Vacuum Ejector Series ZM

Maximum Ejector Stations (Max. operable nos. simultaneously) Ejector model ZMA053 ZMA054 ZMA073 ZMA074 ZMA103 ZMA104 ZMA133 ZMA134 ZMA153 ZMA154 Manifold model R L 10 8 5 4 3 ZZMA Stations 06 10 10 8 6 5 ZZMA Stations 06B R L 10 8 5 4 3 ZZMA Stations 04 10 10 8 6 5 ZZMA Stations 04B Effective area of external silencer is 160 mm2.

Digital Flow Switch for Water Series PF3W 3-color display ®

Nil Analog 1 to 5 V Analog 1 to 5 V Analog 4 to 20 mA Analog 1 to 5 V G oC/oF None Under the New Measurement Law, units other than SI (symbol Nil) cannot be used in Japan.

2/3 Port Valve for Various

Temperature conditions Water (Standard) Air (Standard) Oil (Standard) Vacuum (3) (V, M) Maximum Minimum 40 1 60 5(1) 40 5 40 40 5 5(2) Pilot port Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V, M in parentheses are option symbols.

7

A filtration degree of 5 m or less should be selected.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Example) SYJ3120-5M-M3, VJ3000-13-1 5 6 V S R 1 2 3 4 24V DC 12V DC 6V DC 5V DC 3V DC 100V AC 200V AC 110V AC [115V AC] 220V AC [230V AC] (For manifold type 20) SYJ3 2 5 M 1 M3 0 Body ported Base mounted (4 port) 2 SYJ3 3 5 M 0 (For manifold use only.)

VXZ

Note 2) Please contact SMC for details. 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) AC Operating Fluid and Ambient Temperature DC Operating fluid temperature (C) Ambient temperature (C ) Temperature conditions Power source Water (Standard) Air (Standard) Oil (Standard) (D.E.N.P) (D.N) (3) (3) High temperature water High temperature oil 99 100 60 40 40 60

Table of Contents

24 V DC 100 V 110 V AC 200 V 220 V AC 50/60 Hz 50/60 Hz 4/2 5/3 (A/B R1/R2) 3 position Closed center Double Single Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal VQ130 0.73 0.84 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258

KQ2

3 8 1 2 " 07 1 4 " 1 8 " " 5 32 " 3 16 " 1 4 " 5 16 " 3 8 " 1 2 09 5 16 " 11 3 8 1 2 " " 13 Model Male connector Straight Different dia. straight H Hexagon socket head male connector S F Female union Male elbow Elbow Plug-in elbow Reducer elbow 45 male elbow L K V VS VF LF VD VT Z ZD ZT W Universal male elbow Hexagon socket head universal male elbow Accessory Universal female

AIR COMBINATION

M50.8 AC10A-A 1/16 56 59.9 47.4 28 25 12.5 25 20 27 4.5 6.8 3 24.5 AC20A-B 1/8 83.2 87.6 72.4 41.6 60 28.5 5 30 24 33 5.5 12 3.5 29 1/81/4 1/43/8 AC30A-B 1/8 110.2 115.1 85.6 30 55.1 80 29.4 3.5 41 35 7 14 4 41 AC40A-B 1/8 145.2 147.1 91.7 38.4 72.6 110 33.8 1.5 50 40 9 18 5 48 1/43/81/2 AC40A-06-B 1/8 155.2 149.1 93.2 38.4 77.6 110 33.8 1.2 50 40 9 18 5 48 3/4 AC50A-B 1/8 191.2 220.1

VXA21/22

Ambient and Fluid Temperature Ambient temperature C Fluid temperature C Temperature Water (Standard) Air (Standard) Oil (Standard) Vacuum (V, M) (3) Max. Min. 40 1 60 5(1) 40 5 40 40 5 5(2) Note 1) Dew point: 10C or less. Note 2) 500cSt or less. Note 3) "V", "M" in the parenthesis are option symbols.

Table of Contents - Tubing

Inch Sizes Metric Sizes * 1/4 3/8 1/2 5/8 4mm (5/32) 6mm 8mm (5/16) 10mm 12mm 0.7 11 13 15 04 06 08 10 12 Colors Color Red White Yellow Color Black Blue Green Natural Symbol B BU G N Symbol R W Y * * Coming soon Note: 4mm tubing is suitable for use with 5/32 SMC One-Touch fittings as are 8mm tubing and 5/16 fittings PEAPP08 8 (5/16) 5 38 PEAPP12 12 9 63.5 PEAPP66 6 4 31.8 PEAPP10 10 5 51

FHG

(4D-P34) KA00733 (4D-P60) 04 to 08 AL-180H-V AL-183H-V AL-162H-V FKM or EPDM Element opening 10 to 16 AL-181H-V AL-184H-V AL-163H-V Band Element w 20 to 24 AL-182H-V AL-185H-V AL-164H-V Case Note 1) The material of seals (AL-162H-V to AL-164H-V and AL-180H-V to AL182H-V) is EPDM.

IDX-OM-W029

IDX-OM-W029 5 5 5-1 3 ON OFF () 3 2 R T 5-2 600mm 1 5-2 5-2 10% 5-2 () ( 60cm 1 ) 10% 3 IDU Series 5-1 5 1 IDX-OM-W029 5 () 60cm 1 2 INOUT INOUT () IDU Series 5-1 5 2 IDX-OM-W029 5 5-2 (IDU55E,IDU75E) 1-1 5-1 OFF IDU22E,55E,75E OFF IDU55E IDU75E () ON IDU55E,75E OFF ON IDU Series 5-2 5 3 IDX-OM-W029 6 6 6-1 IDU22E IDU37E IDU55E IDU75E 3/min (ANR)( 1)

Digital Flow Switches, Series PF2A, Series PF2W

View A 1 2 3 4 5 6 7 8 Analog output 1 to 5VDC 8 7 6 5 4 to 20mADC 5 20 Analog output [mA] Analog output [V] 1 4 Max. measured flow rate value Real-time flow rate [l/min] Min. measured flow rate value Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min] Standard condition Standard condition Basic condition Basic condition Minimum measured Maximum measured

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Metric sizes Inch sizes Body class 3 1/8 3/16 4 1/4 8 3/8 10 12 19 1/2 3/4 6 1 2 3 4 5 v v v V V V V v v V V v v V V V v v V v V v Note) Refer to page 505 for information on changing tubing sizes. Specific Product Precautions Be sure to read before handling.

VEX1

VVEX4-2-6-A VEX3420 5 pcs. VEX4-5 1 pc.

Vacuum Manifold for fieldbus system

5 Not specified Not specified 100,000 5 +7 6 +10 3.3.

IDX-OM-W032

1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 5-2 . 5-3 1 6 6-1 . 6-1 6-2 GWP . 6-1 6-3 . 6-2 6-4 . 6-3 6-5 . 6-4 7 C 7-1 . 7-1 7-2 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 L 9-1 . 9-1 9-2 . 9-1 9-3 (ADH4000-04) . 9-2 9-4 . 9-2 10 R 10-1 . 10-1 10-2 . 10-1 10-3 . 10-1 10-4 . 10-2 10-5 . 10-2 11 T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

) With 4 selftapping screws Note) ISO228 compliant Port size Port size Rated flow range 501 102 No 04 * 1/2 * bracket Output specifications OUT1 OUT2 A B C D NPN PNP NPN NPN PNP PNP NPN PNP NPN PNP Analog 1 to 5 V Analog 4 to 20 mA Note) Each option is not assembled with E Analog 1 to 5 V the product, but shipped together.

HRX-OM-Y120

. 5-4 5.7 Setting method . 5-5 5.7.1 IP Address Setting . 5-6 5.7.2 Setting of subnet mask and default gateway. 5-7 5.8 Communication sequence. 5-8 5.9 Message configuration . 5-8 5.10 Function codes . 5-9 5.11 Explanation of function codes . 5-10 5.12 Register Map . 5-11 5.12.1 Circulating fluid discharge temperature . 5-13 5.12.2 Circulating fluid electrical conductivity . 5-13 5.12.3