15

1 1 1 1 1 1 1 1 Description Quantity Motor type NZ NY NX NM1 NM2 Motor side hub 1 1 1 1 1 Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 1 1 1 1 Ring spacer 1 1 1 1 Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 Hexagon socket head cap screw (for motor flange fixing)* 2 2 Ring spacer 1 1 * For screw sizes, refer to the hub mounting dimensions

Free Mount Cylinder

F FK FL FY GC GA Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 16.5(1) ZC(D)UKR16 ZC(D)UKR20 ZC(D)UKR25 ZC(D)UKR32 Rc 1 8 M5 x 0.8(2) 7 20 32 2 6 7 8 13 17 28 19 5 8 9 10.5 26 32 40 40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 21.5 22 22.5 19 21.5 23 M5 x 0.8 M5 x 0.8 Rc 1 8 6.6 5 to 50 8 5 to 50 11.5 5 to 50 SA H HA J L P Q QA R S T W Y Z Model ZC(D)UKR16

MHZ

O B A MHC (mm) (mm) H 2.4 2.9 3.4 4.5 5.5 6.6 9 B 5 5.7 7 9 12 14 17 MM A 2.5 3 4 5 6 7 9 C 2 2 2.5 4 5 6 7 B 5 5.7 7 9 12 14 17 A 2.5 3 4 5 6 7 9 Model MHZ2-6 1 MHZ2-10 Model MHT MHZ2-62 MHZ2-10 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ

MHZ

M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ MHZ2-40 1 MHZ2-40 2 Specifications and dimensions other than the above are the same as the basic type (including narrow type).

CG5-S

(mm) Connection threads Model KGY04-M5 -01 -02 KGY06-M5 -01 -02 -03 KGY08-01 -02 -03 KGY10-01 -02 -03 -04 KGY12-02 -03 -04 KGY16-03 -04 M5 x 0.8 4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 KGV04-M5 M5 x 0.8 4 -01 R 1/8 M5 x 0.8 KGV06-M5 M5 x 0.8 6 6 -01 R 1/8 <M5 type> <M5 type> -02 R 1/4 KGV08-01 R 1/8 8 8 -02 R 1/4 -03 R 3/8 KGV10

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

35.5 44 1/8 1/8 1/8 1/8 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 S 1 to 50 st 51 to 100 st 101 to 125 st 126 to 200 st Bore size (mm) TA TB TC S 94 94 96 103 ZZ 131 136 138 155 S 119 119 121 128 ZZ 156 161 163 180 S 144 144 146 153 ZZ 181 186 188 205 ZZ 211 213 230 20 25 32 40 11 11 11 12 11 11 10 10 M5 x 0.8 M6 x 0.75 M8 x 1.0 M10 x 1.25 169 171 178 Note) The drawing below

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

Rotary Actuator

Port type Size Size 30 50 63 80 100 30 50 63 80 100 Nil M thread M5 Variation Rc Nil Without angle adjustment U* Angle adjustable type H* Air-hydro type * Except size 30 1/8 1/8 1/4 3/8 TF G TN NPT TT NPTF Combination Chart of Made to Order Chart 7.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

8 1/8 1/4 1/8, C6 (One-touch fitting for 6) P, R port M5 x 0.8, Port size C4 (One-touch fitting for 4) C4 (One-touch fitting for 4) A, B port C6 (One-touch fitting for 6) M5 x 0.8 Flow Characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

p. 11 Air 2 outputs Analog output (Voltage/Current) IP65 ZSE20B(F)-(L)/ ISE20B-(L) p. 13, 15 IO-Link/ Switch: 1 output 4 ZSE20C(F)/ ISE20C(H) 2 outputs General fluids Analog output (Voltage/Current) IP65 3 (Rc thread only) p. 24 1 Face seal fitting 2 Compression fitting 3 With 1/4 (R, NPT, G) M5 female threaded 4 A block parameter or data storage function is provided with the IO-Link

High Vacuum Angle Valve

114 110 83 104 H B A G *1 The E dimension applies when the heater option is included.

MXS Series Air Slide Table

Applicable model H G A B C J K E D F 16.5 MXS-AT6 5 MXS 6 7 10.5 2.5 21 19 8 5 M2.5 X 8 M5 X 0.8 MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 12.5 3 25 9 6 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 18.5 4 32 13 8 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 23 5 40

One-touch Fittings Series KQ2

O e b u t ) m m ( . n i M e l o h . a i d t h g i e W ) g ( d a e r h T ) T P ( R . o N t r a P H ) . x e H ( D 1 D 2 L1 L2 * A M M5 6 1 / 3 8 / 1 S 1 0 5 0 L 2 Q K 0 1 4 . 1 1 0 1 5 . 9 1 8 3 0 4 5 . 6 1 5 . 3 9 1 4 / 1 S 2 0 5 0 L 2 Q K 4 1 4 4 5 . 3 4 1 4 8 / 1 S 1 0 7 0 L 2 Q K 0 1 2 . 3 1 0 1 5 . 0 2 5 . 0 4 3 4 7 1 6 . 4 0 2 4 / 1 4 / 1 S 2 0 7 0 L 2 Q K 4 1 5 . 6 4 7 4 5 4 8 / 3

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part no.

C85

(mm) M10 x 1.25 M4 x 0.7 M6 x 1 M6 x 1 M8 x 1.25 M4 x 0.7 Piston rod thread Port size G 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 G 1/8 M5 x 0.8 Action Double acting, Single/Double rod Rubber cushion/Single rod Fluid Air Proof pressure 1.5 MPa CJ1 Max. operating pressure 1.0 MPa Spring return 0.05 MPa 0.05 MPa Min. operating pressure CJP 0.1 MPa 0.08 MPa Spring extended 0.08 MPa Air cushion/Single rod

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Grommet (G), (H) : SYJ3140-M5 5 10 33.5 Manual override 22 4 23.2 (Mounting holes) B A 11 2.5 17.5 A B 53.6(GZ:54.6) [54.6] G : About 300 H : About 600 54.4(GZ:55.1) [56.1] (Lead wire length) Manual override (Non-locking) 41.5 [48] 33.5 28.5 29.1 22.5 R2 R1 P 13 5 10 10 14 14 5-M5 0.8 (Piping port) 15 [ ] for AC L type plug connector (L) : SYJ3140L -M5 M type plug connector (M) : SYJ3140M

Tamper Proof and Flat Head Screw

(mm) 1in=25.4mm L4 D3 H (width across flats) T2 A L2 D1 L3 D2 T1 L1 Dimensions A Model T2 H D1 T1 D2 D3 L3 L1 L4 L2 AS12 0-M5-T M5 x 0.8 8 9 M5 x 0.8 9 4.5 10 31 10.3 0.7 28.4 AS12 0-U10/32-T 10-32UNF 10-32UNF AS22 0-01-ST Rc 1/8 12 14.3 R 1/8 AS22 0-F01-ST PF 1/8 14.6 7 18 35.6 14.1 1.5 32 AS22 0-N01-ST NPT 1/8 12.7 NPT 1/8 AS22 0-02-ST Rc 1/4 17 18 R 1/4 AS22 0-F02-ST PF 1/4 19.5 7 27.2

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

A B 1 G: Approx. 300 H: Approx. 600 (Lead wire length) 54.4 [56.6] (Light/surge voltage suppressor) 41.5 [48.5] + 35.6 28.5 26.1 R1 P R2 R1 P R2 13 5 10 10 10 M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3140-L-M5 M8 connector (W0): SYJ3140-W0-M5 M plug connector (M): SYJ3140-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead

CL

Without rod boot With rod boot Bore size (mm) M MM N S W P H ZZ e f h ZZ l 51 58 58 71 72 110 110 120 1/4 3/8 3/8 1/2 1/2 1/2 1/2 3/4 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/5 stroke 1/5 stroke 1/5 stroke 40 50 63 80 100 125 140 160 11 11 14 17 17 27 27 30.5 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 M30 x 1.5 M36 x 1.5 215 237 254 296 315 376.5 385 423.5

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Size Foot bracket Mounting screws included in foot bracket 30 CRA1L30-Y-1 M5 x 0.8 x 25 50 CRA1L50-Y-1 M8 x 1.25 x 35 63 M10 x 1.5 x 40 CRA1L63-Y-1 80 CRA1L80-Y-1 M12 x 1.75 x 50 100 CRA1L100-Y-1 M12 x 1.75 x 50 Note 1) The part numbers shown above include mounting screw.