VDW

01 02 M5 1/8 (6A) 1/4 (8A) Electrical entry G-Grommet Orifice size N.O.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

PD 32 48.7 60.5 PF 9.8 19.5 40.5 PH 21.3 31.8 38 Z 160 210 330 XX 12 14 23 TT 12.5 19.3 35.4 UU 3 4.4 2 VV 10.5 15.3 29 SS 9.7 14 21.5 QW 40 60 57 RR 5.3 8.5 11 RW 22 34 45 QQ 16.4 20.4 25.5 PB 43 67 77 PG 4 6 9 PP 5.3 8 16 Q 152 198 312 NX 5.8 8.5 10.5 PA 40 60 100 P M5 x 0.8 Model MY2C16G MY2C25G MY2C40G 1/8 1/4 P indicates cylinder supply ports.

240

q Check the actuator label for model number. This matches the controller/driver. w Check Parallel I/O configuration matches (NPN or PNP). q w * Refer to the operation manual for using the products.

5 Port Air Operated Valve

A, B port size Port size M5 x 0.8 1/8 1/4 3/8 Symbol M5 01 02 03 VFA1000 VFA3000 VFA5000 VFA1000 Double type only Thread type (Including pilot port) Nil F N T Rc G NPT NPTF M5 is available with Nil only.

IDG

o q Plug y Purge air for dehumidification u Plug u Purge r Purge Purge air for dehumidification Component Parts Material Description No.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Thread type 20 25 32 40 50 63 80 M5 x 0.8 Rc NPT Stroke (mm) Refer to Standard Stroke on page 8-25-21.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

M5 x 0.8 Prepared hole diameter 4.2 20 W 0.50.05 D B Vacuum port M5 x 0.8 Piping port 2 x M5 x 0.8 33 32 10 J depth 1.5 3 5.5 5 12 9.5 +0.030 0 4 Section AA B D Mounting base side +0.030 0 depth 1.5 3 Q QL 11-/22-MXP12-25 Without magnet and switch rail 2 x M2 x 0.4 depth 3 8 5.7 3.5 L 20 20 6 x M4 x 0.7 depth 4.5 2 x M3 x 0.5 depth 3.5 (mm) G H J K L M Q QL S V W Z Model 11-/22-MXP12-15

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

x 0.8 8 4 (Plug: M-5P) 4.2 25 24 8.5 3 0 +0.030 depth 3 A 3 0 +0.030depth 3 1.5 19 220.05 4-M5 x 0.8 Prepared hole diameter 4.2 20 W 0.50.05 D B Vacuum suction port M5 x 0.8 Piping port 2-M5 x 0.8 33 32 10 J depth 1.5 3 5.5 5 12 9.5 +0.030 0 4 Section AA Mounting base side B D +0.030 0 depth 1.5 3 Q QL 11-/22-MXP12-25 Without magnet and switch rail 2-M2 x 0.4 depth 3 8 5.7 3.5 L 6-M4 x

Magnetically Coupled Rodless Cylinder

2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Description Material Note Component Parts Heat treated Stainless steel Body q Heat treated Table Stainless steel w u q w i o y !3 !2 !

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

): VQZ1 2 wGwC3, C4, C6, M5 0 1 300 (Lead wire length) 103.5 47.5 5.5 (M5: 6) 5.5 (M5: 6) 22.2 Mounting holes 0.8 SY 4 8.6 10 SMC SMC 2 Cover diameter 1.6 Cross section 0.34mm2 R2 25.8 2-C3, C4, C6, M5 SYJ 60.3 C3: One-touch fittings for 3.2 Manual override SX C4: One-touch fittings for 4 C6: One-touch fittings for 6 VK M5: M5 thread VZ 9.5 (C3,C4,C6) VF (47.5) VFR VP7 25.5 (M5) 26.5 5.4

Modular Type Regulator Series AR

e OUT IN OUT IN e q r r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Note No.

Stroke Reading Cylinder and Counter

x 1.25 10 8 28 25.5 Q R T V Y N O P Bore size (mm) 12 20 M4 x 0.7 M5 x 0.8 47 7 53.5 22 7 5.5 M6 x 1 M5 x 0.8 50 15 62.5 36 5 For rod end nut accessory bracket, refer to page 658.

Check Valve Series AK 1

u r y e w e y q y u r y e w u i t q i t q i t q r y e w AS e w q w ASP o Free flow Female thread Male thread ASN Free flow One-touch fitting Male thread AQ ASV AK Component Parts ASS Description Material Note No.

VDW Series

, 1/8 M5 1 (IN) port 1 (IN) port M5, 1/8 M5 2 (OUT) port 2 (OUT) port 15 2-M2.5 x 0.45 Thread depth 3.5 2-M3 x 0.5 Thread depth 5 VDW31 36 (27.6) Lead wire l approx. 300 SMC SMC 30 40 1 1 Rectifying device AC type 45 25 34 28 Bracket assembly part number.

Environment

0 i o e r t q u !1 !2 !3 !

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

r e w q r e w q VG VP S070 VQ VKF N.C.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Aluminum die cast Body q Stainless steel Spool/Sleeve Metal seal w Aluminum/NBR Spool valve Rubber seal Resin Piston e Pilot valve r 2.10-7 VQZ100/200/300 Body Ported Dimensions: VQZ100 Valve single unit C6: One-touch fittings for 6 C4: One-touch fittings for 4 C3: One-touch fittings for 3.2 2-C3, C4, C6, M5 Grommet (G): VQZ115-lGl-C3, C4, C6, M5-PR 10 10 (2) M5: M5 thread 53 13.8 6 A 2

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Stations 3 2 1 D D D D How to Order Valve 10-SV 1 1 0 0 F 5 Note) q w r e t y u i Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors q Series r Back pressure check valve Note) Available with manifold block for station additions.