Size: 01(Size 26mm), Stations: 8 Stations, A, B Port: Bottom, 1/4, Port Thread: F [G (ISO1179-1 G Threads)], SI Unit: EX250/500 Serial Kit w/o SI Unit, End Plate: w/o SI Unit/End Plate, SI Unit COM: +COM, Number of Input Blocks: w/o SI Unit/Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: None, X Option: None, CE Compliant: Q

Size: 01(Size 26mm), Stations: 9 Stations, A, B Port: Bottom, 1/4, Port Thread: F [G (ISO1179-1 G Threads)], SI Unit: EX250/500 Serial Kit w/o SI Unit, End Plate: w/o SI Unit/End Plate, SI Unit COM: +COM, Number of Input Blocks: w/o SI Unit/Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: None, X Option: None, CE Compliant: Q

Size: 01(Size 26mm), Stations: 10 Stations, A, B Port: Side, 1/4, Port Thread: NPTF, SI Unit: EX250/500 Serial Kit w/o SI Unit, End Plate: w/o SI Unit/End Plate, SI Unit COM: +COM, Number of Input Blocks: w/o SI Unit/Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: Direct Exhaust w/Built-in Silencer, X Option: -, CE Compliant: -

Table of Contents

AXT625-28-3A For 01T For 01T1 For 01C For 01F For 01SU Junction cover assembly AXT625-28-7AStations o VVF2000-26-5AStations AZ738-10AStations For 01T For 01SU AXT623-22 NBR Rubber plug !

VFS

Base type 01, 01T, 10: 2 to 15 stations 01C, 01F: 2 to 8 stations Blanking plate (Filter, Regulator) Blanking plate (Pressure switch) Stacking type Integrated type Nil 1 Number of manifold blocks required for mounting (stations) 2 2 2 2 2 2 2 1 Symbol Note) Stacking type: Base type 01, 01T Integrated type: Base type 01T, 01C, 01F Passage Porting specifications B, A EA, EB P Thread type

VFR

AXT625-28-3A For 01T For 01T1 For 01C For 01F For 01SU Junction cover assembly AXT625-28-7AStations o VVF2000-26-5AStations AZ738-10AStations For 01T For 01SU AXT623-22 NBR Rubber plug !

Speed Controller with Indicator

Sealant For R, NPT thread Indicator window direction: 0 Indicator window direction: 180 D3 W1 W2 X Y Applicable tubing O.D. d A L4 D1 L3 M L2 L1 T H (Width across flats) Metric Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FS-01-23 (S) 3.2 7.2 13 (13) AS221FS-01-04 (S) 4 8.2 AS221FS-01-06 (S) 6 10.4 14 (13) AS221FS

Size: 01(Size 26mm), Stations: 2 Stations, A, B Port: 03 (Side, 3/8), Port Thread: F [G (ISO1179-1 G Threads)], SI Unit: SD0 (EX250/500 Serial Kit w/o SI Unit), End Plate: w/o SI Unit/End Plate, SI Unit COM: +COM, Number of Input Blocks: w/o SI Unit/Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: R (External Pilot), X Option: None

Size: 01(Size 26mm), Stations: 4 Stations, A, B Port: 03 (Side, 3/8), Port Thread: F [G (ISO1179-1 G Threads)], SI Unit: SD0 (EX250/500 Serial Kit w/o SI Unit), End Plate: w/o SI Unit/End Plate, SI Unit COM: +COM, Number of Input Blocks: w/o SI Unit/Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: R (External Pilot), X Option: None

Size: 01(Size 26mm), Stations: 2 Stations, A, B Port: Side, 3/8, Port Thread: F [G (ISO1179-1 G Threads)], SI Unit: EX250/500 Serial Kit w/o SI Unit, End Plate: w/o SI Unit/End Plate, SI Unit COM: +COM, Number of Input Blocks: w/o SI Unit/Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: External Pilot, X Option: None, CE Compliant

Size: 01(Size 26mm), Stations: 4 Stations, A, B Port: Side, 3/8, Port Thread: F [G (ISO1179-1 G Threads)], SI Unit: EX250/500 Serial Kit w/o SI Unit, End Plate: w/o SI Unit/End Plate, SI Unit COM: +COM, Number of Input Blocks: w/o SI Unit/Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: External Pilot, X Option: None, CE Compliant

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(R)M -01T 51.5 300 (Lead wire length) 60.5 300 (Lead wire length) Cover diameter 1.5 Cross sectional area 0.23mm2 Indicator light 55.5 Indicator light Cover diameter 1.5 Cross sectional area 0.23mm2 45 27 Series VQZ Base Mounted Type Dimensions: VQZ200 Dimenisons: VQZ200 (mm) Valve Scale: 45% Grpmmet (G): VQZ2 5(R)G 01T 02T 2 4.5 Mounting holes 4 32 19.2 Manual override Cover diameter 1.4

1

Sub-plate Without valve 3 SY 27 0M 1 W1 01 w e t r q Base gasket is included.

2

Inch Size (mm) Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight g Unlocked Locked Unlocked Locked AS22l1FSl-01-01(S) 1/8" 7.2 12 19.1 26.1 (26) 19.1 43.8 42.4 40.7 39.3 13.3 20 21.5 6.5 15 13 (13) AS22l1FSl-01-03(S) 5/32" 8.2 AS22l1FSl-01-07(S) 1/4" 11.2 20.8 27.8 (27.7) 14 (13) AS22l1FSl-01-09(S) 5/16" 13.2 22.4 29.4 (29.3) 14.2 15 (14) AS22l1FSl-02-01(S) 1/8"

V

N F I G U R AT I O N Symbol Port Size Applicable Series Metric (mm) M5 M5x0.8 SY3000 C4 One Touch Fitting 4 SY3000 C6 One Touch Fitting 6 SY3000, SY5000 01 PT 1/8 SY5000 C8 One Touch Fitting 8 SY5000, SY7000 02 PT 1/4 SY7000 C10 One Touch Fitting 10 SY7000 Imperial (Inch) M5 10-32Nom SY3000 N3 One Touch Fitting 5/32SY3000 N7 One Touch Fitting 1/4 SY3000 N7T One Touch Fitting 1/4 SY5000 01T

reduces flow setting time

10/32UNF 8 593 AS-FS Series Dimensions: Elbow Type Seal method: Sealant For R, NPT thread Indicator window direction: 0 Indicator window direction: 180 D3 W1 W2 X Y Applicable tubing O.D. d A L4 D1 L3 M L2 L1 T H (Width across flats) Metric Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FS-01-23 (S) 3.2 7.2 13

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

-U10/32-07 7.2 ASR ASQ M5 x 0.8 10/32UNF 8 693 AS-FSG Series Dimensions: Elbow Type Seal method: Sealant For R, NPT thread Indicator window direction: 0 Indicator window direction: 180 D3 W1 W2 X Y Applicable tubing O.D. d A L4 D1 L3 M L2 L1 T H (Width across flats) Metric Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Without auto switch With auto switch Bore size (mm) 32 40 50 Z1 P1 V 38 42 50 V 36.5 40.5 50 W1 60.5 68 82 W1 59 66.5 82 13 13 16 6 6 8 Auto switch shown above is D-A73 type and D-A80 type.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Without auto switch With auto switch Bore size (mm) 32 40 50 Z1 P1 V 38 42 50 W1 60.5 68 82 V 36.5 40.5 50 W1 59 66.5 82 13 13 16 6 6 8 Auto switch shown above is D-A73 type and D-A80 type.

CQ2

V 32 40 50 20.5 M14 X 1.5 28.5 23.5 20.5 M14 X 1.5 28.5 23.5 26 M18 X 1.5 33.5 28.5 Z1 Built-in One-touch fitting (mm) W1 Without auto switch With auto switch Bore size (mm) P1 Z1 W1 60.5 68 82 W1 59 66.5 82 V 38 42 50 V 36.5 40.5 50 13 13 16 6 6 8 32 40 50 Auto switch shown above is D-A73 and D-A80. Refer to p.2.3-20 for auto switch mounting position and mounting height.