Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1 (Example) For M4: L2 = 8 mm Applicable shaft types: X, Z Q1 = M C1 = C L2 = L2 = D1 = L1 + (3 x P) L1 = C1 Q2 = M Q2 = M Z axis X axis L1 = X = (mm) (mm) (mm) D1 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 L1 max Size 30 50 63 80 100 X 3 to 25 3.5 to 36 3.5 to 41 4 to 50 5 to 60 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q1 M3 M4, M5, M6,
Symbol Wiring C C1 S0 Centralized wiring V V 3 Individual wiring is specified for pressure switches for vacuum and sensors. 4 When more than one option is selected, list the option symbols in alphabetical order.
B L1 W M2 B side Inch Size 6 4 Model A side B side B C1 C2 E1 E2 H1 H2 L1 L2 M1 M2 Min. port size W Applicable tubing O.D.
1 I/O cable length [m]*3 Compatible driver Power supply voltage [V] Size 25 32 40 Nil Without driver A1 LECSA1-S100 to 120 A2 LECSA2-S200 to 230 B1 LECSB1-S100 to 120 B2 LECSB2-S200 to 230 C1 LECSC1-S100 to 120 C2 LECSC2-S200 to 230 S1 LECSS1-S100 to 120 S2 LECSS2-S200 to 230 *3 When Without driver is selected for driver type, only Nil: Without cable can be selected.
LEPY/LEPS Series 2 3 LEH Series 2) 360 8 No.SFOD-OMT0009CN-B 2.3 1) PLC I/O 2) :JXC-C2-* DC24V 1) I/O ENC : LE-CP-*-* LE-CP-*-*-S USB MOT JXC-W1-1 CI 2) () 120.3 120.3 mm mm 200 200 mm/s mm/s <> 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 2) AWG20 (0.5mm USB JXC-W1-2 -USB DC24V M PWR JXC-W1 2) C PWR DC24V 2) () <> 1.5m () 2) AWG16 (1.25mm JXC-C1
Series LER Series 1) LEP Series (2 3 ) LEH Series 1) (360) -8No.JXC-OMT0001CN-C 2.3 1) PLC 5 EtherNet 2) EtherNet/IP 2) 3) P1P2 1) ENC LE-CP-*-* USB LE-CP-*-*-S MOT JXC-W1-1 CI 2) 120.3 120.3 mm mm 200 200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 <> 2) AWG20 (0.5mm USB JXC-W1-2 DC24V USB M PWR 2) JXC-W1 C PWR DC24V 2) 1.5m () <> JXC-C1
Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage
Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.
PD07PD09 (DO) ON/OFF 4.5.1(1)(d) JOGDO TM 4.5 MR Configurator2 No.PC09 MR Configurator2 11.8 TM master-slave masterslave C1 5.4.3 1 5 1 1.5 (1) LECS S 1 S5 50W,100W SSCNET S ACS5, S6 S5 ACS7 S7 200W ACS8 S8 400W AC100VAC120V 50Hz60Hz 1 AC200VAC230V 50Hz60Hz 2 1 6 1 (2) aSSCNET 5 A S LE C S M A AC S B M B E 2m 2 5m 5 10m A S R bSSCNET LE-CSS-MR-J3BUSM 1 LE C S S
Hysteresis (3 digits) OFF ON point = C, C1 OFF point = C-3 digits, C1-3 digits (1 digit is the minimum setting unit.) Other Functions Key lock mode Used to avoid a malfunction when buttons on the front part of the switch are pressed. Initiate key lock Release key lock SET SET Press the SET button to complete the setting. Press the SET button to complete the setting.
With flow rate adjustment LVA20A-02-C1 2 sets 2 sets Valve part no. (stations 1 & 2) LVA20A-02-C 1 set 1 set Valve part no. (station 3) P P N.C.
Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage
Emitter Cartridge Type: D (High Speed Static Neutralization Cartridge), High Voltage Cable Length: 3 (3m), One-touch Fitting: 6H (ø6 Straight), Power Supply Cable Direction, Length: M (Entry Direction: Straight, Length: 10 m), Communication Cable Entry: M (Entry Direction: Straight, Length: 10 m), Nozzle Bracket: F (Angle Adjustment Bracket), DIN Rail Mounting Bracket: U (Controller: Included
Controller: 6H (Parallel I/O, PNP), Mounting: 8 (DIN Rail), I/O Cable Length: None, Actuator: LEFS, Accuracy: Basic, Body Size: 32, Motor Mounting: In-line, Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 700mm
Emitter Cartridge: D (High Speed Static Neutralization Cartridge), High Voltage Cable Length: 3 (3m), One-touch Fitting: 6H (ø6 Straight), Nozzle Bracket: B (L-bracket)
Model: 40 (Standard, AC Type), Bar Length: 46 (460mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 6H (ø6 Straight), Plug Position: R (Opposite Side of High-voltage Cable), Bar Bracket: B (w/Bracket 1)
Model: 41 (AC), Bar Length: 40 (400mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 2 (2m), One-touch Fitting: 6H (ø6 Straight), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: P (PNP), Power Supply Cable Length: 3 (3m), Bar Bracket: F (w/Bracket 2), DIN Rail Bracket for Controller &
High-voltage
Model: 41 (AC), Bar Length: 112 (1120mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 1 (1m), One-touch Fitting: 6H (ø6 Straight), Plug Position: w/o Plug, Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 3 (3m), Bar Bracket: F (w/Bracket 2), DIN Rail Bracket for Controller &
High-voltage Power
Model: 42 (Dual AC), Bar Length: 16 (160mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 1 (1m), One-touch Fitting: 6H (ø6 Straight), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: P (PNP), Power Supply Cable Length: 3 (3m), Bar Bracket: F (w/Bracket 2), DIN Rail Bracket for Controller &
Model: 42 (Dual AC), Bar Length: 34 (340mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 1 (1m), One-touch Fitting: 6H (ø6 Straight), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: P (PNP), Power Supply Cable Length: 3 (3m), Bar Bracket: F (w/Bracket 2), DIN Rail Bracket for Controller &