Pilot: R (External Pilot), Voltage: 3 (110VAC 50/60HZ), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Port Size: 06 (3/4)

Pilot: R (External Pilot), Voltage: 1 (100VAC 50/60HZ), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Port Size: 06 (3/4)

Pilot: R (External Pilot), Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: None, Port Size: 06 (3/4)

Pilot: R (External Pilot), Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: None, Port Size: 06 (3/4)

Pilot: Internal Pilot (Not to be Used in North America Market), Port Size: 06 (3/4"), Thread: F (G), Safety Switch, Wiring: M (M12 Connector, OMRON), Check Valve, External Pilot Only: None

Pilot: Internal Pilot (Not to be Used in North America Market), Port Size: 10 (1"), Thread: N (NPT), Safety Switch, Wiring: M (M12 Connector, OMRON), Check Valve, External Pilot Only: None

Pilot: Internal Pilot (Not to be Used in North America Market), Port Size: 3/4", Thread: G, Safety Switch, Wiring: M12 Connector, OMRON, Check Valve, External Pilot Only: None

Pilot: Internal Pilot (Not to be Used in North America Market), Port Size: 1", Thread: NPT, Safety Switch, Wiring: M12 Connector, OMRON, Check Valve, External Pilot Only: None

Series VG342 is a 3 port pilot poppet solenoid valve and can be used as a selector or divider valve (external pilot). Actuation is changeable between N.C., N.O., or external pilot types. VG342 is possible to use in vacuum or under low pressures. No lubrication is required. 3 port pilot operated poppet valve , Material restriction type , Low power consumption: 4.8W DC (standard type); 2W

High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

Made to Order

CQ2 series Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A B + Stroke S2 L B + Stroke S1 L B + Stroke S2 L L B + Stroke S1 A + Stroke (S1 + S2) A + Stroke (S1 + S2) Note) In the case of bore sizes 12 to 25 with auto switch, port directions are different.

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10, 15-S CDRBU2W20, 30-S CRB2 CRBU2 CRB1 2 x S2 2 x S1 2 x S1 MSU 2 x S2 CRJ Rotary actuator CRA1 CRQ2 2 x S1 2 x S1 2 x S1 2 x S1 Rotary actuator MSQ (34.5: Connector type) MSZ A port B port CRQ2X MSQX 2 x R A port B port 2 x R MRQ 1 Auto switch Auto switch 2 5 20.5 (26.5: Connector type) 1.

Electric Actuator

A Symbol Type AC servo motor (S2) AC servo motor (S3) AC servo motor (S6) AC servo motor (S7) Capacity Encoder Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 100 W AC servo motor (S2) AC servo motor (S3) AC servo motor (S2) AC servo motor (S3) AC servo motor (S6) AC servo motor (S7) AC servo motor

Electric Actuator

S8 40 400 For motor type S2 and S6, the compatible driver part number suffixes are S1 and S5 respectively. + Driver type I/O connector ( Cable length Power supply voltage Compatible drivers 25 32 Size 40 ) ) ) ) ) ) ) ) ) Nil H Without connector With connector Nil 2 5 A Without cable 2 m 5 m 10 m ) ) ) ) ) ) ) ) ) ) ) ) ) ) Nil A1 A2 B1 B2 C1 C2 S1 S2 Without driver LECSA1-S; LECSA2-

Step Motor Controller

A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

CRBU

Port locations: Axial direction CRBUWl-lSE (mm) A B C D E(g6) F(h9) G H J K L M N P Q1 (Depth) Q2 R S1 S2 T U V W X Model 10.5 8.5 10.5 11 11.5 14 12 15.5 10.5 9.5 10.5 10 11 13 13 14 CRBUW10-lS CRBUW10-lSE CRBUW15-lS CRBUW15-lSE CRBUW20-lS CRBUW20-lSE CRBUW30-lS CRBUW30-lSE M3 (4) M5 X 0.8 M3 X 0.5 M5 X 0.8 M3 X 0.5 4 -0.004 -0.012 9 0 -0.043 29 22 14 8 3 25 31 41 15.5 M3 X 0.5 5 24 3.5

Electric Actuator

(Absolute encoder) Motor option AC servo motor S7 200 63 (Absolute encoder) Without lock Nil B With lock 1: For motor type S2 and S6, the compatible driver part number suffixes are S1 and S5 respectively.

PC Wiring System Series PCW

8 9 A B C D E F 1 4.1 + *S2 S1 DC24V MADE IN JAPAN 2 3 4 (48.5) (50) 133 10.5 10.5 5.1 4.5 5 5 Models Output unit can be used for mixed connection with PCW series.

Electric Actuator/Slider Type

U S1 [mm] Size S1 T2 U 25 47 91 1 32 61 117 1 63 84 142 4 T2 T2 Note) When the motor is mounted on the left or right side in parallel, the groove for auto switch on the side to which the motor is mounted is hidden. 12 Series LEY Dimensions: In-line Motor Encoder Z-phase detecting position F1 Note 1) Rod operating range (Stroke + G mm) Z D T EV M J U 4 x O1 thread depth R M K Note 2) V W