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SPOOL VALVE PNEUMATIC CONNECTIONS (S, C1, C2) INMETRO certifications: Ex ia IIC T4/T5/T6 Ga Ex ia IIC T4/T5/T6 Ex ia IIC T4/T5/T6 Gb Temperature range: T4: -40 to +80 C; T5: < +65 C; T6: < +50 C. 02 Low capacity. Stroke volume of actuator < 1 dm3. G 1/4 (ND91 series), 1/4 NPT (ND92,ND93 and ND94 series). 03 Medium capacity. Stroke volume of actuator 13 dm3.

How to Order Integrated Display Type PF2A7 10 01 27 Flow rate range Thread type Unit specification 1 to 10l/min 5 to 50l/min 10 to 100l/min 20 to 200l/min 50 to 500l/min 10 50 11 21 51 Nil M Wiring specification With unit switching function Fixed SI unit Note) Nil N F Rc NPT G 3m lead wire with connector Without lead wire Nil N Note) Fixed units: Real-time flow rate: l/min Accumulated flow

ZQ 05 1U A-K15LO B-VA M W-3 3-N (1) (2) (3) (4) (5) (6) (7)(8) (9) (1) (6) 05 0.5 07 0.7 W (2m) 10 1.0 (7) (V ) (8) (P ) (2) 1U 0 (M5x0.8) 3M 1 3.2 () 0 (M5x0.8) 2 4 () 2 4 () (3) 3 6 () 3 6 () 4 3.2 () 5 4 () B 5 4 () 1) (9) (4) ( [kPa] VA -100 to 100 NPN1 + VB PNP1 + N 1) ZFC (5) 2) M SI (kPa) 2) (99 10 ) ZZQ108A-B S C-A (1) (2) (3) (4) 1 (1) 2) 01 1 S () 02

How to Order Integrated Display Type PF2A7 10 01 27 Flow rate range Thread type Unit specification 1 to 10l/min 5 to 50l/min 10 to 100l/min 20 to 200l/min 50 to 500l/min 10 50 11 21 51 Nil M Wiring specification With unit switching function Fixed SI unit Note) Nil N F Rc NPT G 3m lead wire with connector Without lead wire Nil N Note) Fixed units: Real-time flow rate: l/min Accumulated flow

l Port size Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size Applicable model Flow rate (l/min) Output specifications ZSP Symbol Output specifications Applicable model Symbol 100 200 500 50 10 PF2A710, PF2A750 PF2A711, PF2A721, PF2A751 01 02

Overload alarm margin The margin until the load reaches the overload (AL.50, AL.51) alarm level is displayed in %. An overload alarm will occur when margin is 0%. 0.1% 19 Excessive error alarm margin The margin until the error reaches the excessive error (AL.52) alarm level is displayed in encoder pulses.

If over a certain period of time in the state of the pressing position, an overload alarm (AL 50, AL 51) occurs for driver protection. (1) Devices, parameters Set the input devices and parameters as follows: Item Device/Parameter used Description Automatic/manual selection (RYn6) (MD0) Turn RYn6 ON.

Reverse rotation is indicated by a minus (-) sign. -9 to 9 pulse -51- No. Name Function Display range Unit 4 Cumulative command pulses The position command input pulses are counted and displayed. Press the [Clear] button to reset the display value to zero.

Ventilation air inlet 51 Ventilation direction (When no symbol is specified.) Ventilation direction (When symbol 2 is specified.) Ventilation Ventilation direction (When symbol 1 is specified.) direction Ball valve 1276 1375 Ventilation air outlet Drain tube Terminal block for power supply Ventilation direction Ventilation direction (When no symbol is specified.)

51 51 52 52 52 53 54 54 55 23 23 23 23 24 24 24 24 26 26 27 28 55 55 J5 57 - C o T E N T S T A B L E o F Load Fatio Speed Control Air Flow and Consumption Rotary Actuators Rack and Pinion Type Vane Type Rotary Actuators: Sizing Rotary Actuato|s Torque and Inertia Spcial Actuators Locking Cylinder Rodless rylinders Wilh magnetic coupling, unguided Guided types, with magnetic coupling Guided

If over a certain period of time in the state of the pressing position, an overload alarm (AL 50, AL 51) occurs for driver protection. (1) Devices, parameters Set the input devices and parameters as follows: Item Device/Parameter used Description Automatic/manual selection (RYn6) (MD0) Turn RYn6 ON.

51 51 52 52 52 53 54 54 55 23 23 23 23 24 24 24 24 26 26 27 28 55 55 J5 57 - C o T E N T S T A B L E o F Load Fatio Speed Control Air Flow and Consumption Rotary Actuators Rack and Pinion Type Vane Type Rotary Actuators: Sizing Rotary Actuato|s Torque and Inertia Spcial Actuators Locking Cylinder Rodless rylinders Wilh magnetic coupling, unguided Guided types, with magnetic coupling Guided

-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20Data 8-30-51 52 Made to Order Specifications: Solid State Switch With Pre-wired Connector For details about certified products conforming to international standards, visit us at www.smcworld.com.

BA -01 CX D-G5NBL 35 40 45 45 45 40 50 45 D-G5/K5 D-B7/B8 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 BM1 -06 Since this is a guideline including hysteresis, not meant to be guaranteed.

-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20Data 8-30-51 52 Made to Order Specifications: Solid State Switch With Pre-wired Connector For details about certified products conforming to international standards, visit us at www.smcworld.com.

-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20Data 8-30-51 52 Made to Order Specifications: Solid State Switch With Pre-wired Connector For details about certified products conforming to international standards, visit us at www.smcworld.com.

A B C D E EE F G H J K Applicable model Y200T-D 3.2 67 29 51 24 33 11.5 5.5 15.5 3.5 30 AFF/AM/AMD/AMK20 Y300T-D 4.2 85 42.5 67.5 35 14 7 20 6 41 AFF/AM/AMD/AMK30 Y400T-D 5.2 115 50 85.5 40 55 18 9 26 7 50 AFF/AM/AMD/AMK40 Part no.

Discharge pressure alarm (AL21/AL23/AL24/AL26) .5-40 Electric conductivity and alarm setting (AL27) .5-41 5.4.9 Function setting screen .5-43 KEY-LOCK, START-UP operating method, ANTI-FREEZING and WARMING-UP .5-44 Continuing pump operation .5-45 Ambient temperature alarm (AL35) and maintenance alarm (AL36) .5-48 TEMP OUT signal .5-49 Data reset .5-50 5.4.10 Communication setting screen .5-51

AL36: Maintenance alarm (2) Maintenance Operation continues during the alarm By default HRL Series 5.4 Description of the Screen 5-51 HRX-OM-Y098 Chapter 5 Display and Setting of Various Functions TEMP OUT signal 4. Set TEMP OUT signal.

How to Order Integrated Display Type M PF2A7 10 01 27 Flow rate range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Thread type Unit specification Nil M With unit switching function Fixed SI unit Note) Nil N F Lead wire (Refer to page 35.)