VZ100/300/500

F: With foot bracket A port 20 20 stations V100 R port SY P port Bracket is not mounted.

LEC-OM02704CN

[3][5] 00 16 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 1 0F ABS 10 11 80 12 81 82 83 84 85 86 87 88 89 8A 8B 8C 8D 8E 1 8F ABS 90 91 14 13 14 (6) ([4][0]) [4][0] [0][1][F][F] (16)10 8 (7) ([5][0]) [5][0] [0][1][F][F] (16)10 8 (8) ([5][4]) [5][4] [0][1][F][F] (16)10 8 (9) ([5][8]) [5][8] [0][1][F][F] (16)10 8 (10)(DWELL)([6][0]) [6][0] [0][1][F][F] (DWELL) (16)

Modular Type Regulator Series AR

1N X430 03 AR 30 BG F N X425 03 Regulator Regulator For high/low temperature For high pressure 25 30 40 50 60 Body size Body size X430 X440 Low temperature 20 25 30 40 50 60 High temperature Thread type Thread type Rc NPT G Nil N F Rc NPT G Nil N F Port size Port size Body size Port size Body size Symbol Port size 25 30 40 50 60 Symbol 20 25 30 40 50 60 02 03 04 06 10 1/4 01 02 03 04 06 10

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

Rubber seal 5 Port Solenoid Valve Series SYJ7000

1.6 (PE port) 1/8 (P, R1, R2 port) B A 17 One-touch fitting (A, B port) (4.9) 36 Applicable tubing O.D.: 6, 1/4" : 8, 5/16" (3.6) L plug connector (L): SYJ7120-L-01 (-F) M plug connector (M): SYJ7120-M-01 (-F) M8 connector (W0): SYJ7120-W0-01 (-F) DIN terminal (D): SYJ7120-D-01 (-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 65 31.5 [38.5] 101 Max. 10 57.5 16.1 46.2 31.1

Intrinsically Safe Valve

In the case of complex arrangement, specify them on the manifold specification sheet. 53 42 SS5Y 05 5 02 Manifold series Stations 5 7 02 53-SY5000 2 stations 53-SY7000 20 20 stations Thread type A, B port size Nil F N T Rc Thread piping G Symbol Port size Applicable series NPT 1/4 53-SY5000 53-SY7000 02 NPTF Warning If a resin tubing is used, take precautions against static electricity.

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Elbow type Meter-out AS3201F-02 AS-F TMH ASD AS AS-FE KE AS-FG AS-FP AS-FM Meter-in AS3311F-02 Meter-in AS3211F-02 AS-D AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts Component Parts No.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

, AS2211FG-02 AS2301FG-02, AS2311FG-02 600 300 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 AS-F 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 TMH 400 200 06, 07 02 01, 23 ASD 300 50 03, 04 100 200 AS 01, 23 100 AS-FE 0 0 0 KE 5 0 10 5 0 10 5 0 10 Number

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

: 01) EVS1-02 (Size: 02) 100 80 1000 l/min (ANR) 400 l/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Lightweight Size 01 (3 position): 0.26 kg Size 02 (3 position): 0.18 kg 3-11-11 12 ISO Standard Solenoid Valve Size 1,2/Single Unit Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 Courtesy of Steven Engineering, Inc

•

"F: 1 , 0 F . Model M' ;8 C R ~ !F. G ;K '.

5 Port Solenoid Valve SY Series

AS3001F-08 AN101-01 AN101-01 T1075 x 1 m T0604 x 1 m T0604 x 1 m T1209 x 1 m T1075 x 1 m AS4001F-10 SY7120-02 SY7140-03 AS3001F-06 AS4001F-10 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 AS4001F-10 AS4001F-12 SY9120-03 SY9140-04 AS3001F-06 AS4001F-10 AS4001F-12 AN202-02 AN200-02 AN200-02 Conditions [When using SGP (steel

VQ4000

Nil N T F Rc NPT NPTF G Combination of manifold options shown below and external pilot specification is not possible.

Direct Solenoid

Poriing No. of Ports 'xx" M84010-02 Ta"NPTFSide l l M84011-02 7a" NPTF Side: Y.r" Bottom A & B 1 3 MB 4210-02 %"NPTFSid(2); % Botlom(5) 7 t 5 Manifolds *(OptionsT & P Only) Part No. Poding No.of Ports "xx" Subplates .

Prevents Micro-Bubbles

A (OUT) port A A LLH2A-03-02-C 1 set 1 set Manifold base part no. Non-locking Locking LVH20A-02-C 2 sets 2 sets Valve part no. (stations 1 & 2) LVH20AL-02-C 1 set 1 set Valve part no.

VCC

Note) Part number for sub-base For 2 port: VCC12-S02 02F [Rc1/4] [G1/4] 02 02F [Rc1/4] [G1/4] Note 2) For 3 port: VCC13-SVCC12(D)-02(F) VCC13-02(F) Manifold 06 VV CC1 M 06 C4 Standard Type (Passage number) Pilot port fitting size 4 One-touch fitting (Antistatic) 6 One-touch fitting (Antistatic) C4 C6 2 3 M 2 port valve, Cleaning valve 3 port valve 2/3 port valves mixed mounting 2 port valve

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

20.9 30.2 (30.3) 23 (24) AS221FSG-02-03 (S) 5/32" 8.2 AS221FSG-02-07 (S) 1/4" 11.2 23.4 32.7 (32.8) 24 (24) AS221FSG-02-09 (S) 5/16" 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FSG-02-11 (S) 3/8" 15.5 26.4 35.7 (35.8) 15.6 25 (26) AS321FSG-02-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 24.5 28.5 9.3 19.2 47 (48) AS321FSG-02-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FSG-02-

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

39.9 34.9 18.5 15 17 8 R 1/4 ASD430FG-02-08S 28.2 18.5 55 46.5 15.2 34.4 29.4 11 19.7 10 21 31 58 ASD430FG-02-10S 49.3 18.5 17 25.2 74 6 ASD530FG-02-06S 48.3 12.8 20.3 18.5 28.2 76 8 ASD530FG-02-08S 51.3 15.2 46.9 41.9 48.3 43.3 23 19.8 19 R 1/4 42.8 37.8 15.4 21 80 32.6 10 ASD530FG-02-10S 54.1 18.5 23.1 22 83 34.4 55.9 12 ASD530FG-02-12S 20.9 17 74 25.2 48.3 6 ASD530FG-03-06S 12.8 20.3 18.5

KJ

F (mm) Weight (g) 65 72 81 91 97 112 Port B Min. port size L2 L3 L4 L5 L6 P Q1 Q2 M L1 KM12-04-02-6 6 17 40 89 110 99 125 108 139 1 4 6 4 10 18 29.5 19.5 29 10.6 16 12 KM12-04-02-10 10 KM12-06-02-6 6 KM12-06-02-10 10 KM12-08-03-6 6 KM12-08-03-10 10 61.5 47 1 4 17 7.5 6 10 19.5 31.5 21.5 31 13 17 13.5 73 55 3 8 19 9 8 11.5 22.5 35.5 24 34.5 15.5 18.5 14.7 86 Dimensions: KM13 Applicable tubing

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10 20 50 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 40 30 5 10 20 10 0 5 0 5 20 10 10 0 10 Number of needle rotations Number of needle rotations Number