ZP

Applicable for the ZP series adapter How to Order ZP2 03 U N Pad unit Pad diameter Pad material Symbol Pad diameter Blast type Symbol Material NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber 03 B04 05 06 B06 07 B08 N S U F GN GS 3 4 5 6 6 7 8 Blast type: Work pieces can be removed easily.

ZP

Applicable for the ZP series adapter How to Order ZP2 03 U N Pad unit Pad diameter Pad material Symbol Pad diameter Blast type Symbol Material NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber 03 B04 05 06 B06 07 B08 N S U F GN GS 3 4 5 6 6 7 8 Blast type: Work pieces can be removed easily.

ZP

Applicable for the ZP series adapter How to Order ZP2 03 U N Pad unit Pad diameter Pad material Symbol Pad diameter Blast type Symbol Material NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber 03 B04 05 06 B06 07 B08 N S U F GN GS 3 4 5 6 6 7 8 Blast type: Work pieces can be removed easily.

AR20-B to AR60-B

X425 w t e 03 q w t e r For high/low temperature Option/Semi-standard: Select one each for a to g.

HRX-OM-T004

(Request):010307F5 [CR][LF] (Response):01030E00D40D02010A [CR][LF] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 03 Function 03 Function 0 Head address of specified register 0E Quantity of bytes to read 0007 Quantity of register to read 00D4 Information of 0h (circulating fluid discharge temperature) F5 LRC 0 Information of 0001h (Reserved)

HRX-OM-R028

(Request):010307F5 [CR][LF] (Response):01030E00D40D02010A [CR][LF] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 03 Function 03 Function 0 Head address of specified register 0E Quantity of bytes to read 0007 Quantity of register to read 00D4 Information of 0h (circulating fluid discharge temperature) F5 LRC 0 Information of 0001h (Reserved)

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 M2 Weight (g) ASV310F-01-06S ASV310F-01-08S ASV310F-02-06S ASV310F-02-08S ASV410F-01-08S ASV410F-01-10S ASV410F-02-08S ASV410F-02-10S ASV410F-03-08S ASV410F-03-10S ASV510F-02-10S ASV510F-02-12S ASV510F-03-10S ASV510F-03-12S ASV510F-04-10S ASV510F-04-12S 71.9 73.8 71.9 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.8 90.2 91.8 90.2 91.8 16.8 19.3 16.8 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3

A

-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Clean Regulator

SRH4010-03 SRH4000-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 10 0 5 15 20 25 0 0 1000 500 500 1000 1500 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH4100-03 SRH4110-03 SRH4100-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05

Electro-Pneumatic Proportional Valve Series VEF/VEP

characteristics Set pressure range (MPa) Without sub-plate Without sub-plate 1 2 3 Nil 02 03 13 9 5 Symbol 2 1/4 Nil 02 03 0.05 to 0.65MPa 1 3/8 2 1/4 2 0.1 to 0.9MPa 2 02 03 04 03 04 06 1/4 3/8 1/2 3/8 1/2 3/4 1 2 3 4 3/8 03 04 06 3 1 30 3/8 0.005 to 0.15MPa 1 4 1/2 4 45 1 3/4 12 8 4.5 2.5 Without sub-plate Nil 02 03 1(P) Symbol Flow type (VEF2) Flow type (VEF3) Pressure type (VEP3) 2 2

Electro-pneumatic Proportional Valve Series VEF/VEP 1

Symbol Body size Symbol Standard characteristics Symbol Port size Without sub-plate Rc 1/4 Rc 3/8 1 2 3 Nil 02 03 Symbol Set pressure range (MPa) 2 Without sub-plate Rc 1/4 Rc 3/8 Nil 02 03 03 04 06 0.05 to 0.65 MPa 1 2 2 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 0.1 to 0.9 MPa 2 02 03 04 03 04 06 1 3 30 Rc 3/8 Rc 1/2 Rc 3/4 4 0.005 to 0.15 MPa 1 1 4 45 1 2 3 4 12 8 4.5 2.5 Without sub-plate

VXD21/22/23

TI/ TIL Table (2) Rated Voltage-Electrical Entry-Electrical Option Table (1) Connection Size and Applicable Model PA Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Class B Class H G Connection Applicable model VXD2130-02 VXD2130-03, VXD2140-03 VXD2130-04, VXD2140-04 VXD2150-06 VXD2260-10 VXD2270-32 VXD2380-40

VXP21/22/23

Table(2) Rated Voltage-Electrical Entry-Electrical Option PAX Table(1) Connection Size and Applicable Model Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Class B Class H G C D, T G, C T PB S L, Z S L, Z S Note ) Connection Applicable model VXP2130-02 VXP2130-03,VXP2140-03 VXP2130-04,VXP2140-04 VXP2150-06

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 https://www.smcworld.com 2022 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. D-G

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(Example) 10-SS3YJ3-20-03 . 1 set (manifold base) 10-SS3YJ3-42-03-C4 . 1 set (manifold base) SYJ300-10-7A . 1 set (blanking plate assembly) 10-SYJ312M-5LZ-M3 . 2 sets (valve) 10-SYJ314M-5G . 2 sets (valve) SYJ300-10-7A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.

AR Series Modular Type Regulator

Applicable Model Model AR20-A AR25-A AR30-A AR40-A AR40-06-A Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 A 30 AR q X406 03 0.4 MPa setting w t e r Option/Semi-standard: Select one each for a to f. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

Speed Controller with

SMC CORPORATION Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 FAX: 03-5298-5362 1st printing OW printing OW 00 Printed in Spain

JXCx-OMT0061CN

(P.32) (1) [IO] PLC PLC Rx Ry 00 OUT0 00 IN0 01 OUT1 01 IN1 02 OUT2 02 IN2 03 OUT3 03 IN3 04 OUT4 04 IN4 05 OUT5 05 IN5 06 06 07 07 08 BUSY 08 HOLD 09 SVRE 09 SVON 0A SETON 0A DRIVE 0B INP 0B RESET 0C AREA 0C SETUP 0D WAREA 0D JOG(-) 0E ESTOP 0E JOG(+) 0F ALARM 0F FLGTH 101A CC-Link 101F CC-Link 1B READY 1C1F CC-Link (1) [] PLC RWr PLC RWw RWr bit RWw bit 0 (L) 0 1 (H) 1 (