Square Tube Type Air Cylinder Series MB1

8 1/4 1/4 3/8 3/8 1/2 26.5 26.5 31 31 37.5 37.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M6 x 1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 4 4 5 5 5 5 to 500 to 500 to 600 to 600 to 750 to 750 19.5 27 32 32 37 37 12.2 14.2 19 19 23 27 18

Clamp Cylinder with Lock Series CLK1

Unclamp side lock (F) 3-Rc 1/4 Clamp side port 3-Rc 1/4 Unclamp side port 52 N L + Stroke Rear cushion valve Top width across flats 3 4-M6 x 1 Thread depth 12 17 1010 GA W GB 45 45 14 30 BX M 3 25 43 IA BY Max.Wc 40 30 D 13 35 36 Ws Width across flats K Width across flats 44 0.050 0.093 +0.027 0 +0.3 0 +0.4 0 Shaft: 12d9 F Clevis width CLK1A: 16.5 R15 Hole: 12H8 CLK1B: 19.5 S + Stroke 27

CE2

58 0 235.5 3/8 175.5 312.5 30 M18 x 1.5 1/4 66 11.2 52 326 58 0 254 3/8 187 334 31 M18 x 1.5 stroke 80 12.5 65 372 71 0 284 1/2 205 37 381 M22 x 1.5 81 14 65 389 72 0 300 1/2 214 398 40 M26 x 1.5 Foot style LS + Stroke ZZ + Stroke LD ZZ Y X LX LS LH B Bore size (mm) 40 50 63 80 100 9 309.5 13 27 42 272.5 40 58.5 9 333.5 13 27 50 289.5 45 68.5 11.5 362 16 34 59 322 50 83 13.5 415 16 44 76

5 Port Air Operated Valve

35 42 A B A B 3EB 1P 5EA 3EB 1P 5EA 2 x 4.3 2 x 4.3 (For mounting) (For mounting) 15 66 88.5 1/8 [Pilot port: Lateral (-P)] 88.5 1/8 [Pilot port: Lateral (-P)] 64.5 64.5 63.5 Breathing hole Breathing hole 27 27 22 22 13 13 1/4, 3/8 [1 (P), 5 (EA), 3 (EB) port] 25 25 25 25 1/4, 3/8 [1 (P), 5 (EA), 3 (EB) port] 43 43 81 81 3 position closed center/exhaust center/pressure center VFA3 40(-P)

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

Table of Contents

P611070-1 P611090-1 P611060-1 P611080-1 P612010-1 P611010-1 P611070-1 P611090-1 P611060-1 P611080-1 P612010-1 P411020-1 P411030-1 P411040-1 P411050-1 Series Vane type Unit part no.

Integrated Controller

Description Material Note 24 Return plate Aluminum alloy Coating 25 Cover plate Aluminum alloy Anodized 26 Table spacer Aluminum alloy Anodized 27 Belt Replacement Parts (Right/Left side parallel only)/Belt No. Size Order no. 16 LE-D-6-5 25 LE-D-15-1 32 LE-D-19-1 40 LE-D-19-2 27 Replacement Parts/Grease Pack Applied portion Order no.

ZQ-OM01401

RL a 2 0.54~0.66Nm) 1 Ass'y P.27 1 2 L POM,POM,PET,SUS 3 R POM,POM,PET,SUS 4 () (PET) P.27 2 5 Assy PBT P.27 3 6 Assy () P.27 7 7 NBR P.27 4 8 NBR P.27 5 9 Ass'y P.27 6 26 - No.ZQ-OM01401-B 7.4 1 Ass'y2 ) ZQ1-SR1-04-A (1) 01 1 (1) 02 2 08 8 2 () (2 ) ZQ1-SE2-A 3 Assy (2 ) ZQ1-SC1-A 4 (10 ) ZQ-3-005-10AS 5 (10 ) ZQ-3-009-10AS 6 Assy (4 ) ZQ1-WS3-A (1) 3 M3 () (1) 4 M4 ()

SMC

(The vacuum pressure will be approximately -27 kPa at around 1 m from the vacuum suction port.) Please consult SMC for further details.

CE

9 #0 w #1 #0 t q @9 e #1 @1 !9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

Compact

1 u 1 i 1 !

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Qty. 1 1 2 2 2 2 4 2 !4 !

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !

1

Mounting bracket Minimum order quantity Bore size [mm] Contents 20 25 32 40 Mounting nut (M5, Rc1/8, NPT1/8) *1 1 JSN-020B JSN-032B JSN-040B 1 mounting nut Rod end nut 1 NT-02 NT-03 NT-04 1 rod end nut * Refer to page 10 for dimensions. *1 Can be used for M and MZ only.

Air Cylinder Series MB

27 31.5 31.5 38 38 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 135 139 156 156 190 190 to 500 to 500 to 600 to 600 to 800 to 800 19.5 27 32 32 37 37 10 14 18 18 22 26 With rod boot (mm) f l 901 to 1000 h Bore size (mm) e 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 801 to

IZ-OMU0031-CN

-2No.IZ*-OMU0031 1 1.5 3) 3) 1 1 () [] -3No.IZ*-OMU0031 () () () () -4No.IZ*-OMU0031 () * UL * FG * 6 33 () () 10 m 10mm DC(-)() -5No.IZ*-OMU0031 UL1310 2 UL1585 2 UL * () CE 050 * 2030 1 LCD 33OFF * -6No.IZ*-OMU0031 IZE11 3 C 2 A B C + 1 L 0 NPN2+15V 1 NPN2+420mA 2 PNP2+15V 3 PNP2+420mA / ZS-28-A 2 m ZS-28-B M3X5 L (2 ) ZS-28-C 1 ZS-27-C M3X8 L(2) + ZS-27-D M3X8

CP95

8 13 M6 x 1 6 10 27 16 94 4 4 4 6.5 26 146 190 46 32.5 15 4 M12 x 1.25 40 24 35 16 G 1/4 14 M6 x 1 6.5 13 27 16 105 4 4 4 9 30 163 213 52 38 17 4 M16 x 1.5 50 32 40 20 G 1/4 15.5 M8 x 1.25 8 16 31.5 16 106 6 4 5 10.5 37 179 244 65 46.5 24 5 M16 x 1.5 63 32 45 20 G 3/8 16.5 M8 x 1.25 8 16 31.5 16 121 6 4 9 12 37 194 259 75 56.5 24 5 M20 x 1.5 80 40 45 25 G 3/8 19 M10 x 1.5 10 21 38 16 128

CP95

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

Vacuum

Selection Graph 5: Adsorolion resoonse time 90 63 45 *, 27 < E ' " E 9 9 . 0 E --i 6.3 I ;4.s x \ ! 1 2 7 Eiector size determination by calculation: '1 .