5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

16 17 12 13 14 15 16 (DIN rail dimension) (7.5) Manual override In case of locking type, ( turn after pushing in. ) 2-One-touch fitting (ports P, R) Applicable tube O.D.: 8 (L4) L3 8 U side D side 52.9 <53.6> 2n1-M5 x 0.8 (ports A, B) [46] [54.5] 22.5 1 4.1 32 5.5 P B B B B B B 4.7 35 44.4 <45.1> 10.2 23.5 26 3 R A A A A A A DIN rail (VZ1000-11-1-) G: Approx. 300 H: Approx. 600 [46] [54.5

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

M6 x 1.0 46 M8 x 1.25 x 16l M10 x 1.5 x 8l CXS32 11.5 10 9 19 20 M8 x 1.25 56 Dimensions by Stroke (mm) Symbol SS Z ZZ Stroke 10, 15, 20, 25 30, 35, 40, 45, 50 60, 70, 75, 80, 90, 100 30 10 16 20 25 30 35 40 45 50 60 70 80 75 90 100 10 15 20 25 30 35 40 45 50 60 70 80 75 90 100 Model CXS20 CXS25 CXS32 170 160 150 145 140 130 120 115 110 105 100 95 90 85 80 194 184 174 169 164 154 144 139

CG5-S

(Same side) A HS Number of switches 20 25 32 40 50 63 80 100 24 31.5 26 Mounting surface Port surface Port surface Port surface 24 31.5 28.5 25 32.5 33 28 37 36.5 36 45.5 42 36 45.5 48.5 Switch type 46 56 57.5 Minimum stroke (mm) 10 15 75 46 57 68 15 Water Resistant 2 Color Indication Solid State Switch Band Mount Type D-H7BAL Auto switch specifications D-H7BAL (with indicator light) Grommet

CJ5-S

12.5 9.5 46 74 16 15 18.3 18.3 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 R V Double clevis style (D): CJ5DS Piping port 2-M5 x 0.8 Clevis pin ( ) CDH9 + 0.030 0 Dd9 0.030 0.060 NB GA GB MM CA CB D NA A U BA S + Stroke BB H 0 0.3 CX + 0.2 + 0.1 R Z + Stroke ZZ + Stroke 0 0.3 CD (Cd) A BA BB CA CB CX D GA GB H MM NA NB R S U Z ZZ Bore size (mm) 10 15 15 12 17 14

CJ5-S

CX D GA GB H MM NA NB R S U Z ZZ Bore size (mm) 10 15 15 12 17 14 3.3 3.2 4 8 18 28 M4 x 0.7 12.5 22.5 5 46 8 82 87 16 15 18.3 18.3 20 20 5 6.5 5 8 23 28 M5 x 0.8 12.5 27.5 8 47 10 85 93 Clevis pin and snap ring are shipped together. 10-14-8 9 Stainless Steel Cylinder Series CJ5-S Accessory Dimensions Single Knuckle Joint Clevis Pin Knuckle Pin MM L ND hole H10 L l t t l t t m m R1 m m d

Rotary Table/

3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x 1.5 15 M6 x 1 M10 x 1 Rc1/8 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 Rc1/8 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25 12 55 45 5H9 5.5 33 5H9 5.5 18 Series MSQ Dimensions/Size 70, 100, 200 WB effective depth

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

) 1Ah 15 EX600-DM#E (8 inputs / 8 outputs) 1Ch 10 Digital I/O unit EX600-DM#F (8 inputs / 8 outputs) 1Eh 10 Analog input unit EX600-AXA (2 inputs) 20h 14 Analog output unit EX600-AYA (2 outputs) 22h 21 Analog I/O unit EX600-AMB (2 inputs / 2 outputs) 23h 32 EX600-LAB1 (Class A) 3Bh 46 IO-Link unit EX600-LBB1 (Class B) 3Ch 46 -94No.EX-OMX1011 EtherNet/IPTM configuration assembly The Configuration

Digital Flow Switch

ZS-46-B Panel mount adapter ZS-46-D Panel mount adapter + Front protection cover ZS-46-5L Power supply/output connection lead wire 5-core, 2 m ZS-27-01 Front protection cover B Panel mount adapter Connection Example ZS-46-B PFG300 Sensor connector D Panel mount adapter + Front protection cover PF3A7 H Power supply/output connection lead wire ZS-46-D Lead wire and M12 connector (Option for

MK

Refer to p.0-39 to 0-46 for Safety Instructions and actuator and auto switch precautions.

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, 1J, SS5YJ3 OTHER SIZE RATING, .66000 lb

Modular F.R.L. Unit

Page 14 1/8, 1/4, 3/8, 1/2, 3/4 Check valve Page 15 1/8, 1/4, 3/8 Prevents back flow from lubricator.

SY

16 17 18 19 20 235.5 225 202.5 16.5 14 15 16 17 12 13 248 237.5 213 17.5 L3 L4 SS5Y3-45FD-U .

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

However, the piston speed at this time should be adjusted to the minimum speed. 15 65 10 (n = 2, 4, 6 ) 65 + 50 (n 2) (n = 2, 3, 4, 5 ) 20 + 50 n 2 2 20 65 10 D-H7LF (n = 2, 4, 6 ) 15 + 50 n 2 2 D-B5 D-B6 15 75 10 (n = 2, 4, 6 ) Mounting 75 + 55 (n 2) (n = 2, 3, 4, 5 ) 20 + 50 n 2 2 Caution D-B59W 20 75 15 (n = 2, 4, 6 ) 1.

Modular F.R.L. Unit

E Port size Octagon C T-interface B Center of F.R.L. body A D Model Port size A B C D E Applicable model Y110-M5 M5 x 0.8 11 19 12 14 8 AC10, AC10B Y210-01 1/8 15 42 32 28 19 AC20, AC20B AC20C Y210-02 1/4 AC25, AC25B AC25C, AC30 AC30B, AC30C Y310-02 1/4 Y310-01 1/8 15 53 39 30 19 Y410-02 1/4 19 62 44 36 24 AC40, AC40B AC40C Y410-03 3/8 Caution in Mounting Y510-02 1/4 19 66 46 44 24 AC40-06

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

Refer to "Installation and Removal of Tubing" on page 15.)

Table of Contents

0 o VFS6000-15 VFS6000-15 NBR !2 VFS6000-8A !

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x 1.5 15 M6 x 1 M10 x 1 Rc 1/8 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 Rc 1/8 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25 12 55 45 5H9 5.5 33 5H9 5.5 11-9-21 22 Series MSQ Dimensions: Size 70, 100, 200 Basic

SQ1000/2000

COM COM 25 26 COM COM 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM 1 2 1 2 1 2 COM COM P kit Flat ribbon cable connector (for 26P) J kit Flat ribbon cable connector (20P) PC Wiring System compatible P kit Flat ribbon

CL

Minimum Stroke for Auto Switch Mounting (mm) No. of auto switches mounted 2 Different sides Auto switch model Same side n Different sides 1 Same side D-C7 D-C80 15 50 50 + 45 (n 2) 10 n 2 2 15 + 45 ( ) (n = 2, 4, 6) D-H7 D-H7W D-H7BAL D-H7NF 15 60 60 + 45 (n 2) 10 D-C73C D-C80C D-H7C n 2 2 15 + 50 ( ) (n = 2, 4, 6) 65 + 50 (n 2) 15 65 10 n 2 2 D-B5 D-B64 15 + 50 ( ) (n = 2, 4, 6) 15

Table of Contents

(C) 50 55 60 65 70 80 15 15 15 15 15 15 10 10 10 10 10 10 5 5 5 5 5 5 1.64 1.37 1.30 1.23 1.16 1.09 1.26 1.05 1.00 0.95 0.89 0.84 0.88 0.74 0.70 0.66 0.62 0.59 30 1.56 1.30 1.24 1.17 1.11 1.04 1.20 1.00 0.95 0.90 0.85 0.80 0.84 0.70 0.67 0.63 0.60 0.56 32 1.50 1.25 1.19 1.12 1.06 1.00 1.15 0.96 0.91 0.86 0.82 0.77 0.81 0.67 0.64 0.60 0.57 0.54 35 1.40 1.17 1.11 1.05 0.99 0.94 1.08 0.90 0.86