Modular F.R.L. Unit

-20 IS1000M-30 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 IS1000M-60 IS1000M-60 Y21001 (02) Y310-(01) 02 Y310-(01) 02 Y410-(02) 03 Y510-(02) 03 Y61003 (04) 06 (10) Y610(03) 04 (03) 04 Y610Note 5) Note 6) VHS40-06 02 03 04 E600VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50Note 6) E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 Note 6) 06 10 06 10 E60006 10 E600E100-M5 02 03 04

ZP

Applicable for the ZP series adapter How to Order ZP2 03 U N Pad unit Pad diameter Pad material Symbol Pad diameter Blast type Symbol Material NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber 03 B04 05 06 B06 07 B08 N S U F GN GS 3 4 5 6 6 7 8 Blast type: Work pieces can be removed easily.

5 Port Air Operated Valve

AXT620-32-1 (M4 x 48, With spring washer) For mounting valve M4: 1.4 Nm 1509 VFA3000/5000 Series Dimensions: VFA3000 Series/Base Mounted 2 position single VFA3140(-P) 02 03 2 position double VFA3240(-P) 02 03 28 33 28 33 1/4, 3/8 [4 (A), 2 (B) port] 1/4, 3/8 [4 (A), 2 (B) port] 13 13 22 22 1/8 (Pilot port: Upward) 81 1/8 (Pilot port: Upward) 46 20 36 36 20 46 4A 2B 4A 2B 26.4 26.4 35 42

VQ5000

U D U D Kit/Electrical entry/Cable length F L Cylinder port kit (D-sub connector) kit (Lead wire cable) 03 04 B CM Rc 3/8 Rc 1/2 Bottom ported Rc 1/2 Mixed Note) Note)In case of mixed specification, indicate on the manifold specification sheet. .

125

-03 04 AS420-03 AN30-03 12 x 1 m D AS420-04 AN40-04 SGP15A x 1 m 1723 3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air operated Pilot solenoid VEX3 B 12 0 01 1 Air operated VEX3 D B 5 1 12 2 01 Pilot solenoid Operation type Option 1 External pilot solenoid 2 Internal pilot solenoid Nil None Thread type Nil Rc F G N NPT T NPTF Body size Port size B Bracket (VEX312 only) Body

One-touch Fittings Series KQ2

L D A M Nylon Urethane 3.2 KQ2R23-04 KQ2R04-06 4 6 2 2.1 9.6 33.5 34.5 3.4 2.9 18.5 17.5 15.5 10.4 4 KQ2R04-08 36.5 5.6 5.6 2.3 8 18 16 KQ2R04-10 12.8 39.5 3.6 10 18.5 KQ2R06-04 4 3 12.8 37 4 4 21 6 KQ2R06-08 37 3 8 18.5 17 KQ2R06-10 12.8 39.5 13.1 13.1 3.5 10 18.5 KQ2R06-12 42 15.2 5.2 12 20 8 KQ2R08-10 15.2 41 26.1 18.0 4.5 10 20 18.5 KQ2R08-12 42 5.1 12 12 KQ2R10-12 17 42 41.5 32.8 33

7ND9071en

When ordering spare parts, always include the following information: Valve controller type designation and serial number from the ID plate The code of this manual, the part number, the part name and quantity required 42 7 ND90 71 en 12 DRAWINGS AND PARTS LISTS 12.1 Exploded view ND9100, ND9400, ND7100 100 107 110 109 228 39 223 217 219 42 218 215 220 210 44 19 43 18 139 11 120 47 49 222

MQQ

Dimensions Foot type/MQMLL 6 25 14 33 42 18.5 6 9 2.3 2-5.5 66 + Stroke 75 + Stroke 93.5 + Stroke 10, 16, 20, 25 LY LH X X Y Y 4-LC S + Stroke LS + Stroke ZZ + Stroke LX LZ Z LT (mm) Bore size (mm) LS LC LT LH LX LY S Z LZ ZZ Y X 5.5 83 2.3 14 33 25 65 19 42 108 9 6 10 5.5 92 2.3 18 42 30 74 21 54 119 9 6 16 6.8 137.5 3.2 25 40 40 97.5 20.5 55 166 20 8 20 6.8 142.5 3.2 28 40 47 102.5 24.5

Electric Actuators

Positioning driver Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 Torque (Nm) 42 2.87 0.09 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 218 2 Phase Stepper Motor/Without

PA300/500/700

Note Symbol 1P Common Common 3R Common Individual 1 Type 41 Type 42 VHS 3 VV3PA3-42-053-02 Stations 02 2 stations ... ... 20 20 stations To order valves and blank plate assembly mounted onto the manifold, list valves and blanking plate assembly with manifold base part number.

VP300/500/700

Applicable manifold base model VP300-25-1A VV3P3 Blanking plate assembly (With gasket and mounting screw) VP700-25-1A VV3P7 VP500-25-1A VV3P5 How to Order VV3P 1 04 41 02 3 Series VP 3 port solenoid valve Manifold Thread type Nil F N T Rc G NPT NPTF VV3P5-42-053-03 Body size standard 3 5 standard 1 4 3 8 standard 7 1 2 Port size Symbol Port size 02 03 04 Applicable manifold base model 1 4

VFS

04 03 04 q Description No.

Digital Flow Switches

-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2003 SMC CORPORATION All Rights Reserved 1st printing June, 2003 D-YGA P-120 (YG) This catalog is printed on recycled paper with concern for the global environment.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Rod End Nut Material: Rolled steel 03 32 01 03 TZ Applicable bore (mm) Applicable pin O.D. Part no. TU TV TW TX TY 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.050 0.093 0.050 0.093 0.050 0.093 0.065 0.117 Part no.

Digital Flow Switches, Series PF2A, Series PF2W

to 200l/min 50 to 500l/min 10 50 11 21 51 Output specification Nil 1 2 Output for display unit Thread type Output for display unit + analog output (1 to 5V) Output for display unit + analog output (4 to 20mA) Nil N F Rc NPT G Wiring specification Nil N 3m lead wire with connector Without lead wire Port size Applicable models Flow rate (l/min) Port size Symbol 100 200 500 50 10 01 02 03

PF2A/PF2W

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size Applicable model Flow rate (l/min) Output specifications ZSP Symbol Output specifications Applicable model Symbol 100 200 500 50 10 PF2A710, PF2A750 PF2A711, PF2A721, PF2A751 01 02 03 04 1/8 1/4 3/8 1/2 27 NPN open collector 2 outputs PF2A710

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

21.7 21.7 Screw-in connection S type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL

MNB

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing January, 1998 D-SMC.L.A. P-76 (M)

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

10 21 18.5 80 76 21.3 54.8 AS321F-02-12ST AS321F-N02-09ST 18.5 1.5 49.3 5/16" 15.2 29.5 41 NPT1/4 19 23 9.5 32.8 44.3 12 22 20.9 82 80 AS321F-03-06ST AS321F-N02-11ST 21 3/8" 17.9 31.8 43.3 27.8 39.3 6 17 12.8 77 77 AS321F-03-08ST AS321F-N03-07ST 17 1/4" 13.2 27.8 39.3 29.5 41 8 18.5 15.2 79 R3/8 19 23 9.5 1.5 47.4 19.8 52.6 79 19.8 52.6 AS321F-03-10ST AS321F-N03-09ST 18.5 1.5 47.4 5/16" 15.2

VM

-02/03 3 (Exhaust center) Rc 1/4: 17 VH302-02/03 VH312-02/03 2 (Position) 1 (P) 3 (R) 2 1 VH3 0.71 1/4, 3/8 VH320-02/03 VH330-02/03 3 (Closed center) Rc 3/8: 20 Exhaust center VH321-02/03 VH331-02/03 3 (Exhaust center) (A) 2 (B) 4 VH322-02/03 VH332-02/03 2 (Position) 12 3 4 VH400-02 to 06 VH410-02 to 06 3 (Closed center) 1 (P) 3 (R) Rc 1/4: 45 4 3 VH401-02 to 06 VH411-02 to 06 3 (Exhaust