5 Port Solenoid Valve SY Series

SGP10A x 1 m AS420-03 AN200-02 Series CS1 SGP10A x 1 m AS420-03 AN300-03 SY9120-03 Tubing bore x Length Speed controller Silencer SY7140-03 Tubing bore x Length Speed controller Silencer SY9140-04 Tubing bore x Length Speed controller Silencer SGP15A x 1 m AS420-04 AN400-04 Features 1 Valve Variations Note 1) Electrical entry Actuation Voltage Light/surge voltage suppressor 2 position 3

Series IDG

8, 1/4 1/2 3/8, 1/2 0.25 (0.31) 0.43 (0.51) 0.66 (0.76) 0.74 (0.87) 0.77 (0.90) 1.50 (1.65) 1.50 (1.65) 1.55 (1.70) Note 1) With no freezing.

IDG

IDG60S to IDG100S IDG3 to IDG50 IDG3H to IDG50H IDG30L, IDG50L Port size Symbol Bore Size V IDG60 to IDG100 IDG60H to IDG100H IDG60L to IDG100L 3 5 10 20 30 50 60 75 100 01 1/8 02 1/4 IDG60S to IDG100S Note) Note) 03 3/8 04 1/2 Note 1) Element service indicator is also available. Refer to Made to Order Specifications on page 14-19-48.

Series AS-FM/AS-M/ASD-FM

100 200 205 Inch size M5 standard 1/8 standard 1/4 standard 3.2 23 04 06 08 01 03 05 07 09 1/8" 5/32" 3/16" 1/4" 5/16" 4 6 8 Use a 1/8" tube.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

-6 YNT-1210S k FVD5.5-8 l FVD8-6 DH-111 DH121 m FVD14-8 DH-112 DH122 YF-1 E-4 YNE-38 n FVD22-8 DH-113 DH123 (Note 1)p R38-8 YPT-60-21 TD-112 TD-124 YF-1 E-4 YET-60-1 q FVD2-6 YNT-1614 Note 1.

VFRA3000

(2.5)] VFRA4311-04 3 8 VFRA4411-03 3 position exhaust center 1.2 1 8 PA, B: 51 (2.8) A, BEA, EB: 57.6 (3.2) [A, BEA, EB: 45 (2.5)] 1 2 VFRA4411-04 3 8 65 (3.6) [PA, B: 30.6 (1.7)] VFRA4511-03 3 position pressure center 1.2 1 8 VFRA4511-04 1 2 67 (3.7) [PA, B: 30.6 (1.7)] ( ): in case of normal position.

CNA

MM N P Q H S T V W ZZ f h 40 50 63 80 100 40 50 63 80 100 11 27 1/4 37 to 39.5 51 153 37.5 9 8 215 20 to 500 43 11.2 59 1/4 stroke 223 M14 x 1.5 1/4 stroke 11 30 3/8 42 to 44.5 58 168 44 11 0 237 20 to 600 52 11.2 66 245 M18 x 1.5 14 31 3/8 50 to 51.5 58 182 52.5 12 0 254 20 to 600 52 11.2 66 1/4 stroke 262 M18 x 1.5 17 37 1/2 59.5 to 62.5 71 218 59.5 15 0 306 20 to 750 65 12.5 80 1/4 stroke

CNA

100 MM N J K KA A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 P 1/4 3/8 3/8 1/2 1/2 M14 x 1.5 27 30 31 37 40 6 7 7 11 11 M8 x 1.25 14 18 18 22 26 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 96 108 115 139 160 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/4 1/4 1/4 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 85 95 102 123 144 15 17 17 21 21 52 16 20 20 20 22 12 13 18

VS7-6

Port size P, A, B R1, R2 Piping Model Side Side Bottom Bottom 1 4 3 8 VS7-1-A02 VS7-1-A03 VS7-1-B02 VS7-1-B03 3 8 1 4 3 8 3 8 1.19-8 Series VS7-6 Manifold Manifold: Series VV71 Standard Specifications SV ISO size q Series ISO size q 1 to 10 Manifold block size Applicable solenoid valve Number of stations SY 1 4 3 8 One-touch fitting: 12 1 4 3 8 A, B-port P, R1, R2-port One-touch fitting:

3 Port Solenoid Valve/

M12 connector pin number 1(P) 1(P) Safety limit switch Made by Rockwell Automation Symbol Pin Numbers (Built-in switch 3N.C.)

90

to 5 VDC Approx. 1 k 10 to 24 VDC 10%, Ripple (P-P) 10% or less 15 mA or less 2% F.S.

LVQ

Metric sizes Inch sizes Body Class Type LQ-GP J PAX 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 4 04 04 04 04 6 06 06 06 8 08 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J PB Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

cenler .1&t*080 PEEA A P B EBPE Main Parts No.

-fl Seies

cenler .1&t*080 PEEA A P B EBPE Main Parts No.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

1.

3

Symbol Rated flow range With/without flow adjustment valve 04 Bracket (Option) 20 40 11 21 $ $ 1 1/4 1 1/2 Nil $ $ $ $ $ $ $ $ None Nil None S Yes Bracket Note 1) 100 and 250 L/min types with flow adjustment Integrated display Output specification/Temperature sensor valves are not available.

Clean Room Rodless Cylinder Series CYP ø15, ø32

50 LW 69 115 P M5 x 0.8 Rc 1/8 LD 5.6 8.6 Model CYP15 CYP32 Note 1) These dimension drawings indicate the case of piping port location Nil.

Vacuum System Peripherals:

Connection NPT 1/8 N01 Connection NPT 1/4 N02 Port size Connection NPT 3/8 N03 Applicable model IRV1000 Option Connection NPT 1/2 N04 Size Symbol IRV3000 IRV2000 Connection G 1/8 F01 01 02 03 04 1/8 1/4 3/8 1/2 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 13-14-2 3 Vacuum System Peripherals: Electronic Vacuum Regulator: ITV209 Specifications ITV2090 ITV2091 Model 24 VDC

Hand Valve Series VH 1

(134) M8 x 1.25 M8 x 1.25 107.5 105.5 1 (P) 3 (R) 1 (P) 3 (R) 17 25 19 2 4-Rc 1/4, 3/8, 1/2 4-Rc 3/4 VH42-06 (Bottom ported) VH42-02 to 04 (Bottom ported) 2 (A) 2 (A) 46 54 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-Rc 3/4 4-Rc 1/4, 3/8, 1/2 5-8-11 6 Series VH Dimensions: Body Mounted VH600-06/10 2 (A) 4 (B) 32 1 (P) 132 152 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

Hand Valve Series VH

) 1 (P) 3 (R) 1 (P) 88 102 89 4-6.6 4-6.6 88 81 94 148(191) 144(191) 97(145) 97(145) 8 (10) M50 x 1.5 M50 x 1.5 8 (10) M8 x 1.25 M8 x 1.25 125(136) 123(134) 67 1.5 65 1.5 105.5 3 (R) 3 (R) 1 (P) 1 (P) 25 17 2 4-Rc 1/4, 3/8, 1/2 4-Rc 3/4 VH43-02 to 04 (Bottom ported) VH43-06 (Bottom ported) 2 (A) 2 (A) 54 46 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-Rc 3/4 4-Rc 1/4, 3/8, 1/2 5-8-14 Hand