Speed Controller with Indicator

7 w Meter-in type Meter-out type Component Parts No.

Modular F.R.L. Unit

7 7 Q 2 2.3 2.3 2.3 2.3 2.3 3.2 3.2 S 18 25 26 31 35.5 37 T 18.5 28.5 32.5 38.5 42.5 42.5 U 14 16 19 21 21 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 AR10 AR20 AR25 AR30 AR40 AR40-06 AR50 AR60 0 3.5 3.5 3 3.3 3.3 Note) For AR20 only, the position of the pressure gauge is above the piping center. 40 Regulator AR20 to 60 Made to Order Specifications Made to Order

Environment

0 #3 #4 #3 #2 #1 @7 !6 o !7 !8 y t q w e r i u @2 #6 #5 When rod end male thread selected Component Parts No. Description Material Note 1 Body Aluminum alloy Anodized No.

0.5

NT B1 21 Model Model 21 For IZF21 31 For IZF31 21 For IZF21 31 For IZF31 : 4 retaining bolts are included.

HRX-OM-X071

Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm Buzzer Stop . 7-3 7.3 Troubleshooting . 7-4 7.3.1 Alarm contents, causes, and troubleshooting . 7-4 7.4 Other Errors . 7-6 Chapter 8 Control, Inspection, Exchange and Cleaning . 8-1 8.1 Quality Control of Circulating Fluid and Facility Water . 8-1 8.2 Inspection, exchange, cleaning . 8-2 8.2.1 Daily check

RHC

51 6 7 16 14.5 10 32 18 8 20 Up to 700 19.5 6 49.5 56.5 70 44 27 53 9 7 16 18 12 36 22 8 25 Up to 700 19.5 6 51.5 55 72 50 33 55 9 7 19 18 12 44 22 9 32 Up to 1000 21 8 51.5 56 84 60 36 66 9 9 21 20.5 16 53 24 11 40 Up to 1000 WH ZZ P 1/4 S NN ND NF NE K NC JD NB JC NA I N H MM Bore size (mm) 252 192 M22 x 1.5 15.0 13 33.5 5 5.5 30.5 30 43 26 26 22 44 M8 x 1.25 20 1/4 5.8 to 8.8 257 193

CLQ

Joints 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 K ( across flats) 12 9 32 11 42 14.5, depth 8.5 YB-05 50, 63 H (with locking) 16 11 38 13 52 18, depth 12 YB-08 80 d2 d1 19 14 50 17 62 21, depth 14 YB-10 100 L UT Weight (g) Bore size (mm) C UA RS W T1 T2 V Part no. (mm) 9 50 18 6.5 10 YB-03 32, 40 80 UA C d1 d2 H K L UT Weight (g) Part no.

MTS

7 q e @0 !0 o @2 @3 !5 u t !8 @1 r @4 w MX MTS MY 12 to 40 CY @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !

PSxx-OMT0001CN

0.4MPapsi 0.4MPapsi 5 10 N 1 2 3 4 5 6 1 2 NPN2 PNP2 P 6 10 3 4 0.2MPapsi 0.2MPapsi 10 7 4 5 6 M SI 5 8 10 1 7 L 7 L N S 6 7 8 R 6 7 8 2 T 9 B -9No.PS-OMT0001CN-E 2 1F 2GH 3ISO1179-1 4 5kPa 61 7 8M12 9 10 11 12ISO16030 -10No.PS-OMT0001CN-E 2 / (2 2 2 1 ) ((3x8)3 ) ISA-16 ISA-14 2 ISA-16-2 3 ISA-16-3 4 ISA-16-4 5 ISA-16-5 6 ISA-16-6 ZS-31-B ZS-31-C 4 6

MK

7 6 7 17 Mounting Bracket Part No.

Series 10-, 21- AW-B Filter Regulator

-06-B 10-/21-AW60K-B 142.1 174.1 176.1 261.1 93.9 122.1 154.1 156.1 241.1 91.4 Dimensions B B B B Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount Q R S T U V W Y Z F J K BB CC H J M N 10-/21-AW20K-B 10-/21-AW30K-B 10-/21-AW40K-B 10-/21-AW40K-06-B 10-/21-AW60K-B P1 P2 A B C Note) D E 6 7 7 7 14 19 21 21 28.5 38.5 42.5 42.5

Compact Cylinder with Lock Series CLQ

Joints 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 K ( across flats) 12 9 32 11 42 14.5, depth 8.5 YB-05 50, 63 H (with locking) 16 11 38 13 52 18, depth 12 YB-08 80 d2 d1 19 14 50 17 62 21, depth 14 YB-10 100 L UT Weight (g) Bore size (mm) C UA RS W T1 T2 V Part no. (mm) 9 50 18 6.5 10 YB-03 32, 40 80 UA C d1 d2 H K L UT Weight (g) Part no.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

to 7 Refer to the page 68 for dimensions with connector cable.

HRX-OM-S004

Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water . 7-1 7.2 Inspection and Cleaning . 7-2 7.2.1 Daily check . 7-2 7.2.2 Monthly check . 7-3 7.2.3 Inspection every 3 months . 7-4 7.2.4 Inspection every 6 months . 7-6 7.2.5 Inspection during winter season . 7-7 7.3 Consumables . 7-7 7.4 Operation Stop for an Extended Period of Time . 7-8 7.4.1

ASR

7 !7 !4 !1 !6 !6 !8 !8 AS w q w q ASP @0 e @0 e ASN @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 AQ i ASV ASQ530F-02 type ASQ630F-03 type ASQ530F-02 type ASQ630F-03 type y !5 !3 y u AK !5 !7 !7 ASS !4 !1 !2 !4 !1 !8 !8 ASR !6 !6 ASF t q t q @0 r @0 r @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 Component Parts Note Material Note Description Description Material No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

10.5 10 HC 31 38 43 54 66 HP 17 24 23.5 29 36 HR 30 36 41 51 62 HS 8.5 7.5 6.5 7 8 K 14 11 15 13 15 B 8 9.5 9.5 11 11 HT 17 24 23.5 29 36 J x E M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 C 4.2 5.2 5.2 6.5 6.5 HB 17 21 23.5 29 36 CB 2 3 3 3 5 CR 0.5 1 1 1.5 2 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

45.8 6.5 8 53 2.3 31.1 38.5 19 7 1/4, 3/8, 1/2 3.5 33.8 1/8 28.9 70 10.5 91.7 44 35.8 70.8 M42 x 1.5 50 33.8 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 3/4 3 33.8 1/8 30.4 75 8 93.2 44 35.8 70.8 M42 x 1.5 50 33.8 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 3/4, 1 3.2 43.3 1/8 40 90 7 125.2 44 43 80.3 70 43.3 66 65.8 11 13 90 3.2 1 3.2 43.3 1/8 44.5 95 4.5 129.6 44 46 80.3 70 43.3 66 65.8 11 13 90 3.2

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

18 ( ) ( + ) Gray None 5 stations 10 23 11 SOL.A 6 ( ) ( + ) Pink None 24 12 SOL.B 19 ( ) ( + ) Orange Black 6 stations 25 Stations are counted starting from the first station on the D side. 13 SOL.A 7 ( ) ( + ) Blue None SOL.B 20 ( ) ( + ) Red White 7 stations SOL.A 8 ( ) ( + ) Purple White SOL.B 21 ( ) ( + ) Brown White 8 stations SOL.A 9 ( ) ( + ) Gray Black Connector terminal

JXCx-OMT0061CN

CN1: . 21 6.1 . 21 6.2 . 21 6.3 . 22 (1) (C24V,M24V,0V) . 22 (2) (EMG) . 22 1 - (3) (BL RLS) . 22 6.4 . 23 1 . 23 2 . 24 3() . 25 7. CN5: . 26 7.1 . 26 7.2 . 26 7.3 . 27 8.

Guide Cylinder Series MGG

7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.