 w !7 !3 @0 !1 y !5 Component Parts Description Material Note Component Parts Description Material Note No. q w e r t y u i o !0 for piston rod for guide rod No. !1 !2 !3 !4 !5 !6 !7* !8* !

7

3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !

Miniature Fittings M3, R(PT) 1/8, M5 Series M

KFV-04 KFV-06 KFN-04 KFN-06 KFW-04 KFW-06 KFS-04 KFS-06 4/2.5 6/4 KFV-08U 8/5 KFV-08N 8/6 KFV-10U 10/6.5 KFV-10N 10/7.5 KFV-12U 12/8 KFV-12N 12/9 4 6 KFN-08 8 KFN-10 10 KFN-12 12 4/2.5 6/4 KFW-08U 8/5 KFW-08N 8/6 KFW-10U 10/6.5 KFW-10N 10/7.5 KFW-12U 12/8 KFW-12N 12/9 4 6 KFS-08 8 KFS-10 10 KFS-12 12 Precautions Be sure to read before handling.

ZQ-OM01401

ZQ-OM01401-B / / ZQA No.ZQ-OM01401-B 2 1. 5 2. 9 3. 11 3.1. 11 3.2. 12 3.3. 13 3.4. 14 3.5. 16 4. 17 5. 19 6. 20 7. 21 8. 28 9. 32 10. 35 11. 37 12. 40 13. 42 1 - No.ZQ-OM01401-B /ZQA *1) *2) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery

Battery-less

5 r t w q y !6 !

MGP

MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL CV P PA PB PW Q 25, 50, 75, 100 71 58 1.5 1.5 11 8 8.5 9 M5 x 0.8 12 13 15 M5 x 0.8 4.3 5.6 5.6 M5 x 0.8 Rc 1/8 Rc 1/8 40 10 16 18 26 64 83 93 8 9.5 9.5 19 8 10 12 M4 M5 M5 4.5 5.5 5.5 8 10 10 15 18 21 5 6 6 15 18 21 30 36 42 22 24 30 16 20 25 78 62 10.5 M5 x 0.8 M5 x 0.8

Electric Actuators

Positioning driver Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 Torque (Nm) 42 2.87 0.09 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 218 2 Phase Stepper Motor/Without

JA/JAH/JB/JS

49 50 59.5 66 79 96 96 1.25 2 2 2.5 3 3 15 18 21 24 29 29 1.25 2.5 2.8 5.2 9 9.3 9000 14000 22000 36000 55000 55000 43 52 60 73.5 86 86 11 14 18 18 22 22 16 16 20 22 24 28 32 32 41 46 55 70 RHC MK(2) Option: Heavy Load Type Hydraulic: Up to 7 MPa RS Q G JAHF63-24-200 JAHF80-30-200 JAHF100-42-300 63 80 100 60 73.5 86 24 30 42 2 2 3 106 131 152 100 125 150 72 82 100 66 79 96 21 24 29 24 38

JA/JAH/JB/JS

2.5 3 3 15 18 21 24 29 29 1.25 2.5 2.8 5.2 9 9.3 9000 14000 22000 36000 55000 55000 43 52 60 73.5 86 86 11 14 18 18 22 22 16 16 20 22 24 28 32 32 41 46 55 70 RHC MK(2) Option: Heavy Load Type Hydraulic: Up to 7 MPa RS Q G JAHF63-24-200 JAHF80-30-200 JAHF100-42-300 63 80 100 60 73.5 86 24 30 42 2 2 3 106 131 152 100 125 150 72 82 100 66 79 96 21 24 29 24 38 42 2 2.5 3 2.8 5.2 9 22000 36000

CJ2

Component Parts No. q w e r t y No. u i o !0 !

Auto Switch Guide

BA-10 BA -01 BA -02 BA -32 BA -04 BM2 -020 BM2 -025 BM2 -032 BM2 -040 BA -05 BA -06 BA -08 BA -10 BA01 BA02 BA32 BMA2-050 BMA2-063 BMA2 -020 BMA2 -025 BMA2 -032 BMA2 -040 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available.

VQ7-6/7-8

0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

Stability of suction position,

0 r r r o e e e e u u y w u u w t u w t y y y y w t q w t q t q q q Male thread (for direct mounting) With male thread adapter (Vacuum inlet: Vertical) With male thread adapter (Vacuum inlet: Lateral) With female thread adapter (Vacuum inlet: Vertical) With female thread adapter (Vacuum inlet: Lateral) Component Parts No.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

3 q e w t !2 !4 !3 e !0 q o Spring acting/Spring return/With auto switch (Built-in magnet) Single acting/Spring extend/With auto switch (Built-in magnet) 12, 16 !2 t w !4 y i !1 !3 e !0 q o t w !0 r q o i !1 !3 e 20, 25 w t !2 !4 !1 !3 e !0 q o w t !0 r o q !1 !3 e Component Parts Rod end nut No.