MGG

(mm) Q R X Y + Stroke Y Q R X Bore size (mm) 32 86 (94) 25 13 39 40 96 (105) 29 14 46 50 109 (121) 31 15 57 Dimensions inside ( ) are for long strokes.

2/3 Port Valve

Refer to p.4.1-14, 4.1-15 for specifications and models.

Speed Controller with One-touch Fitting

Connection Female Thread: G Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 45 3 to 4 1/4 15 to 30 4 to 5 3/8 15 to 30 8 to 9 1/2 15 to 30 14 to 15 Winding direction Sealant tape Expose approx. 1 thread 2. The gasket can be reused up to 6 to 10 times.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

J 5 12 9.5 Mounting reference planes B D Section AA MXP12-25 Without magnet and switch rail 2-M3 x 0.5 depth 3.5 For rail mounting 2-M2 x 0.4 depth 3 For magnet mounting 8 5.7 3.5 6-M4 x 0.7 depth 4.5 20 20 L (mm) Z MXP12-15 MXP12-25 SMXP12, #1 (#1 + #3) SMXP12, #2 (#2 + #4) L K J V H S G M W Model 24 22 68 59 40 15 76 10 29 55 MXP12-15 42 40 98 89 60 25 106 30 49 75 MXP12-25 11 Precision

ARM10/11

Handle position VY1 56 Handle position Top Handle position Front Handle position Bottom A B C Top Front Bottom 84 42 G 84 70 70 P 26(Max.28) U 12 S SMC SMC H L 12 SMC O C K PPA SMC 28.5 AL 6 51.5 80 51.5 15 13 OUT IN 3 28 13 15 13 OUT IN OUT IN 3 3 2. IN/OUT piping position 3. IN/OUT fitting type 5.

ARM10/11

Handle position VY1 56 Handle position Top Handle position Front Handle position Bottom A B C Top Front Bottom 84 42 G 84 70 70 P 26(Max.28) U 12 S SMC SMC H L 12 SMC O C K PPA SMC 28.5 AL 6 51.5 80 51.5 15 13 OUT IN 3 28 13 15 13 OUT IN OUT IN 3 3 2. IN/OUT piping position 3. IN/OUT fitting type 5.

VFR

Material Description Pilot valve assembly M8 x 80 VFS6000-15 VFR61 VFS6000-15 VFR62 M8 x 80 VFS6000-15 VFR63/64/65 NBR Hexagon socket head screw Gasket o M8 x 80 Refer to How to Order Pilot Valve Assembly on page 3-5-94. Steel !0 !

Brake mechanism added

100 9 71 77 30 10 16 16 299.5 29.5 85 117 227.5 15 15 15 0.1 0.3 +0.3 +0.1 0.032 0.059 12 +0.070 0 12 70 90 50 110 9 81 86 35 12 19 19 328.5 38 95 127 248.5 18 18 15 0.1 0.3 +0.3 +0.1 0.032 0.059 16 +0.070 0 15 86 105 59 130 11.5 101 107 40 16 23 23 352 49 110 148 263 25 25 18 0.1 0.3 +0.3 +0.1 0.032 0.059 20 +0.084 0 18 102 130 76 160 13.5 119 126 48 20 28 28 403 61 140 192 297 31.5 31.5

VP300/500/700

7.4 9.0 7.5/7.7 8.8/9.3 12 14 14/14 15/16 Cv 0.86 0.88 0.80/0.86 1.0/1.0 2.0 2.4 1.9/2.1 2.3/2.4 3.1 3.8 3.5/3.5 3.8/4.0 C [dm3/(sbar)] 2.9 3.2 2.9/3.0 2.7/3.6 6.9 8.8 7.9/7.4 9.2/8.8 12 15 14/13 15/15 Cv 0.83 0.92 0.83/0.83 0.86/0.88 1.7 2.2 1.9/1.8 2.1/2.0 3.1 3.7 3.2/3.2 3.6/3.7 C [dm3/(sbar)] 3.5 4.4 3.5/3.5 4.1/3.9 7.5 9.3 7.4/7.3 9.2/9.1 13 16 14/14 15/15 Cv 0.93 1.1 0.89/0.89 1.0/

Stroke Reading Cylinder and Counter

Minimum Auto Switch Mounting Stroke (mm) D-A9V D-A7 D-A80 D-A73C D-A80C D-F7W D-J79W D-F7BA D-F79F D-F7NT D-M9WV D-M9AV D-F7WV D-F7BAVL D-M9V D-F7V D-J79C D-M9 D-F7 D-J79 No. of auto switches mounted D-M9W D-M9A D-A7H D-A80H D-A79W D-A9 10 (5) 15 (10) 15 (5) 1 pc. 5 5 10 15 (5) 15 20 (10) 10 15 15 (10) 2 pcs. 5 10 15 15 (5) 20 20 (15) Note) The dimensions stated in ( ) shows the minimum stroke

RSQ

7 24.5 25.5 31.5 28 31 27 17 11 21 15 20 14 18 12 18.5 12.5 15.5 9.5 31.5 32.5 38.5 35 38 34 27 29 26.5 21.5 11 25.5 15 24.5 14 22.5 12 23 12.5 20 9.5 35 36 42 38.5 41.5 37.5 30.5 32.5 30 29.5 4.5 33.5 8.5 32.5 7.5 30.5 5.5 31 6 28 3 41 42 48 44.5 47.5 43.5 36.5 38.5 36 10-8-13 14 Series RSQ Operating Range Bore size (mm) 12 Auto switch model 16 20 32 40 50 D-A7/A80 10 12 11 12 12 D-A7H

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Manifold Specifications for 41 and 42 Type Manifold Specifications for 41 and 42 Type SS5Y5-41 SS5Y5-42 SS5Y7-42 Port size Flow characteristics Model 52-SY740 52-SY540 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) 1,5,3 Model Applicable valve 4,2 (A,B) (P ,EA,EB) b Cv c[dm3/(sbar)] c[dm3/(sbar)] Single base / B mounting Manifold style b Cv SS5Y5-41 1 (SUP) / 3/5 (EXH) Common SUP / Common EXH 1/4

MB1

Port Cushion valve Bore size (mm) Double clevis type/(D) Z ZZ CDH10 32 40 50, 63 80, 100 160 164 190 238 170.5 175 205 261 Double clevis type U Bore size (mm) Stroke range CDH10 CX +0.3 +0.1 CZ L RR U Z ZZ L Z + Stroke RR CX 32 40 50 63 80 100 to 500 to 500 to 600 to 600 to 750 to 750 23 23 30 30 42 42 10.5 11 15 15 23 23 13 13 17 17 26 26 28 28 40 40 60 60 154 158 182 182 228 228 164.5

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Vibration resistance VQ Model VQ4 (1) (2) (3) Weight (g) Response time (ms) Effective area (mm2)(Cv) Standard: 1W High pressure: 1.5W High pressure: 1W Low wattage and AC 2.7 (0.15) Series Configuration Model VQZ Metal seal VQZ1120 12 or less 15 or less 42 Single Rubber seal 5.4 (0.3) VQZ1121 12 or less 15 or less VQD 2 position Metal seal 2.7 (0.15) VQZ1220 10 or less 13 or less Double Rubber

PA300/500/700

/15 3.4 3.7 0.34 0.27 0.86 0.88 2.9 3.2 2.9/3.0 2.7/3.6 6.9 8.8 7.9/7.4 9.2/8.8 12 15 14/13 15/15 0.38 0.28 0.37/0.37 0.25/0.23 0.42 0.43 0.35/0.32 0.22/0.21 0.36 0.29 0.25/0.24 0.22/0.24 0.47 0.40 0.38/0.40 0.57/0.21 0.34 0.36 0.30/0.26 0.17/0.14 0.31 0.22 0.25/0.24 0.24/0.23 1/8 1/4 1/8 1/4 1/4 3/8 1/4 3/8 3/8 1/2 3/8 1/2 0.12 Series VPA300 2.9/2.9 0.27/0.33 0.29/0.41 0.31/0.30 0.31/0.25

CG5-S

30 153 CG-E020SUS 9 83 13 25 8 137 146 7 9 2 14 30 27.6 21 3 56.5 42 30 158 CG-E020SUS 9 83 13 32 10 141 7 11 4 22 40 38.4 29 4 70.5 56 40 170 152 CG-E032SUS 11 85 15 40 10 159 7 11 4 22 40 38.4 29 4 70.5 56 40 188 170 CG-E032SUS 11 93 15 50 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 15 109 21 63 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 15 109 21 80

44

10 15 15 19 20 25 28 39 42 52 48 51 61 1/8" (3.18) 0.086" (2.18) Applicable tubing 1.1 10 8 13.5 5 1.5 L1 M KDM 0.098" (2.5) 5/32" (4) H1 1.6 10 8 13.5 5 1.8 d KB 1/4" (6.35) 5/32" (3.95) 6 10 3.3 12 15.2 6 A L2 12 KR H2 0.236" (6) 5/16" (8) 12 14 17.4 6.6 5.3 Connection thread 16 KA 13 3/8" (9.53) 1/4" (6.35) 15 17 20.4 7.6 5.6 18 30 KQG2 1/2" (12.7) 3/8" (9.53) KG 17 19 23.3 8.5 8.5 40

MHZ2/MHZJ2

Dimension table Unit: mm Model A B D2 E D1 -0.016 -0.043 12f8 15 7 11 52.8 MHZ2-10 -0.016 -0.043 16f8 20 10 15 58.7 MHZ2-16 -0.020 -0.053 20f8 22 12 19 70.5 MHZ2-20 -0.020 -0.053 25f8 25 15 24 82.9 MHZ2-25 Other dimensions and specifications correspond to the standard type.

AC Servo Motor Driver (SSCNET /H Type)

Parameter list (Driver side) 15 6.

Auto Switch Guide

(Red Green Red) D-B59W D-A79W D-A59W D-H7NW/H7PW/H7BW D-G59W/G5PW/K59W D-F79W/F7PW/J79W D-F7NWV/F7BWV D-F59W/F5PW/J59W D-F9NW/F9PW/F9BW D-F9NWV/F9PWV/F9BWV D-Y7NW/Y7PW/Y7BW Band Grommet 9-15-23 Solid state switch Reed switch Rail Grommet 9-15-24 Tie-rod Grommet 9-15-25 2-color indication 9-15-42 Band Grommet CL 9-15-43 9-15-44 Rail Grommet CL1 9-15-45 Tie-rod Grommet 9-15-46 MLGC 9-15-47