3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

more symbols are specified, indicate them alphabetically. (2) 01 [Rc 1/8] 02 [Rc 1/4] 02 [Rc 1/4] 03 [Rc 3/8] VQZ200 VQZ200-S(2) VQZ300 VQZ300-S(2) Note) Symbol R indicates an external pilot.

SZ3000

Press the manifold. 1-3-19 20 Series SZ3000 Dimensions: SZ3000 Plug-in 1 2 SS5Z3-60FD Stations UWith external pilot 2n2One-touch fitting [4(A), 2(B) port] 13.3 (Pitch) P = 10.5 Applicable tubing O.D.: 4 6 13.3 24 24 16.2 16.2 34 17 36.7 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 A 4 A 4 A 4 A 4 A 4 P 1 A 4 A 4 A 4 A 4 X P 1 A 4 2One-touch fitting [1(P), 3(R) port] Applicable tubing

SZ3000

0 (A) 4 (B) 2 (A) 4 (B) 2 4(A) 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 2(B) 5(EA) 1(P) 3(EB) i JIS Symbol 2 position double with back pressure check valve 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 e w t y q o r u !

A

110V No/2 Wire ACCESSORIES SWITCH BANDS FOR SWITCHES D-B7, D-B8, D-G7 ACCESSORIES SWITCH BANDS FOR SWITCHES D-B5, D-B6, D-G5, D-K5 ACCESSORIES SWITCH BANDS FOR SWITCHES D-C75, D-C8, D-H7 BM1-01 3/4 BM1-02 1 BM1-32 1 1/4 BM1-04 1 1/2 BM1-05 2 BM1-06 2 1/2 BA-01 3/4 BA-02 1 BA-32 1 1/4 BA-04 1 1/2 BA-05 2 BA-06 2 1/2 BMA1-020 3/4 BMA2-025 1 BMA2-032 1 1/4 BMA2-040 1 1/2 BMA2-050 2 BMA2-063

Modular Type Filter Regulator Series AW

Symbol Note 1) Drain guide is NPT1/4 (applicable to AW30 to 40) Note 2) Drain guide is G1/4 (applicable to AW30 to 40). 20 30 40 30 40 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 02 03 04 06 1/4 3/8 1/2 3/4 Option Note 3) Option Note 3) Description With bracket Applicable model AW30, 40 AW30, 40 AW30, 40 Symbol Nil B G Note 4) H Description With bracket Applicable model AW20 to 40 AW20 to 40 AW20

One-touch Fittings

Port size Symbol Size 01 1/8" 05 3/16" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Symbol Size M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 00*1 Same diameter tubing 1 Only for Bulkhead union. Spare Parts Use the part number below to order the gasket for M5 thread.

KJ

To reuse the released tube, cut off the damaged portion of the tube. 1. 1. 2.

Precision Regulator

2) 1 1 23 O-ring NBR JISB2401P16 Note 2) JISB2401P16 Note 2) 2 2 24 Seal (A) NBR P36203015 1 P36203015 1 25 Seal (B) NBR P36203016 3 P36203016 3 26 Fixed throttle Stainless steel P36203017 P36202018 1 1 1 1 P36203017 Repair kit no.

VQ4000

thread Rc 1/4: Rc 1/4 thread 2 4 VQZ B A B A 7 SMC SMC SMC SMC SMC SMC B A 2 4 B A B A 6 B A VQD 2 4 B A B A 5 D side B A 6.5 L1 2 4 B A B A 4 B A 2 4 Manual override B A B A 3 B A 4 2 B A A 2 A 4 2 B A A 1 SMC Indicator light A 2 4 R4.5 Stations 12 X 16.5 (External pilot port) Rc 1/8 9 9 106 10 163 43.5 96.5 1(P), 5(R1), 3(R2) port 3-Rc 1/2 SMC (Pilot EXH port) Rc 1/8 1 P 5 3 R2 R1 42 17.5

CNG

2$1@2@4!7 With rubber bumper: CNGBN $6 $0 $7 #2 #1 #3 #6 #9 y #0 $0 @6 q @3 !0 !1 u #4 $5 !5 !4 @5 #5 CL Long stroke CL1 @8@9 @6$3o$2!3r!6i!9@1!8@0#8@9@7 tw MLGC With air cushion: CNGBA %5 %1 ^0 %6 %8$8 %0%7$9%9 %4%2%3^2^1 %6$8 %8 CNG MNB CNA CNS Long stroke CLS Description Material Note Component Parts No. No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

VQZ300 Port size Symbol VQZ200 VZ 1 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 10 M5 thread Rc (PT)1/4 C4 C6 C8 C10 M5 02 Metal seal Rubber seal 1 (P) 3 (R) VT (A) 2 N.O. 2 VT 1 (P) 3 (R) Note 1) Refer to p.2.10-18 for inch size Onetouch fittings. VP (A) 2 N.C. 3 VG 1 (P) 3 (R) Manual override (A) 2 N.O.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

1 i q !4 r e !0 !1 q i !2 o !3 y Component Parts No.

Process Pump

2) Note 2) Note 1, 2) Note 1, 2) Note 1, 2) 1.

Booster Regulator/Air Tank

Description 1 Piston seal 2 large 1 small 2 1 each large and small 2 1 2 Governor assembly 4 3 Check valve 2 4 Gasket 2 Rod seal 5 1 8 8 12 Mounting screw 6 12 7 Cover C assembly 1 Grease pack 1 2 1 2 1 The grease pack has 10 g of grease.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

L1 D L2 L3 L4 L5 L6 L8 Model Port size AS2000E-01 10 4.5 17 16 5 57 30 61.5 40 15.5 1/8 AS2000E-02 12 4.5 23 20 5 59 30 63.5 40 17 1/4 AS3000E-02, 03 5.5 25 26 5.25 69 45.5 76 56 20.6 13.25 1/4, 3/8 Note 1) Reference dimensions AS4000E 2 x 1/4 to 1/2 72 (Max. 80) (1) Effective thread depth 6 2 x M4 x 0.7 664

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(A) 2 (A) 2 2(A) 2(A) 3(R) (P)1 3(R) (P)1 i i 3 (R) 1 (P) 3 (R) 1 (P) u u Component Parts Replacement Parts Description Body Piston plate End cover Piston Spool valve assembly Spool spring No. No. 1 2 3 4 5 6 Description Note White White White Note Part no.

VCC

1 1 1 1 2 1 1 2 1 1 1 2 1 2 2 1 1 1 1 1 3 2 3 VCC12-1A-1 (for VCC12-00) 1 set unit VCC12(D)-00 (dedicated) Orifice body assembly VCC12D-1A-1 (for VCC12D-00) VNA 1 set unit VNB O-ring assembly 1 set unit VCC12-OR-1 SGC O-ring assembly Orifice assembly 1 set unit VCC12-OR-4 SGH 1 set unit VCC13-1A-1 VNC VCC13-00 (dedicated) 1 set unit VNH O-ring assembly VCC13-OR-1 O-ring assembly 1 set unit

Booster Regulator/Air Tank

Description Piston seal 1 2 large 1 small 2 1 each large and small 2 1 2 Governor assembly 4 3 Check valve 2 4 Gasket 2 Rod seal 5 1 8 8 12 6 Mounting screw 12 7 Cover C assembly 1 Grease pack 1 1 2 1 2 The grease pack has 10 g of grease.

Modular Type Air Filters Series AF

Example) AF30-03B-2R-X430 X430 X440 Low temperature High temperature Symbol 30 40 50 60 20 Body size Description 30 40 50 60 Body size Description Symbol Nil N Note 1) Rc NPT G F Note 2) Thread type Nil N Note 1) Rc NPT G + F Note 2) Thread type 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 + 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Port size Port size + + Without mounting option With bracket Nil B Note