Cylinder with Lock

to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 32 54 36 23 12.5 25 37.5 50 75 100 125 150 175 40 56 41 23 12.5 25 37.5 50 75 100 125 150 175 200 50 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 63 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 80 68 56 29 12.5 25 37.5 50 75 100 125 150 175 200 225

MLGP

100 101 5 10 50 51 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL80, 100 MLGPL80, 100 40 40 100 100 100 80 80 80 Load weight m (kg) Load weight m (kg) 100 100 80 100 80 10 10 80 6 10 25 26 51 50 100 6 10 25 26 51 50 100 200 200 300 300 Stroke (mm) Stroke (mm) Features 12 Series MLGP Horizontal Mounting Ball Bushing 31 l2 = 50mm, V = 400m/s 32 l2 = 100mm, V = 400m/s MLGPL20, 25 MLGPL20

MLGP

100 101 5 10 50 51 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL80, 100 MLGPL80, 100 40 40 100 100 100 80 80 80 Load weight m (kg) Load weight m (kg) 100 100 80 100 80 10 10 80 6 10 25 26 51 50 100 6 10 25 26 51 50 100 200 200 300 300 Stroke (mm) Stroke (mm) Features 12 Series MLGP Horizontal Mounting Ball Bushing 31 l2 = 50mm, V = 400m/s 32 l2 = 100mm, V = 400m/s MLGPL20, 25 MLGPL20

ZP

D 31 41 51 E 51 F 132 168 178 30 40 50 77 23 Symbol/Type Pad with Ball Spline Buffer U: Flat 2, 4, 6, 8 Pad diameter Ball spline guide is used to the buffer.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

63 RQ m1: Weight of cylinder operating part kg m2: Load weight kg V: Piston speed m/s 10 50 MU 40 32 5.0 4.0 3.0 (g) Table (2) Weight of Cylinder Movable Parts/Without Built-in Magnet D25 Cylinder stroke (mm) 2.0 Bore size 20 16 (mm) 5 10 15 20 25 30 35 40 45 50 75 100 -X 1.0 5 6 7 8 10 11 12 12 209 11 13 15 17 19 16 0.5 0.4 0.3 15 18 21 24 27 31 34 37 40 44 20 Data 24 28 33 37 42 46 51

Fluoropolymer Piping Equipment

25 8 5.5 LQ1E61-R5 25 6 15 15 51 42 16.5 3.6 (E1) C1 Note) Products marked are produced upon receipt of order.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Note 2) S kit: 24 VDC only 588 5 Port Solenoid Valve/Plug-in Unit 10-SQ2000 How to Order Manifold Assembly (Example) Example) D-sub connector kit, with cable (3 m) 2 position double (24 VDC) 10-SQ2231D-51-C8 (3 sets) 3 position closed center (24 VDC) 10-SQ2331-51-C8 (1 set) 2 position single (24 VDC) 10-SQ2131-51-C8 (3 sets) Blanking plate SSQ2000-10A-3 (1 set) Stations 1 2 3 4 5 6 7 8 U

MB1

202 214 214 401 to 500 227 227 239 239 501 to 600 264 264 601 to 700 289 289 701 to 800 32 40 50 63 80 100 36 23 12.5 12.5 12.5 12.5 12.5 12.5 75 75 75 75 75 75 136 144 152 152 164 164 41 23 51 25 51 25 56 29 61 29 Standard Type/with Mounting Brackets Dimensions not shown are the same as the basic type (drawing above).

KR

51 22 T 1 4 3 8 KAU12-U02 KAU12-U03 53 52 61 55 20.9 12 20.9 22 22 45.4 45.4 VMG 1 2 KAU12-U04 62.5 54.5 52 Reference dimensions after Uni thread installation.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

86 27 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 11 M10 x 1.25 80 Up to 750 20 to 750 40 37 102 32 129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 13 M12 x 1.75 100 Up to 750 20 to 750 40 37 116 41 140 1/4 1/4 92 30 52 14 124 21 31 76 25 19 16 M12 x 1.75 Bore size [mm] K KA LZ M MM N P PG PH PL PW S Without rod boot With rod boot H ZZ e f h l ZZ 40 6 14 71 11 M14 x 1.5 27 1/4 42 11 20 45 153 51

70astamb1

202 214 214 401 to 500 227 227 239 239 501 to 600 264 264 601 to 700 289 289 701 to 800 32 40 50 63 80 100 36 23 12.5 12.5 12.5 12.5 12.5 12.5 75 75 75 75 75 75 136 144 152 152 164 164 41 23 51 25 51 25 56 29 61 29 Standard Type: With Mounting Bracket Dimensions not shown are the same as basic style.

mb1

202 214 214 401 to 500 227 227 239 239 501 to 600 264 264 601 to 700 289 289 701 to 800 32 40 50 63 80 100 36 23 12.5 12.5 12.5 12.5 12.5 12.5 75 75 75 75 75 75 136 144 152 152 164 164 41 23 51 25 51 25 56 29 61 29 Standard Type: With Mounting Bracket Dimensions not shown are the same as basic style.

Square Tube Type Air Cylinder Series MB1

202 214 214 401 to 500 227 227 239 239 501 to 600 264 264 601 to 700 289 289 701 to 800 32 40 50 63 80 100 36 23 12.5 12.5 12.5 12.5 12.5 12.5 75 75 75 75 75 75 136 144 152 152 164 164 41 23 51 25 51 25 56 29 61 29 Standard Type/with Mounting Brackets Dimensions not shown are the same as the basic type (drawing above).

LEC-OM07605CN

PB45] 0 [dB] [Hz] [Hz] [Hz] -40.0 -24.1 -18.1 -14.5 -12.0 -10.1 0 1 2 3 4 5 6 7 8 9 A B C D E F 00 01 02 03 20 21 22 23 24 25 26 27 28 29 2A 2B 2C 2D 2E 2F 30 31 32 33 34 35 36 37 38 39 3A 3B 3C 3D 3E 3F 70 66 62 59 56 53 51 48 46 45 43 41 40 38 37 36 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55 56 57 58 59 5A 5B 5C 5D 5E 5F 17.6 16.5 15.6 14.8 14.1 13.4 12.8 12.2 11.7

CL

CNA Head Side Flange Style CNS Without rod boot With rod boot Bore size (mm) ZZ 182 198 201 227 ZZ 202 220 223 247 CLS 20 25 32 40 CLQ MLGP Rod Side Trunnion Style Rod side trunnion style: CLG1UN RLQ Without rod boot With rod boot Bore size (mm) BZ TDe8 TE TF TH TR TS TV TW TX TY TZ Z Z TT MLU 8 0.025 0.047 10 0.025 0.047 12 0.032 0.059 14 0.032 0.059 66 73 73 82 46 51 51 62 10 10 10 10 5.5

CNA

40 10 102 17 67 20 18 12 15 11 M10 x 1.25 7 18 Up to 600 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 M12 x 1.75 11 22 Up to 750 Data 40 37 116 41 160 1/4 1/4 92 30 52 14 144 21 98 22 25 20 19 16 M12 x 1.75 11 26 Up to 750 With Rod Boot Bore size (mm) Bore size (mm) Stroke range (mm) e l ZZ M MM N P Q H S T V W ZZ f h 40 50 63 80 100 40 50 63 80 100 11 27 1/4 37 to 39.5 51

0.4

VQC2100-51 2 sets (Single solenoid part no.) VQC2200-51 6 sets (Double solenoid part no.) Manifold base (8 stations) VV5QC21-08C8FD0-S Specify the part numbers for valves and options together beneath the manifold base part number.

CNA

40 10 102 17 67 20 18 12 15 11 M10 x 1.25 7 18 Up to 600 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 M12 x 1.75 11 22 Up to 750 Data 40 37 116 41 160 1/4 1/4 92 30 52 14 144 21 98 22 25 20 19 16 M12 x 1.75 11 26 Up to 750 With Rod Boot Bore size (mm) Bore size (mm) Stroke range (mm) e l ZZ M MM N P Q H S T V W ZZ f h 40 50 63 80 100 40 50 63 80 100 11 27 1/4 37 to 39.5 51

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

96 51 90 9.5 51 M10 x 1.5 x 15 18 K L LD M MM N P Q QW TC W WP WS X Y Z PW T Model CY1R 6 7 34 3.5 3.5 M3 x 0.5 3.5 M5 x 0.8 64 10 10.5 20 9.5 6 10 35.5 72 19 17.5 CY1R10 9 38 3.5 4 M3 x 0.5 4.5 M5 x 0.8 68 14 14 20 13 8 15 39.5 76 26 17.5 CY1R50 25 110 8.6 10 M8 x 1.25 15 Rc 1/4 159 48 42 60 41 10 50 113 176 82 30 CY1R63 24 118 8.6 10 M8 x 1.25 16 Rc 1/4 171 60 48 70 47 10 60 121 188 94

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Refer to the Option on page 51 to order it separately.