Compressed Air Cleaning Filter Series

7 Water Separator Series AMG Dimensions AMG650 Auto drain D: With auto drain (N.O.) 180 76 12 136 Drain cock: Black 4.5 34 160 10 one-touch fitting Option J: Drain guide 1/4 female threaded 160 150 85 20 15 40 11 (Accessory) Bracket 32 IN OUT 20 253 334 1/4 female threaded 311 20 Drain 10 M5 Maintenance space 8 Series AMG Dimensions AMG850 Auto drain D: With auto drain (N.O.) for AMG850

Fieldbus System

Cylinder port size C3 C4 C6 M5 CM L3 L4 L6 L5 B3 B4 B6 B5 LM With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread Mixed sizes and with port plug Top ported elbow with 3.2 One-touch fitting Top ported elbow with 4 One-touch fitting Top ported elbow with 6 One-touch fitting M5 thread Bottom ported elbow with 3.2 One-touch fitting Bottom ported elbow with 4

Precision Regulator

Supply pressure: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate: 0 L/min (ANR) Back pressure: 0.5 MPa Supply pressure: 0.5 MPa IR2000-02 IR2000-02 IR2000-02 ARJ 0.204 0.5 0.2 AR425 to 935 Set pressure (MPa) Set pressure (MPa) Set pressure (MPa) Set pressure P2 (MPa) 0.4 0.202 Set point 0.15 ARX 0.3 0.200 AMR 0.1 0.2 0.198 ARM 0.05 0.1 0.196 ARP 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0

PA300/500/700

1/4,1/8 (Breathing port) M5 x 0.8 16.5 20.4 Body ported: VPA342VA B 20.4 16.5 NO NC 2(A) 26.5 21.5 2.25 Switch mark 26.7 23.2 Bracket (Mounting hole) 23.2 (PA port) Rc 1/8 (Mounting groove for M5 thread) 2-R2.7 PA 5 36 35 35 3.5 21.5 31 17.5 1.6 15 26.7 45 9 54.5 65.6 54.4 1(P) 3(R) 4.5 (Piping port) Rc 1/4,1/8 (Breathing port) M5 x 0.8 16.5 20.4 5-5-15 4 Series VPA300/500/700 Dimensions

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

AC Servo Motor Driver

44 140 70 M5 M4 12 33 12.

VDW

1 (IN) port 2 (OUT) port M5, 1/8 1 (IN) port M5, 1/8 M5 2 (OUT) port 15 2 x M3 x 5 2 x M2.5 x 3.5 VDW31-l G W 36 (27.6) Lead wire l Approx. 300 30 40 SMC SMC 1 1 Rectifier element AC type 4 x 5 25 34 28 Bracket assembly part no.

Title not found

0.1 to 0.7 Miniature regulator ARJ210 Direct operated relieving style 0.2 to 0.7 M5 to 1/8 Miniature regulator ARJ310 Direct operated relieving style 0.2 to 0.7 M5 to 1/8 Regulator AR1000-6000 Direct operated relieving style Modular style 0.05 to 0.7 0.05 to 0.85 M5 1/8 to 1 Built-in pressure gauge Space saving 0.05 to 0.85 1/8 to 1/2 Regulator with integral pressure gauge AR2001-4001 Internal

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

N02 NPT 1/4 NPT 3/8 Note 2) N03 N04 NPT 3/8 NPT 1/2 NPT 3/8 NPT 1/2 Note 1) AS220-02 Note 2) AS320-02 597 Series AS20-D Construction AS3200-02-D Meter-out M5 type U10/32 type Meter-in M5 type U10/32 type AS3210-02-D Component Parts No.

IR1000/2000/3000

Supply pressure: 0.7 MPa Set pressure: 0.2 MPa Flow rate: 0 /min (ANR) Back pressure: 0.5 MPa Supply pressure: 0.5 MPa IR2000-02 IR2000-02 IR2000-02 0.204 0.5 0.2 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) 0.4 0.202 F.R.L.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

LEC-OM02904

AC200230V AC100120V 40 M5 3.24[Nm] M5 3.24[Nm] 6 AC100120V AC200230V AC100120V AC200230V L1 L1 PE PE L2 2-M5 2-M5 L2 L3 CNP1 CNP1 N N P1 P1 M4 1.2[Nm] P2 P2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L11 L11 L21 L21 U U CNP3 V CNP3 V W W 9 2 9 (2) LECSS-S8 [mm] 5 40 6 6 6 (80) (170) 6 6 () CN4 CN2L CN2 CN1B CN1A CN3 CN5 CNP1 L1 L2 L3 N P1 P2 P C D L11 L21 U V W L1 L2 () L3 N P1 CNP2 P2

Compact Vacuum Ejector Series ZA

KJS23-M5 KJS04-M5 KJL23-M5 KJL04-M5 3.2 (Straight) 4 (Straight) 3.2 (Elbow) 4 (Elbow) Solenoid valve combination (Refer to Table (1).)

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

48(22) 2 Position single Base mounted type SYJA3240-M5 51(25) 2 Position double 1.8 (0.1) SYJA3340-M5 M5 0.8 M3 0.5 3 Position closed center 54 (28) SYJA3440-M5 3 Position exhaust center SYJA3540-M5 3 Position pressure center SYJA3130 22 4 Port base mounted type (For manifold) 2 Position single SYJA3230 25 2 Position double Note1) Note1) M3 0.5 M5 0.8 1.2 (0.067) M3 0.5 SYJA3330 3 Position

Table of Contents

70 2-5H10 depth 8 LJ1 LG1 LC1 LX LC6D/LC6C Switches 4-Limit switch mounting groove The two grooves at the bottom cannot be used. 6-M5 x 0.8 thread depth 9 90 203 (258) Work piece mounting reference plane 80 Stroke + 115 (table movement range) 7.5 194 (249) 41 46 58 2-T-slot 1 95 90 69 9.3 57 2-T-slot 2 Stroke + 350 (405) 23 (78) 40 36 Body mounting reference plane 40 (T-slot pitch) 3-5H10

Modular Type Air Filter Series AF

Drain guide 1/4 Note 4) AFM30, 40 Rc NPT G Nil C AFM20 to 40 1/8 1/4 3/8 1/2 3/4 01 02 03 04 06 R Flow direction: Right to left AFM20 to 40 N Note 1) Float type auto drain (N.O.)

Compact Manifold Regulator Series ARM5

Tightening torque recommended (M5: 1.5 to 2 Nm, R1/8: 7 to 9 Nm) For sealing, use a pipe tape.

4/5 Port Air Operated Valve SYJA3000 Series

(34) 40 1/8 (P , R1, R2 port) 1.8 (Bleed port) 25.5 VPA4 20 12 1.6 P R2 R1 18 22 22 11.5 SYJA 18 1/4 (R1, R2 port) 31.5 1.8 (Bleed port) 27.2 63 VZA 01 02 2 position double: SYJA7220-01 2 position double: SYJA7240VTA 2 x 4.3 (For mounting) 34 8.5 63.6 2 x M5 x 0.8 (Pilot port) 2 x M5 x 0.8 (Pilot port) VGA B A 1 1 13 3 VPA B A 34 27 B A 1 1 1/8 (A, B port) 2 x 3.2 (For manifold mounting)

Precision Regulator Series IR1000/2000/3000

X465 0.1 to 1 0.001 Specifications Set pressure range (MPa) Desolution of setting and display (MPa) Class 10 With M5 fitting (Applicable tubing O.D. 6) Cleanliness Bleed hole Pressure switch 12 to 24 VDC 10%, Ripple (p-p) 10% or less (With reverse connection protection) 40 mA or less Power supply voltage IR1000/2000: With M5 fitting (Applicable tubing O.D. 6) IR3000: Rc 1/2 female thread