Vacuum

Flat wlth rib 1 0 1 2 21 29.946 5 6 1 . 7 1 3 1 5 't2 21 29.946 5 6 3 1 . 8 '19 20 1 6 1 8 12.5 215t301 46.S 5 3.5 Dep type 23 23 22 23 23 22 50 48 50 Applicable Tube 56 54 56 54 57 co 57 '5l3e" lube may be subslituled for 4mm.

฀AS

AS1002F-02 AS1002F-23 AS1002F-04 AS1002F-06 AS2002F-04 AS2002F-06 AS2052F-06 AS2052F-08 AS3002F-06 AS3002F-08 AS3002F-10 AS3002F-12 AS4002F-10 AS4002F-12 AS-31B AS-32B AS-33B AS-34B AS-35B AS-36B AS-37B AS-38B AS-41B AS-42B AS-43B AS-44B AS-45B AS-46B AS-47B AS-48B AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11

44

17 21 44.8 39.4 7.6 18 M M L2 KM 21 17 21 48.1 41.7 8.5 19 L1 27 22 27 52.3 45.9 9.3 25 KF M Union Elbow: KFG2L H/DL L/LL Applicable tubing size (mm) O.D.

NCA1

Stop Tube 21 Options Auto Switch Options 22 Table of Thread Form Codes / XA Options 22 Option XC3 Port and Cushion Location 23 Construction / Parts List / Seal Kit 23 Accessories Eye Brackets, Clevis Brackets, Rod Clevises, Rod Eyes, Pin, 24 Alignment Couplers, Rod Jam Nut Air Cylinder Expanded Series NCA1 Air Cylinder Series NCA1-EX MATERIAL SPECIFICATIONS MEDIUM DUTY XTAT Bore Size 5 6

Air Cylinder NCA1 Series

Stop Tube 21 Options Auto Switch Options 22 Table of Thread Form Codes / XA Options 22 Option XC3 Port and Cushion Location 23 Construction / Parts List / Seal Kit 23 Accessories Eye Brackets, Clevis Brackets, Rod Clevises, Rod Eyes, Pin, 24 Alignment Couplers, Rod Jam Nut Air Cylinder Expanded Series NCA1 Air Cylinder Series NCA1-EX MATERIAL SPECIFICATIONS MEDIUM DUTY XTAT Bore Size 5

HRX-OM-W032

Fig. 3-11 Wiring of the external switch (PNP open collector output) (example) HRS Series 3.3 Installation 3-21 HRX-OM-W032 Chapter 3 Transport and Setting Up Setting items Table 3-9 shows the setting items of the external switch. For details, refer to 5.21 Communication Function.

EXxx-OMY0006CN

-2 iAddValue (hex) 03F2 iPar_CRC i03FD PST_Device_ID 104 No.EX##-OMY0006CN 21.E SI / Checklist / EX245-FPS1 HW/SW 01/1.1.1 2021 1 29 No.

4-channel Flow Monitor ( compatible)

CH4 measurement display value 22 Display OFF (No display) : Settable : Not settable (negative acknowledge) -87No.PF-OMA1011-A [Line name communication data] Value (16 Hex number) 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F 7seg Display letter 11seg Value (16 Hex number) 10 11 12 13 14 15 16 17 18 19 1A 1B 1C 1D 1E 1F 7seg Display letter 11seg Value (16 Hex number) 20 21 22 23 24

MY1

(Refer to page 21 for details.)

Industrial Filters

29 14 21 29 11.5 18.5 26 Note 1) Cannot be used with gases.

PFxx-OMO0004CN

21 2x G1/4 -77No.PF-OMO0004CN-E PFMB7201S-F02L 2x G1/4 21 -78No.PF-OMO0004CN-E PFMB7201-C8 2x -79No.PF-OMO0004CN-E PFM7B7201-C8L 2x -80No.PF-OMO0004CN-E PFMB7201S-C8 2x -81No.PF-OMO0004CN-E PFMB7201S-C8L 2x -82No.PF-OMO0004CN-E (ZS-33-F) A 54 +0.5 0 74 +0.5 0 13.2 mm 1, -83No.PF-OMO0004CN-E (ZS-33-M) (ZS-33-MS) (ZS-33-D) -84No.PF-OMO0004CN-E Revision history A B C [2016 9 ] D

Compact Manifold Regulator

10 11 12 19 20 21 22 23 24 26 27 28 29 30 31 33 34 35 36 37 38 57 58 59 60 61 62 69 70 71 72 73 74 76 77 78 79 80 81 83 84 85 86 87 88 Note) When the knob and the OUT piping are located on the same side, the elbow fitting is directed to the rear side (DIN rail side).

Compact manifold regulator ARM5 Series

L dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No.

CEx-OMI0064

No. 1 2 3 4 5 1 17 2 18 3 19 4 20 5 21 6 22 7 23 8 24 9 25 10 26 11 27 12 28 13 29 14 30 15 31 16 OUT 15 5 ()131, OFF(0) PLC ON , 31No.2131, 7-3-5 (1)No.131 (,No. 2131 , ) (2)OUT 15 LCD _ (3)/,(A )(B )-9 +9 ,A B -9+9 (4),23 0 ,, 21 - 7-3-6 LCD COMPARE,ON +,ON ,OFF ,OFF () () () () (+) (+) () () (-) () () (-) LCD 1SHOT,100ms +, ON 100ms ON () () () () () (+) () (+) () (-) () (

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

(Refer to page 21 for details.)

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

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MY1

26 32 NE 64 80 96 NH 28 37 48 Bore size (mm) 25 32 40 09 11 14 09.5 16.0 15.0 120 150 180 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 PA 060 080 100 NW 60 74 94 P PB 112 134 150 PG 7 8 9 PP1 12.7 15.5 17.5 PP2 12.7 18.5 20 Q 206 264 322 QQ 16 16 26 QW 46 60 72 RR1 18.9 22.0 RR2 17.9 24.0 SS 5.1 4.0 9.0 TT 15.5 21.0 26.0 UU 16 16 21 VV 16 19 23 W 122 144 160 WW 11 13 20 YW 070 088 104 Z 240

o

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o

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air-filter-e

Specifications 5 Model 7 Note2) FGGLD Note 1) FGGLC Note 1) FGGLB Note 1) FGGSD Note 1) FGGSC Note 1) FGGSB Note 1) Number of elements 14 65 x L250 7 Note2) 21 65 x L250 7 Note2) 28 65 x L250 Stainless steel 304 Stainless steel 304 28 65 x L250 7 Note2) 14 65 x L250 7 Note2) 21 65 x L250 7 Note2) 65 x L500 65 x L750 65 x L1000 65 x L500 65 x L750 65 x L1000 Element size Cover Case O-ring