CG1-OM0227

) JIS B 8433-1: --1 *2) 1. 2. 3. 1. 2. 3. 4

VCL

Max.operating pressure differential (MPa) Port size Flow characteristics Max.system pressure (MPa) Orifice size (mm) Weight (kg) Class Model PAX Cv converted Av x 10 -6(m 2) 2 0.16 3.8 1.5 PB 3 0.33 7.9 0.8 1/8 (6A) 1/4 (8A) 1/8 : 0.21 1/4 : 0.24 2 VCL2 2.0 4 0.51 12 0.4 5 0.65 16 0.25 3 0.35 8.4 1.5 4 0.54 13 0.8 1/4 (8A) 3/8 (10A) 1/2 (15A) 1/4 : 0.42 3/8 : 0.40 1/2 : 0.49 VCL3 3 5 0.80

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

3 (0.12) 6.3 (0.35) 0.8 (116) 4 (0.16) 9.7 (0.54) 1/4 (8A) 3/8 (10A) 1/2 (15A) 1/4: 0.42 (0.93) 3/8: 0.40 (0.88) 1/2: 0.49 (1.08) 2.0 (290) 3 VCL3 0.5 (72) 5 (0.20) 14.4 (0.80) 0.2 (29) 7 (0.28) 24.8 (1.38) 0.1 (14) 10 (0.39) 37.8 (2.10) 2.0 (290) 3 (0.12) 6.3 (0.35) 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) 1/4: 0.58 (1.28) 3/8: 0.55 (1.21) 1/2: 0.62 (1.37) 3/4: 0.78 (1.72) 1.1 (159) 4 (0.16

Air cylinder

No.CM2*-OM0064P-A PRODUCT NAME Air cylinder MODEL / Series / Product Number Contents Safety Instructions P2 1. Specifications P4 1-1. Specifications 2. Installation and Handling P4 2-1. Air supply 2-2. Design 2-3. Mounting and Installation 2-4. Environment 2-5. Speed control 2-6. Allowable kinetic energy 2-7. Control of direction 2-8. Auto switches 3. Maintenance P18 3-1.

CM2x-OM0230Q

CM2-*Z 3-1. a) b GR-S-010(10g )GR-S-020(20g ) P18, 4. (XC85,X446)P19 c) 4. 17 - 3-2. 3-2-1. 1 2 3 3-2-2. 1 2 3 4 5 6 7) 8 1) 2) 33. 331. 4. 20 25 32 40 CM20Z-PS CM25Z-PS CM32Z-PS CM40Z-PS 1 3-3-2. 1 2 3 4 18 - 4. (XC85,X446) 4-1. -XC85 GR-H-010(10g) <> <> 4-2. PTFE X446 GR-F-005(5g) 1) 19 - 2) () 5. 5. 20 - 6. 1.

VT317

type Max. number of stations Applicable solenoid valve B mount 20 stations (1) VO317(3) Port location (Direction)/Port size A Exhaust port Symbol Type R P Base (Side) Base (Side) Base (Side) ( ) 1 4 3 8 1 Common (2) ( ) 1 4 3 8 1 4 Base (Side) Base (Side) Base (Side) VV317-02-053-02 3 Individual 1 4 1 4 1 4 Individual exhaust Note 1) For more than 3 stations, supply air both sides of P port

VFS4000-OMY0001

equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Operation Maintenance Warning Caution 1. Do not rotate the cover. Rotating the cover when mounting the cylinder or screwing pipe fittings into the ports may cause damage from the cover joint section. 1. Grease packs Order grease for maintenance using the order number below. Grease pack GR-X-005 (5g) Caution 1. Be careful of the snap ring springing out.

3M/SMseries

5 1 28 PSI (1 9kgf/cm'?

Microspeed Cylinder: Double Acting/Single Rod Series CM2X ø 20, ø 25, ø 32, ø 40 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Integrated clevis type Note 1) Single clevis type Note 1) Bore size (mm) Seal kit no. Kit components Double clevis type Note 3) Note 1) Front trunnion type (1 pc.) Note 2) 20 25 CM2X20-PS Rear trunnion type (1 pc.) Note 2) Rod seal: 1 pc. CM2X25-PS 32 40 Boss-cut basic type (1 pc.) CM2X32-PS Grease pack (10g): 1 pc. Boss-cut flange type (1 pc.)

lVFl 10

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 8

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Piston seal: 1 pc. 12 16 20 25 CQSX12-PS Rod seal: 1 pc. CQSX16-PS Tube gasket: 1 pc. CQSX20-PS Grease pack (10g): 1 pc. CQSX25-PS 2. Grease packs When maintenance requires only grease, use the following part numbers to order. Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 6

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) Operation Warning 1. The speed may not be controllable during low speed operation with the meter-out controller. Caution 1. For Series CUX10, up to 0.1Nl/min (ANR) of internal leakage is anticipated due to cylinder structure. 4

Electro-Pneumatic Proportional Valve

Base mounted Body ported Base mounted Voltage 5 6 24VDC 12VDC Port size Nil M5 01 01F 01N 01T Without sub-plate (PVQ13, 33) With sub-plate (PVQ13 only) Rc 1/8 G 1/8 NPT1/8 NPTF 1/8 Electrical entry Orifice size L type plug connector, with lead wire (PVQ13 only) M type plug connector, with lead wire (PVQ13 only) Grommet (PVQ31, 33) L 03 04 06 08 16 23 40 0.3mm ( for PVQ13) 0.4mm ( for PVQ13

Compatible Fluid: Air / Water, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Body Material: Resin, Application: Individual Item, Connection Type: Tube Connection, Tube Diameter: φ6, Operating Temperature Range(°C): -10～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 3, IP Rating: IP65, Acquired

Compatible Fluid: Air / Water, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Body Material: Resin, Application: Individual Item, Connection Type: Tube Connection, Tube Diameter: φ6, Operating Temperature Range(°C): -10～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 3, IP Rating: IP65, Acquired

Model: VDW30, Voltage: 24VDC, Power-saving Circuit: Power-saving Circuit, Electrical Entry Direction: Piping Direction, Orifice Diameter: 3.0 mm, Port Connection Type: P7 Quick Fastener, Body Material and Coil Insulation Type: PPS Body, NBR Seal, Class B Coil, Option: With 2 Quick Fastener Clips

Model: VDW30, Voltage: 12VDC, Power-saving Circuit: None, Electrical Entry Direction: Piping Direction, Orifice Diameter: 3.0 mm, Port Connection Type: One-touch fitting for ø6, Body Material and Coil Insulation Type: PPS Body, NBR Seal, Class B Coil, Option: Bottom Mounting Insert Type